[Scan]
initial_time=2016-01-15T22:26:19
final_time=2016-01-15T22:26:38
ip_count=19
run=1023
dataset=3
scan=171
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08777E-4
ql1_vset=
ql1_vmon=-8.18586E-1
ql1_imon=8.10444E-10
ql2_vset=
ql2_vmon=-7.99036E-1
ql2_imon=3.52573E-10
ql3_vset=
ql3_vmon=-9.13169E0
ql3_imon=7.56168E-10
ql4_vset=
ql4_vmon=-9.14295E0
ql4_imon=6.39343E-10
mult1=-1.01257E-8
mult2=-2.7266E-9
rf_tmon=-4.13991E-3
rf_agc=3.35138E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=4.11248E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6143E0
bslens_imon=2.35567E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19642E1
lens5a_imon=1.98368E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12541E2
lens4a_imon=2.05277E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54187E1
cs_ef1b_imon=2.8508E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02312E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04457E1
cs_ea1_imon=2.53406E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35781E0
lens1_imon=2.66714E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65083E1
os_ef1alow_imon=2.98162E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03832E1
cs_ea2_imon=1.55117E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=2.94882E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=4.28498E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1158E1
os_restr1_imon=2.8234E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15223E1
os_ea1_imon=1.87821E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63617E1
os_ef1bup_imon=3.08758E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24325E0
cs_ionrep_imon=1.19015E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91954E2
cs_nozzle_imon=1.93827E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=3.00901E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20396E0
olens4_imon=8.16953E-10
tplens_vset=1.4E-1
tplens_vmon=1.62197E0
tplens_imon=-2.2456E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25761E1
iondef3_imon=1.50586E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26945E1
iondef2_imon=1.57205E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03031E2
lens6_imon=2.9808E-4
ql6_vset=1.0E-1
ql6_vmon=9.48668E-2
ql6_imon=4.75585E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25446E0
ionrepsh_imon=1.79999E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33127E1
lens5b_imon=2.16171E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.13299E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.16821E-1
os_ea2_imon=-5.71422E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71432E1
cs_ef2a_imon=3.14596E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64441E0
os_ef2alow_imon=-2.46093E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.80005E-1
os_ef2bup_imon=-5.27923E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11123E1
os_restr2_imon=2.85692E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.30247E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.241E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73189E1
iondef1_imon=1.13316E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68316E1
iondef4_imon=1.10287E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.21748E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=3.25072E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.91313E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47316E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56513E1
einzel_imon=7.82479E-6
window_vset=0.0E0
window_vmon=2.28154E-1
window_imon=-7.13005E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82704E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86734E1
mask2_imon=-5.40015E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.46304E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.73038E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=6.98522E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49414E0
defgridb_imon=6.14284E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33888E1
os_fil1_imon=4.41583E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.79154E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66396E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30667E1
cs_fil1_imon=9.95392E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62852E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67324E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.26895E-2
