[Scan]
initial_time=2016-01-15T22:26:45
final_time=2016-01-15T22:27:05
ip_count=19
run=1023
dataset=3
scan=172
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08758E-4
ql1_vset=
ql1_vmon=-8.1861E-1
ql1_imon=8.23891E-10
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=3.61907E-10
ql3_vset=
ql3_vmon=-9.13181E0
ql3_imon=7.30371E-10
ql4_vset=
ql4_vmon=-9.14307E0
ql4_imon=6.62923E-10
mult1=-9.40478E-9
mult2=-2.86632E-9
rf_tmon=-4.14964E-3
rf_agc=3.38518E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=4.44806E-10
bslens_vset=-6.2E0
bslens_vmon=-6.7106E0
bslens_imon=2.44042E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19773E1
lens5a_imon=1.99317E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05089E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54145E1
cs_ef1b_imon=2.87206E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04649E2
lens23_imon=1.02352E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0488E1
cs_ea1_imon=2.51697E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39359E0
lens1_imon=2.56299E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65167E1
os_ef1alow_imon=2.96901E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03895E1
cs_ea2_imon=1.52128E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=2.97441E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=4.83489E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1125E1
os_restr1_imon=2.84755E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14879E1
os_ea1_imon=1.89475E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.071E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21365E0
cs_ionrep_imon=1.20044E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9195E2
cs_nozzle_imon=1.93644E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01689E1
cs_anode1_imon=2.99387E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=8.25059E-10
tplens_vset=1.4E-1
tplens_vmon=1.63362E0
tplens_imon=-1.80383E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26938E1
iondef3_imon=1.51731E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26472E1
iondef2_imon=1.56778E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03021E2
lens6_imon=2.9814E-4
ql6_vset=1.0E-1
ql6_vmon=9.45568E-2
ql6_imon=4.91238E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2521E0
ionrepsh_imon=1.7967E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33742E1
lens5b_imon=2.19612E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75048E1
cs_ef2b_imon=3.14488E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.42711E-1
os_ea2_imon=-4.43544E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00565E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70963E1
cs_ef2a_imon=3.17047E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6372E0
os_ef2alow_imon=-2.46453E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84209E-1
os_ef2bup_imon=-5.27923E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11322E1
os_restr2_imon=2.858E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.231E2
cs_ionfoca_imon=6.29784E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01575E1
cs_anode2_imon=2.2565E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73281E1
iondef1_imon=1.13194E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68484E1
iondef4_imon=1.09891E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.32975E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=3.06737E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12534E0
cs_ionaccel_imon=-1.51309E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02136E2
cs_ionfocb_imon=1.4719E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56471E1
einzel_imon=7.77794E-6
window_vset=0.0E0
window_vmon=2.41369E-1
window_imon=-8.24728E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82698E2
mask1_imon=2.39491E-4
mask2_vset=0.0E0
mask2_vmon=-1.86446E1
mask2_imon=-7.995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=6.87091E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.60774E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.10883E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39856E0
defgridb_imon=6.27609E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33898E1
os_fil1_imon=4.54797E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.71946E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66295E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30684E1
cs_fil1_imon=9.98456E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6427E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67388E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.32476E-2
