[Scan]
initial_time=2016-01-15T22:29:52
final_time=2016-01-15T22:30:11
ip_count=19
run=1023
dataset=3
scan=179
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08797E-4
ql1_vset=
ql1_vmon=-8.18276E-1
ql1_imon=7.91061E-10
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=3.50118E-10
ql3_vset=
ql3_vmon=-9.13155E0
ql3_imon=6.03473E-10
ql4_vset=
ql4_vmon=-9.14316E0
ql4_imon=6.71577E-10
mult1=-9.93304E-9
mult2=-2.86632E-9
rf_tmon=-3.82748E-3
rf_agc=3.51841E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=4.24063E-10
bslens_vset=-6.2E0
bslens_vmon=-6.54926E0
bslens_imon=2.44776E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19579E1
lens5a_imon=2.01277E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12577E2
lens4a_imon=2.04839E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54207E1
cs_ef1b_imon=2.86324E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02403E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04472E1
cs_ea1_imon=2.50153E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38994E0
lens1_imon=2.94485E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65039E1
os_ef1alow_imon=2.99208E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03824E1
cs_ea2_imon=1.50525E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84512E1
cs_ef1a_imon=2.93974E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=4.49336E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11699E1
os_restr1_imon=2.84411E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15659E1
os_ea1_imon=1.86643E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63652E1
os_ef1bup_imon=3.0904E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23414E0
cs_ionrep_imon=1.22576E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91955E2
cs_nozzle_imon=1.93667E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01921E1
cs_anode1_imon=3.02161E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20427E0
olens4_imon=8.34858E-10
tplens_vset=1.4E-1
tplens_vmon=1.63622E0
tplens_imon=-3.74921E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26134E1
iondef3_imon=1.50872E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26819E1
iondef2_imon=1.55739E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02993E2
lens6_imon=2.98249E-4
ql6_vset=1.0E-1
ql6_vmon=9.42707E-2
ql6_imon=4.81749E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2886E0
ionrepsh_imon=1.79621E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34098E1
lens5b_imon=2.17894E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74406E1
cs_ef2b_imon=3.12261E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.05181E-1
os_ea2_imon=-6.53018E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0615E2
lens4b_imon=2.00383E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71957E1
cs_ef2a_imon=3.15784E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62498E0
os_ef2alow_imon=-2.37505E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.61819E-1
os_ef2bup_imon=-5.20703E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11073E1
os_restr2_imon=2.86022E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.31875E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01647E1
cs_anode2_imon=2.24986E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7349E1
iondef1_imon=1.11174E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6855E1
iondef4_imon=1.10936E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.37491E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8114E-1
olens1_imon=3.40545E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13573E0
cs_ionaccel_imon=-1.65028E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02107E2
cs_ionfocb_imon=1.4735E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56383E1
einzel_imon=7.67442E-6
window_vset=0.0E0
window_vmon=2.46526E-1
window_imon=-7.40967E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82724E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86154E1
mask2_imon=-5.06088E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=8.36078E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.57401E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50103E3
multb_neg_imon=6.99116E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3514E0
defgridb_imon=5.83706E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33885E1
os_fil1_imon=4.3686E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.16478E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.663E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30647E1
cs_fil1_imon=9.97773E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62948E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67168E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.2027E-2