os_fil2_imon=-2.55785E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.51793E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.70529E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.13739E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50011E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22411E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.72817E-1
res40_imon=-2.4393E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.1861E-1	-7.98583E-1	-9.13172E0	-9.14319E0	5.38826E-3	9.46045E-2	2.73352E1	-3.26526E1	-3.2636E1	2.68418E1	1.20174E-7	2.52099E-3	2.52099E-3	6.28552E-3	3.01085E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.18801E-1	-7.98965E-1	-9.13162E0	-9.14316E0	5.45979E-3	9.44614E-2	2.7318E1	-3.26542E1	-3.25899E1	2.6816E1	1.20293E-7	2.51814E-3	2.51814E-3	6.33388E-3	2.99594E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.18419E-1	-7.99036E-1	-9.13169E0	-9.14328E0	5.31673E-3	9.45091E-2	2.7324E1	-3.26484E1	-3.26231E1	2.68118E1	1.20403E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.00144E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.18753E-1	-7.98821E-1	-9.13172E0	-9.14304E0	5.76973E-3	9.45568E-2	2.73387E1	-3.26675E1	-3.26428E1	2.68749E1	1.19953E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.18419E-1	-7.99108E-1	-9.13148E0	-9.14297E0	5.57899E-3	9.46522E-2	2.73442E1	-3.26657E1	-3.25978E1	2.68166E1	1.19913E-7	2.50789E-3	2.50789E-3	6.28552E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.18777E-1	-7.99108E-1	-9.13153E0	-9.14297E0	6.03199E-3	9.46999E-2	2.73207E1	-3.26446E1	-3.25828E1	2.68304E1	1.19809E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.18872E-1	-7.99084E-1	-9.1316E0	-9.14302E0	5.8651E-3	9.4533E-2	2.73063E1	-3.26945E1	-3.25797E1	2.68833E1	1.19705E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.18801E-1	-7.98798E-1	-9.1316E0	-9.14319E0	6.17504E-3	9.46283E-2	2.73247E1	-3.26713E1	-3.2673E1	2.68233E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.19016E-1	-7.98774E-1	-9.13181E0	-9.14328E0	5.88894E-3	9.4676E-2	2.73305E1	-3.26521E1	-3.26413E1	2.686E1	1.19967E-7	2.5165E-3	2.5165E-3	6.32273E-3	3.00878E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09325E0	-8.18801E-1	-7.99012E-1	-9.132E0	-9.14342E0	6.05583E-3	9.45091E-2	2.73333E1	-3.26897E1	-3.25899E1	2.68394E1	1.20171E-7	2.51296E-3	2.51296E-3	6.33648E-3	2.97066E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0934E0	-8.18491E-1	-7.99108E-1	-9.13169E0	-9.14319E0	5.60284E-3	9.47475E-2	2.73576E1	-3.27003E1	-3.2652E1	2.68224E1	1.20137E-7	2.51804E-3	2.51804E-3	6.3074E-3	2.96448E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09348E0	-8.18539E-1	-7.99227E-1	-9.1316E0	-9.1434E0	5.62668E-3	9.4986E-2	2.73171E1	-3.26699E1	-3.2653E1	2.68341E1	1.20055E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.97647E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.1861E-1	-7.99417E-1	-9.1316E0	-9.14319E0	6.07967E-3	9.46283E-2	2.73216E1	-3.26638E1	-3.26213E1	2.68815E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.99E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09364E0	-8.18706E-1	-7.99298E-1	-9.1316E0	-9.14319E0	6.07967E-3	9.47475E-2	2.73568E1	-3.26717E1	-3.26062E1	2.6798E1	1.20174E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.02396E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09356E0	-8.18777E-1	-7.99513E-1	-9.13184E0	-9.1433E0	5.65052E-3	9.48668E-2	2.73279E1	-3.26987E1	-3.26098E1	2.68268E1	1.20209E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.01738E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09364E0	-8.18634E-1	-7.99227E-1	-9.13188E0	-9.14319E0	5.45979E-3	9.4676E-2	2.73063E1	-3.26248E1	-3.26338E1	2.68316E1	1.19757E-7	2.51771E-3	2.51771E-3	6.28552E-3	3.00563E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.18896E-1	-7.9937E-1	-9.13155E0	-9.14345E0	5.55515E-3	9.45568E-2	2.73261E1	-3.26963E1	-3.26404E1	2.68394E1	1.20122E-7	2.52318E-3	2.52318E-3	6.34037E-3	2.98481E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09364E0	-8.18706E-1	-7.99298E-1	-9.13177E0	-9.14316E0	5.8651E-3	9.46999E-2	2.73029E1	-3.26875E1	-3.25896E1	2.68451E1	1.19757E-7	2.52209E-3	2.52209E-3	6.30192E-3	2.9926E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-8.18872E-1	-7.99346E-1	-9.13157E0	-9.14311E0	5.96046E-3	9.48668E-2	2.73387E1	-3.26651E1	-3.26512E1	2.68556E1	1.20226E-7	2.51886E-3	2.51886E-3	6.3282E-3	3.00741E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-8.18586E-1	-7.99036E-1	-9.13169E0	-9.14295E0	5.8651E-3	9.48668E-2	2.73189E1	-3.26945E1	-3.25761E1	2.68316E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01738E-1