[Scan]
initial_time=2016-01-15T22:28:59
final_time=2016-01-15T22:29:18
ip_count=19
run=1023
dataset=3
scan=177
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08774E-4
ql1_vset=
ql1_vmon=-8.18491E-1
ql1_imon=7.74288E-10
ql2_vset=
ql2_vmon=-7.99012E-1
ql2_imon=3.47185E-10
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=6.28448E-10
ql4_vset=
ql4_vmon=-9.14314E0
ql4_imon=6.56354E-10
mult1=-9.8065E-9
mult2=-2.77074E-9
rf_tmon=-5.14601E-3
rf_agc=3.32059E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=4.62425E-10
bslens_vset=-6.2E0
bslens_vmon=-6.75266E0
bslens_imon=2.37913E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19719E1
lens5a_imon=1.99965E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.04981E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53957E1
cs_ef1b_imon=2.86471E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.02107E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04814E1
cs_ea1_imon=2.5267E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38097E0
lens1_imon=2.85138E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64898E1
os_ef1alow_imon=2.99156E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04081E1
cs_ea2_imon=1.53137E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84556E1
cs_ef1a_imon=2.94881E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=4.83811E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11459E1
os_restr1_imon=2.83621E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15378E1
os_ea1_imon=1.88538E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63728E1
os_ef1bup_imon=3.07739E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21425E0
cs_ionrep_imon=1.19251E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91943E2
cs_nozzle_imon=1.93478E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01943E1
cs_anode1_imon=3.01136E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20432E0
olens4_imon=8.98623E-10
tplens_vset=1.4E-1
tplens_vmon=1.59277E0
tplens_imon=-1.62358E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25054E1
iondef3_imon=1.47766E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26548E1
iondef2_imon=1.57643E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02995E2
lens6_imon=2.98194E-4
ql6_vset=1.0E-1
ql6_vmon=9.4533E-2
ql6_imon=4.9969E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28935E0
ionrepsh_imon=1.81508E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33754E1
lens5b_imon=2.16116E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74548E1
cs_ef2b_imon=3.14203E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.84168E-1
os_ea2_imon=-7.28335E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00742E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71437E1
cs_ef2a_imon=3.16219E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.58569E0
os_ef2alow_imon=-2.51203E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.30043E-1
os_ef2bup_imon=-5.13932E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11019E1
os_restr2_imon=2.86471E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.2809E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02E1
cs_anode2_imon=2.25202E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73412E1
iondef1_imon=1.10815E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68196E1
iondef4_imon=1.09615E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.34337E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=3.86095E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14288E0
cs_ionaccel_imon=-1.78918E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.4756E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56353E1
einzel_imon=7.96934E-6
window_vset=0.0E0
window_vmon=2.69235E-1
window_imon=-7.605E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82729E2
mask1_imon=2.39056E-4
mask2_vset=0.0E0
mask2_vmon=-1.86483E1
mask2_imon=-7.43124E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.44409E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.78799E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.48735E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.70834E0
defgridb_imon=6.14631E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3388E1
os_fil1_imon=4.2929E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.15623E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66704E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30689E1
cs_fil1_imon=9.95389E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62864E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67542E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1313E-2