os_fil2_imon=-2.40768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.05853E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.87706E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32241E-1
cs_fil2_imon=-2.14339E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19628E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22378E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.69503E-1
res40_imon=-2.56184E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.19325E-1	-7.99179E-1	-9.13219E0	-9.14357E0	5.62668E-3	9.4533E-2	2.73552E1	-3.26644E1	-3.25989E1	2.68708E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01085E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.18872E-1	-7.99322E-1	-9.13203E0	-9.14366E0	5.76973E-3	9.46522E-2	2.73314E1	-3.26707E1	-3.26511E1	2.68364E1	1.19953E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.18872E-1	-7.99251E-1	-9.13198E0	-9.14328E0	5.76973E-3	9.44138E-2	2.72927E1	-3.26679E1	-3.26012E1	2.6849E1	1.19872E-7	2.51248E-3	2.51248E-3	6.31299E-3	2.99879E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.19087E-1	-7.99346E-1	-9.13179E0	-9.14316E0	5.55515E-3	9.45091E-2	2.72856E1	-3.26685E1	-3.26242E1	2.68394E1	1.20004E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.01995E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.18801E-1	-7.99036E-1	-9.13208E0	-9.14342E0	5.45979E-3	9.4533E-2	2.73339E1	-3.26554E1	-3.2623E1	2.68112E1	1.19913E-7	2.51443E-3	2.51443E-3	6.3514E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.18682E-1	-7.99227E-1	-9.13174E0	-9.14321E0	5.57899E-3	9.46045E-2	2.73321E1	-3.26699E1	-3.25791E1	2.68505E1	1.20174E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.18729E-1	-7.98869E-1	-9.132E0	-9.14295E0	5.72205E-3	9.46522E-2	2.73222E1	-3.26603E1	-3.26236E1	2.68569E1	1.20004E-7	2.52061E-3	2.52061E-3	6.35059E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.19087E-1	-7.98845E-1	-9.13188E0	-9.14333E0	5.6982E-3	9.43422E-2	2.73151E1	-3.26437E1	-3.26189E1	2.68609E1	1.20137E-7	2.51804E-3	2.51804E-3	6.33538E-3	2.99348E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.18586E-1	-7.98965E-1	-9.13172E0	-9.14311E0	5.45979E-3	9.47952E-2	2.73069E1	-3.26626E1	-3.26354E1	2.68052E1	1.19749E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.99686E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.19016E-1	-7.99203E-1	-9.13162E0	-9.14295E0	5.74589E-3	9.48191E-2	2.73514E1	-3.26536E1	-3.2644E1	2.68448E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.18968E-1	-7.98869E-1	-9.13143E0	-9.14347E0	5.79357E-3	9.45807E-2	2.73946E1	-3.27552E1	-3.25755E1	2.68623E1	1.20106E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.9943E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.18944E-1	-7.99155E-1	-9.13179E0	-9.14354E0	5.98431E-3	9.46522E-2	2.73147E1	-3.26825E1	-3.26086E1	2.68274E1	1.19913E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.9926E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.18944E-1	-7.98941E-1	-9.13172E0	-9.14342E0	5.62668E-3	9.41753E-2	2.73454E1	-3.27041E1	-3.26236E1	2.68737E1	1.20226E-7	2.52757E-3	2.52757E-3	6.32936E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09379E0	-8.19016E-1	-7.99012E-1	-9.13148E0	-9.14314E0	6.03199E-3	9.44614E-2	2.73163E1	-3.26278E1	-3.26673E1	2.68655E1	1.19809E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.01871E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09387E0	-8.18968E-1	-7.99322E-1	-9.13162E0	-9.1433E0	5.81741E-3	9.43184E-2	2.73326E1	-3.27025E1	-3.26052E1	2.68063E1	1.20158E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.99941E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-8.18634E-1	-7.99179E-1	-9.13172E0	-9.14297E0	5.93662E-3	9.43899E-2	2.73505E1	-3.26614E1	-3.2577E1	2.68696E1	1.20084E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.00676E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.18634E-1	-7.98655E-1	-9.13186E0	-9.14292E0	5.98431E-3	9.47475E-2	2.73694E1	-3.26456E1	-3.26884E1	2.67932E1	1.20004E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.9892E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.18586E-1	-7.98702E-1	-9.13169E0	-9.14316E0	5.88894E-3	9.44614E-2	2.73098E1	-3.26685E1	-3.26431E1	2.68215E1	1.19978E-7	2.51581E-3	2.51581E-3	6.31299E-3	2.99613E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.18849E-1	-7.98607E-1	-9.13184E0	-9.14347E0	5.84126E-3	9.4533E-2	2.73812E1	-3.27517E1	-3.25812E1	2.68569E1	1.19902E-7	2.52492E-3	2.52492E-3	6.29665E-3	3.02769E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.1861E-1	-7.98583E-1	-9.13181E0	-9.14307E0	5.8651E-3	9.45568E-2	2.73281E1	-3.26472E1	-3.26938E1	2.68484E1	1.20209E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.9943E-1