[Scan]
initial_time=2016-01-15T22:30:45
final_time=2016-01-15T22:31:05
ip_count=19
run=1023
dataset=3
scan=181
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08863E-4
ql1_vset=
ql1_vmon=-8.19111E-1
ql1_imon=7.56824E-10
ql2_vset=
ql2_vmon=-7.98631E-1
ql2_imon=3.84426E-10
ql3_vset=
ql3_vmon=-9.13196E0
ql3_imon=5.81026E-10
ql4_vset=
ql4_vmon=-9.14311E0
ql4_imon=6.93476E-10
mult1=-9.01467E-9
mult2=-2.64094E-9
rf_tmon=-5.80726E-3
rf_agc=3.26366E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=4.51493E-10
bslens_vset=-6.2E0
bslens_vmon=-6.76107E0
bslens_imon=2.16284E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20361E1
lens5a_imon=1.95567E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.05143E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53796E1
cs_ef1b_imon=2.87602E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02254E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04567E1
cs_ea1_imon=2.52454E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38157E0
lens1_imon=2.75765E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65311E1
os_ef1alow_imon=2.98414E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03871E1
cs_ea2_imon=1.51551E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8467E1
cs_ef1a_imon=2.9463E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=4.39298E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11712E1
os_restr1_imon=2.84142E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14915E1
os_ea1_imon=1.90376E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.62957E1
os_ef1bup_imon=3.08722E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23167E0
cs_ionrep_imon=1.19214E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91949E2
cs_nozzle_imon=1.93485E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01785E1
cs_anode1_imon=3.00108E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=8.10707E-10
tplens_vset=1.4E-1
tplens_vmon=1.59397E0
tplens_imon=-3.31791E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26661E1
iondef3_imon=1.48487E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26396E1
iondef2_imon=1.59229E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03003E2
lens6_imon=2.98227E-4
ql6_vset=1.0E-1
ql6_vmon=9.44853E-2
ql6_imon=5.19812E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27132E0
ionrepsh_imon=1.83563E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.32732E1
lens5b_imon=2.17738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.14164E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.98851E-1
os_ea2_imon=-4.97618E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.0059E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.16794E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6378E0
os_ef2alow_imon=-2.51499E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.60784E-1
os_ef2bup_imon=-5.12426E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11141E1
os_restr2_imon=2.86305E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.26215E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02055E1
cs_anode2_imon=2.25182E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73393E1
iondef1_imon=1.11211E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6828E1
iondef4_imon=1.09062E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.36902E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81069E-1
olens1_imon=3.39115E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15177E0
cs_ionaccel_imon=-1.81221E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47648E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.78875E-6
window_vset=0.0E0
window_vmon=2.50379E-1
window_imon=-7.77877E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82689E2
mask1_imon=2.39225E-4
mask2_vset=0.0E0
mask2_vmon=-1.86272E1
mask2_imon=-6.33718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.34315E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93675E3
defgrida_imon=6.36621E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.11604E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.92488E0
defgridb_imon=6.13189E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33895E1
os_fil1_imon=4.28969E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.00778E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66563E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30674E1
cs_fil1_imon=9.97128E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63423E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67534E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09261E-2