os_fil2_imon=-2.54755E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.00275E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58188E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33273E-1
cs_fil2_imon=-2.0726E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22889E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.225E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.02922E-1
chamber_ion_pmon=1.20278E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.81795E-1
res40_imon=-2.37649E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.18896E-1	-7.99036E-1	-9.13198E0	-9.14288E0	5.67436E-3	9.42469E-2	2.73202E1	-3.26619E1	-3.2633E1	2.67914E1	1.19705E-7	2.51225E-3	2.51225E-3	6.34588E-3	2.9926E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.18992E-1	-7.98845E-1	-9.13184E0	-9.14276E0	5.96046E-3	9.44614E-2	2.72964E1	-3.26747E1	-3.25611E1	2.68803E1	1.20192E-7	2.51498E-3	2.51498E-3	6.32858E-3	2.99845E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.18682E-1	-7.99227E-1	-9.13217E0	-9.14283E0	5.76973E-3	9.45807E-2	2.73329E1	-3.27048E1	-3.26469E1	2.68412E1	1.20262E-7	2.51498E-3	2.51498E-3	6.3074E-3	3.00251E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.18801E-1	-7.99036E-1	-9.13215E0	-9.14283E0	5.88894E-3	9.41992E-2	2.73075E1	-3.26432E1	-3.26425E1	2.68641E1	1.20243E-7	2.51814E-3	2.51814E-3	6.32858E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.18443E-1	-7.98965E-1	-9.13188E0	-9.14311E0	5.93662E-3	9.45807E-2	2.73393E1	-3.26272E1	-3.26819E1	2.68316E1	1.20069E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.19254E-1	-7.99084E-1	-9.13188E0	-9.14326E0	5.81741E-3	9.45568E-2	2.73538E1	-3.26561E1	-3.2593E1	2.6849E1	1.20297E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.00144E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.1923E-1	-7.98774E-1	-9.13165E0	-9.14342E0	5.76973E-3	9.44614E-2	2.73369E1	-3.26855E1	-3.25894E1	2.68166E1	1.20311E-7	2.51203E-3	2.51203E-3	6.30202E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.19135E-1	-7.99012E-1	-9.13179E0	-9.14333E0	5.76973E-3	9.47237E-2	2.73369E1	-3.26897E1	-3.26777E1	2.68647E1	1.20297E-7	2.51804E-3	2.51804E-3	6.36349E-3	3.00676E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.18729E-1	-7.99203E-1	-9.13205E0	-9.14323E0	6.12736E-3	9.48429E-2	2.73263E1	-3.26691E1	-3.24219E1	2.68659E1	1.19851E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.9841E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.19039E-1	-7.9937E-1	-9.13215E0	-9.14302E0	5.98431E-3	9.41992E-2	2.73087E1	-3.26416E1	-3.26416E1	2.68146E1	1.19965E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.96414E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.1892E-1	-7.99203E-1	-9.13188E0	-9.14323E0	5.88894E-3	9.41753E-2	2.72962E1	-3.26933E1	-3.26903E1	2.68292E1	1.20122E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.19063E-1	-7.98702E-1	-9.13181E0	-9.14323E0	5.98431E-3	9.45807E-2	2.73841E1	-3.26536E1	-3.2615E1	2.6819E1	1.20158E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01223E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.19087E-1	-7.98798E-1	-9.13165E0	-9.14321E0	5.76973E-3	9.46999E-2	2.73111E1	-3.26176E1	-3.26561E1	2.68322E1	1.20031E-7	2.52362E-3	2.52362E-3	6.32978E-3	3.02545E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.1861E-1	-7.98917E-1	-9.13167E0	-9.14314E0	5.72205E-3	9.46283E-2	2.73033E1	-3.26753E1	-3.2614E1	2.6813E1	1.19749E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.01738E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.18253E-1	-7.98726E-1	-9.13198E0	-9.14307E0	5.93662E-3	9.45568E-2	2.73399E1	-3.26939E1	-3.26338E1	2.68599E1	1.20191E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.0041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.18896E-1	-7.99394E-1	-9.13181E0	-9.14321E0	5.88894E-3	9.4533E-2	2.73535E1	-3.26396E1	-3.2613E1	2.68472E1	1.20017E-7	2.5188E-3	2.5188E-3	6.34588E-3	2.97963E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.18801E-1	-7.98869E-1	-9.13179E0	-9.1429E0	6.12736E-3	9.43661E-2	2.73069E1	-3.26518E1	-3.25906E1	2.68322E1	1.20363E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.97647E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.18753E-1	-7.98965E-1	-9.13205E0	-9.14292E0	5.67436E-3	9.44853E-2	2.73496E1	-3.27336E1	-3.26675E1	2.68238E1	1.20122E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.97963E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.18753E-1	-7.9906E-1	-9.13181E0	-9.14319E0	5.88894E-3	9.44138E-2	2.73291E1	-3.26657E1	-3.26699E1	2.68478E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.18491E-1	-7.99012E-1	-9.13146E0	-9.14314E0	5.8651E-3	9.4533E-2	2.73412E1	-3.26548E1	-3.25054E1	2.68196E1	1.20278E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.02922E-1