[Scan]
initial_time=2016-01-15T22:27:39
final_time=2016-01-15T22:27:58
ip_count=19
run=1023
dataset=3
scan=174
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08839E-4
ql1_vset=
ql1_vmon=-8.18682E-1
ql1_imon=7.53033E-10
ql2_vset=
ql2_vmon=-7.99036E-1
ql2_imon=3.74937E-10
ql3_vset=
ql3_vmon=-9.13172E0
ql3_imon=6.84476E-10
ql4_vset=
ql4_vmon=-9.14338E0
ql4_imon=6.58011E-10
mult1=-9.921E-9
mult2=-2.58088E-9
rf_tmon=-1.92287E-3
rf_agc=3.58871E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=4.37021E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65893E0
bslens_imon=2.31785E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19154E1
lens5a_imon=2.00182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.05082E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53771E1
cs_ef1b_imon=2.86957E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.0197E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04622E1
cs_ea1_imon=2.56347E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41041E0
lens1_imon=2.77568E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64684E1
os_ef1alow_imon=2.97835E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03396E1
cs_ea2_imon=1.52957E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84782E1
cs_ef1a_imon=2.95507E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=4.57287E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11546E1
os_restr1_imon=2.84838E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15101E1
os_ea1_imon=1.89691E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63815E1
os_ef1bup_imon=3.08017E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24429E0
cs_ionrep_imon=1.20837E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91924E2
cs_nozzle_imon=1.93575E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02134E1
cs_anode1_imon=3.01484E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=8.23689E-10
tplens_vset=1.4E-1
tplens_vmon=1.63482E0
tplens_imon=-3.28186E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26464E1
iondef3_imon=1.52308E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26885E1
iondef2_imon=1.55877E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.98025E-4
ql6_vset=1.0E-1
ql6_vmon=9.4223E-2
ql6_imon=5.05602E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26111E0
ionrepsh_imon=1.80427E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3361E1
lens5b_imon=2.15971E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74704E1
cs_ef2b_imon=3.1184E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.15674E-1
os_ea2_imon=-6.88681E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00349E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70928E1
cs_ef2a_imon=3.16879E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60249E0
os_ef2alow_imon=-2.46685E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.45681E-1
os_ef2bup_imon=-5.28528E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11135E1
os_restr2_imon=2.86019E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.30902E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01624E1
cs_anode2_imon=2.26801E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73231E1
iondef1_imon=1.11428E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6825E1
iondef4_imon=1.11249E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.32782E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=3.15106E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12609E0
cs_ionaccel_imon=-1.67797E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47285E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56104E1
einzel_imon=7.82685E-6
window_vset=0.0E0
window_vmon=2.41433E-1
window_imon=-8.47382E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82688E2
mask1_imon=2.39282E-4
mask2_vset=0.0E0
mask2_vmon=-1.86379E1
mask2_imon=-6.90995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.53061E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93752E3
defgrida_imon=6.32295E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.33955E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.1369E0
defgridb_imon=5.94804E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33891E1
os_fil1_imon=4.33345E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.46118E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66448E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30687E1
cs_fil1_imon=9.95673E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63623E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67612E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.16999E-2