os_fil2_imon=-2.40168E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.99846E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66566E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.29356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.50262E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22437E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.92328E-1
res40_imon=-2.50778E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.18634E-1	-7.98821E-1	-9.13193E0	-9.14335E0	5.72205E-3	9.44614E-2	2.73351E1	-3.27294E1	-3.25479E1	2.68298E1	1.20122E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.02133E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.18777E-1	-7.99227E-1	-9.13172E0	-9.14333E0	5.19753E-3	9.45568E-2	2.73363E1	-3.26783E1	-3.25521E1	2.68454E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.03449E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.18944E-1	-7.99346E-1	-9.13165E0	-9.14328E0	5.55515E-3	9.49144E-2	2.73335E1	-3.2655E1	-3.26306E1	2.68441E1	1.19809E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.02922E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.18467E-1	-7.98917E-1	-9.13174E0	-9.14357E0	5.57899E-3	9.46522E-2	2.73193E1	-3.26166E1	-3.26396E1	2.68389E1	1.19941E-7	2.51919E-3	2.51919E-3	6.28103E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.19135E-1	-7.99298E-1	-9.13165E0	-9.14359E0	5.65052E-3	9.46283E-2	2.73297E1	-3.26573E1	-3.26585E1	2.68469E1	1.20042E-7	2.51393E-3	2.51393E-3	6.32328E-3	2.99594E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.18968E-1	-7.98965E-1	-9.13155E0	-9.14345E0	5.57899E-3	9.41992E-2	2.73748E1	-3.26585E1	-3.25936E1	2.68472E1	1.19925E-7	2.52139E-3	2.52139E-3	6.31858E-3	2.98819E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.18825E-1	-7.99108E-1	-9.1316E0	-9.14361E0	5.45979E-3	9.45091E-2	2.73412E1	-3.26915E1	-3.26217E1	2.68502E1	1.19965E-7	2.52209E-3	2.52209E-3	6.26916E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.18849E-1	-7.99108E-1	-9.132E0	-9.14326E0	5.50747E-3	9.43661E-2	2.73163E1	-3.26809E1	-3.25959E1	2.68383E1	1.20122E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.18443E-1	-7.98893E-1	-9.13193E0	-9.14342E0	5.65052E-3	9.45568E-2	2.72895E1	-3.26344E1	-3.26104E1	2.68208E1	1.20226E-7	2.51334E-3	2.51334E-3	6.34037E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.18849E-1	-7.99012E-1	-9.13184E0	-9.14319E0	5.72205E-3	9.44614E-2	2.73351E1	-3.26701E1	-3.26272E1	2.68356E1	1.20174E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01347E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.18968E-1	-7.99155E-1	-9.13186E0	-9.14335E0	5.50747E-3	9.44376E-2	2.72927E1	-3.26815E1	-3.26119E1	2.68117E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.18896E-1	-7.99108E-1	-9.13172E0	-9.14364E0	5.62668E-3	9.44614E-2	2.73363E1	-3.26747E1	-3.26434E1	2.68238E1	1.19953E-7	2.51096E-3	2.51096E-3	6.3074E-3	2.99686E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.18563E-1	-7.99251E-1	-9.13172E0	-9.1433E0	5.67436E-3	9.45807E-2	2.73169E1	-3.26496E1	-3.26531E1	2.68238E1	1.20174E-7	2.5188E-3	2.5188E-3	6.3514E-3	2.98222E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.18777E-1	-7.98702E-1	-9.13208E0	-9.14323E0	5.57899E-3	9.45568E-2	2.7227E1	-3.25341E1	-3.26026E1	2.68593E1	1.19953E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.01738E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.1892E-1	-7.98702E-1	-9.13193E0	-9.14311E0	5.8651E-3	9.44614E-2	2.73327E1	-3.26488E1	-3.25767E1	2.69506E1	1.19757E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.18968E-1	-7.9875E-1	-9.13198E0	-9.14361E0	5.65052E-3	9.46999E-2	2.73252E1	-3.26278E1	-3.26773E1	2.68505E1	1.19913E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.03185E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.18872E-1	-7.98678E-1	-9.13169E0	-9.14345E0	5.88894E-3	9.44614E-2	2.73688E1	-3.27672E1	-3.27011E1	2.6828E1	1.20017E-7	2.5199E-3	2.5199E-3	6.30466E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.19182E-1	-7.98655E-1	-9.13186E0	-9.14326E0	6.05583E-3	9.4223E-2	2.73505E1	-3.26307E1	-3.26089E1	2.68196E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.18801E-1	-7.98607E-1	-9.13188E0	-9.14323E0	5.88894E-3	9.43422E-2	2.7332E1	-3.2667E1	-3.2637E1	2.68244E1	1.20055E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.19111E-1	-7.98631E-1	-9.13196E0	-9.14311E0	5.8651E-3	9.44853E-2	2.73393E1	-3.26396E1	-3.26661E1	2.6828E1	1.20226E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.01085E-1