os_fil2_imon=-2.38697E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.61528E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.06916E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32786E-1
cs_fil2_imon=-2.28072E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08029E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22345E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.02396E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.57449E-1
res40_imon=-2.57638E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=225
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.18801E-1	-7.99441E-1	-9.13191E0	-9.14276E0	5.72205E-3	9.43184E-2	2.73411E1	-3.26789E1	-3.27251E1	2.68394E1	1.20042E-7	2.52025E-3	2.52025E-3	6.31798E-3	3.00348E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.18968E-1	-7.98917E-1	-9.13188E0	-9.14292E0	5.72205E-3	9.46999E-2	2.73424E1	-3.2645E1	-3.26162E1	2.68344E1	1.20106E-7	2.52384E-3	2.52384E-3	6.3074E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.19159E-1	-7.98774E-1	-9.1321E0	-9.14307E0	5.6982E-3	9.43661E-2	2.73393E1	-3.26359E1	-3.26191E1	2.68053E1	1.20045E-7	2.52066E-3	2.52066E-3	6.30171E-3	2.9944E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.18968E-1	-7.99513E-1	-9.13191E0	-9.14311E0	6.07967E-3	9.42945E-2	2.73027E1	-3.26771E1	-3.2608E1	2.68412E1	1.20243E-7	2.52553E-3	2.52553E-3	6.33919E-3	3.01862E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.18825E-1	-7.99608E-1	-9.13179E0	-9.14304E0	5.72205E-3	9.44853E-2	2.73482E1	-3.26673E1	-3.26968E1	2.68487E1	1.20106E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.01738E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.18896E-1	-7.99394E-1	-9.13167E0	-9.14297E0	5.76973E-3	9.44376E-2	2.73472E1	-3.26284E1	-3.26759E1	2.68166E1	1.20036E-7	2.51701E-3	2.51701E-3	6.31012E-3	3.01155E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.18944E-1	-7.98774E-1	-9.13191E0	-9.14321E0	5.62668E-3	9.44614E-2	2.73027E1	-3.26434E1	-3.26452E1	2.68659E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.18563E-1	-7.9875E-1	-9.13198E0	-9.1434E0	5.57899E-3	9.43661E-2	2.73291E1	-3.26404E1	-3.25918E1	2.68346E1	1.20017E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.18801E-1	-7.98488E-1	-9.132E0	-9.14311E0	5.34058E-3	9.43422E-2	2.73004E1	-3.26667E1	-3.26189E1	2.68418E1	1.19965E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.18419E-1	-7.98655E-1	-9.13186E0	-9.14333E0	5.26905E-3	9.43422E-2	2.73285E1	-3.26681E1	-3.2647E1	2.68869E1	1.2033E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.18706E-1	-7.98416E-1	-9.13186E0	-9.14311E0	5.24521E-3	9.44138E-2	2.73051E1	-3.26903E1	-3.26195E1	2.68178E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.9943E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.19039E-1	-7.99227E-1	-9.13198E0	-9.14347E0	5.03063E-3	9.43661E-2	2.73273E1	-3.2647E1	-3.26603E1	2.68198E1	1.19913E-7	2.50898E-3	2.50898E-3	6.32936E-3	3.01347E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.1892E-1	-7.99012E-1	-9.13191E0	-9.14338E0	5.62668E-3	9.43899E-2	2.73369E1	-3.26891E1	-3.25966E1	2.68307E1	1.20209E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.9892E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.1892E-1	-7.98583E-1	-9.13186E0	-9.14333E0	5.36442E-3	9.44853E-2	2.73387E1	-3.26837E1	-3.26915E1	2.6855E1	1.19978E-7	2.51359E-3	2.51359E-3	6.32978E-3	2.99083E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.18563E-1	-7.98321E-1	-9.13172E0	-9.14314E0	5.84126E-3	9.44853E-2	2.73417E1	-3.26789E1	-3.25647E1	2.6804E1	1.20122E-7	2.52538E-3	2.52538E-3	6.34037E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.18706E-1	-7.98869E-1	-9.13179E0	-9.14333E0	5.74589E-3	9.4676E-2	2.73596E1	-3.26566E1	-3.26125E1	2.68022E1	1.19913E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01609E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.18229E-1	-7.98273E-1	-9.13181E0	-9.14328E0	5.67436E-3	9.44853E-2	2.74278E1	-3.28337E1	-3.26567E1	2.68383E1	1.20435E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.18801E-1	-7.98512E-1	-9.13198E0	-9.14323E0	5.55515E-3	9.43422E-2	2.73509E1	-3.26573E1	-3.27233E1	2.67995E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.18443E-1	-7.98225E-1	-9.13167E0	-9.1433E0	5.57899E-3	9.41992E-2	2.73228E1	-3.2652E1	-3.26018E1	2.68665E1	1.20177E-7	2.51783E-3	2.51783E-3	6.3126E-3	3.01237E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.18276E-1	-7.98488E-1	-9.13155E0	-9.14316E0	5.6982E-3	9.42707E-2	2.7349E1	-3.26819E1	-3.26134E1	2.6855E1	1.19965E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.02396E-1