os_fil2_imon=-2.47225E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.82899E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.84999E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33522E-1
cs_fil2_imon=-2.24636E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2231E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22472E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.03286E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40018E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.53414E-1
res40_imon=-2.51898E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.18586E-1	-7.98917E-1	-9.13177E0	-9.14321E0	5.48363E-3	9.45568E-2	2.73442E1	-3.26705E1	-3.25828E1	2.68478E1	1.20174E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.18777E-1	-7.99203E-1	-9.13184E0	-9.1433E0	5.96046E-3	9.46045E-2	2.73155E1	-3.26432E1	-3.26272E1	2.68238E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.03185E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.18443E-1	-7.98774E-1	-9.13181E0	-9.14309E0	6.00815E-3	9.42945E-2	2.73486E1	-3.26538E1	-3.26486E1	2.68128E1	1.20137E-7	2.51359E-3	2.51359E-3	6.31299E-3	3.00942E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.19087E-1	-7.98893E-1	-9.13179E0	-9.1434E0	6.24657E-3	9.44138E-2	2.73393E1	-3.26738E1	-3.27045E1	2.68435E1	1.19891E-7	2.51709E-3	2.51709E-3	6.31798E-3	2.98092E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.19182E-1	-7.99203E-1	-9.13153E0	-9.14342E0	5.81741E-3	9.43184E-2	2.73159E1	-3.2641E1	-3.25215E1	2.68174E1	1.19851E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.96634E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.18801E-1	-7.98965E-1	-9.13143E0	-9.14333E0	5.81741E-3	9.45091E-2	2.73339E1	-3.26741E1	-3.27269E1	2.68648E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.97187E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.18729E-1	-7.98941E-1	-9.13177E0	-9.14309E0	6.22272E-3	9.45807E-2	2.73303E1	-3.26609E1	-3.25858E1	2.68358E1	1.20278E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.97704E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.18944E-1	-7.9937E-1	-9.1316E0	-9.14288E0	6.05583E-3	9.46522E-2	2.73098E1	-3.26649E1	-3.27115E1	2.68749E1	1.20069E-7	2.52428E-3	2.52428E-3	6.32386E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.18658E-1	-7.99227E-1	-9.13177E0	-9.14316E0	5.91278E-3	9.44853E-2	2.73213E1	-3.2653E1	-3.25647E1	2.68208E1	1.20106E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.01223E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.1861E-1	-7.98869E-1	-9.13181E0	-9.14314E0	5.93662E-3	9.44138E-2	2.73316E1	-3.26762E1	-3.27334E1	2.68178E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.18896E-1	-7.9906E-1	-9.13157E0	-9.14342E0	5.8651E-3	9.45568E-2	2.73333E1	-3.27023E1	-3.25395E1	2.68163E1	1.20209E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.98156E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.18777E-1	-7.99084E-1	-9.13174E0	-9.14321E0	5.74589E-3	9.44853E-2	2.73694E1	-3.26825E1	-3.26567E1	2.69506E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.96671E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.19016E-1	-7.99036E-1	-9.13167E0	-9.14323E0	5.93662E-3	9.46522E-2	2.73246E1	-3.26838E1	-3.26006E1	2.68046E1	1.19757E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.97445E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09627E0	-8.19159E-1	-7.99441E-1	-9.13177E0	-9.1434E0	6.07967E-3	9.45091E-2	2.73198E1	-3.26891E1	-3.25446E1	2.68352E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09627E0	-8.19159E-1	-7.9906E-1	-9.13198E0	-9.14292E0	5.98431E-3	9.42945E-2	2.73482E1	-3.26732E1	-3.26986E1	2.68202E1	1.19757E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.19111E-1	-7.99131E-1	-9.13196E0	-9.14299E0	5.91278E-3	9.42945E-2	2.73604E1	-3.26717E1	-3.26254E1	2.68484E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.03286E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.18896E-1	-7.99012E-1	-9.13181E0	-9.14309E0	5.88894E-3	9.43422E-2	2.73405E1	-3.26591E1	-3.26206E1	2.68304E1	1.20226E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.19111E-1	-7.9937E-1	-9.13155E0	-9.14347E0	5.8651E-3	9.45568E-2	2.73399E1	-3.26738E1	-3.258E1	2.6858E1	1.20036E-7	2.52134E-3	2.52134E-3	6.31012E-3	3.00637E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.18515E-1	-7.98893E-1	-9.13196E0	-9.14338E0	5.76973E-3	9.43899E-2	2.73393E1	-3.26724E1	-3.25605E1	2.68124E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.18682E-1	-7.99036E-1	-9.13172E0	-9.14338E0	5.74589E-3	9.4223E-2	2.73231E1	-3.26885E1	-3.26464E1	2.6825E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.03286E-1