[Scan]
initial_time=2016-01-15T22:31:39
final_time=2016-01-15T22:31:58
ip_count=19
run=1023
dataset=3
scan=183
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08768E-4
ql1_vset=
ql1_vmon=-8.19087E-1
ql1_imon=7.53069E-10
ql2_vset=
ql2_vmon=-7.98798E-1
ql2_imon=3.35038E-10
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=5.44202E-10
ql4_vset=
ql4_vmon=-9.14295E0
ql4_imon=6.7296E-10
mult1=-1.00028E-8
mult2=-2.9253E-9
rf_tmon=-5.17662E-3
rf_agc=3.28019E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.05583E-3
ql5_imon=4.5054E-10
bslens_vset=-6.2E0
bslens_vmon=-6.5522E0
bslens_imon=2.43287E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19321E1
lens5a_imon=2.00962E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.04975E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53929E1
cs_ef1b_imon=2.85296E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04719E1
cs_ea1_imon=2.50914E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33338E0
lens1_imon=2.52102E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64801E1
os_ef1alow_imon=2.99531E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04094E1
cs_ea2_imon=1.55013E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84839E1
cs_ef1a_imon=2.95459E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=4.9516E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11208E1
os_restr1_imon=2.81944E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15508E1
os_ea1_imon=1.89686E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=1.19606E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.9353E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01749E1
cs_anode1_imon=3.00468E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=8.45814E-10
tplens_vset=1.4E-1
tplens_vmon=1.62858E0
tplens_imon=-3.2186E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27258E1
iondef3_imon=1.50238E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26499E1
iondef2_imon=1.56996E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03009E2
lens6_imon=2.98247E-4
ql6_vset=1.0E-1
ql6_vmon=9.43661E-2
ql6_imon=4.83584E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27842E0
ionrepsh_imon=1.81018E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34148E1
lens5b_imon=2.18629E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.13659E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.34073E-1
os_ea2_imon=-4.43068E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00707E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70675E1
cs_ef2a_imon=3.15137E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60356E0
os_ef2alow_imon=-2.38164E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.37958E-1
os_ef2bup_imon=-5.05939E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11352E1
os_restr2_imon=2.86845E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23111E2
cs_ionfoca_imon=6.29855E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.26695E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7321E1
iondef1_imon=1.13068E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68388E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.37671E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81307E-1
olens1_imon=2.52545E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12353E0
cs_ionaccel_imon=-1.77978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47558E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56609E1
einzel_imon=7.63378E-6
window_vset=0.0E0
window_vmon=2.96029E-1
window_imon=-8.89599E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82705E2
mask1_imon=2.39243E-4
mask2_vset=0.0E0
mask2_vmon=-1.8638E1
mask2_imon=-6.19302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=8.11863E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93747E3
defgrida_imon=7.04979E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.32527E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.7253E0
defgridb_imon=6.1389E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33894E1
os_fil1_imon=4.34375E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.72547E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66511E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30655E1
cs_fil1_imon=9.94521E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6284E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67665E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.17243E-2
os_fil2_imon=-2.56986E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.31661E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.81103E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31723E-1
cs_fil2_imon=-2.02927E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.60473E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22505E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.96414E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.71616E-1
res40_imon=-2.342E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09379E0	-8.18872E-1	-7.98821E-1	-9.13186E0	-9.14292E0	5.57899E-3	9.46522E-2	2.73063E1	-3.26386E1	-3.2626E1	2.6789E1	1.20174E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01609E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.18849E-1	-7.98845E-1	-9.13165E0	-9.14309E0	5.65052E-3	9.41038E-2	2.72874E1	-3.26614E1	-3.26408E1	2.6822E1	1.19705E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.18706E-1	-7.98583E-1	-9.13217E0	-9.14311E0	5.93662E-3	9.43422E-2	2.73399E1	-3.26637E1	-3.26579E1	2.68505E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.02396E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.183E-1	-7.98869E-1	-9.13188E0	-9.1435E0	5.8651E-3	9.43661E-2	2.73327E1	-3.26567E1	-3.25515E1	2.68424E1	1.20023E-7	2.52203E-3	2.52203E-3	6.31007E-3	3.00654E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.18205E-1	-7.98678E-1	-9.1321E0	-9.14314E0	5.67436E-3	9.46283E-2	2.73594E1	-3.2662E1	-3.26077E1	2.68296E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.18467E-1	-7.98559E-1	-9.132E0	-9.14326E0	5.74589E-3	9.45807E-2	2.7352E1	-3.26651E1	-3.26717E1	2.6804E1	1.19965E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.18872E-1	-7.98249E-1	-9.13172E0	-9.14276E0	5.8651E-3	9.47475E-2	2.73255E1	-3.26567E1	-3.26176E1	2.684E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.18706E-1	-7.98702E-1	-9.13188E0	-9.14283E0	5.84126E-3	9.45091E-2	2.73381E1	-3.27041E1	-3.26747E1	2.68192E1	1.20226E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.18872E-1	-7.98774E-1	-9.13193E0	-9.14319E0	5.50747E-3	9.46045E-2	2.72996E1	-3.2648E1	-3.26352E1	2.68345E1	1.19925E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.0041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.19063E-1	-7.98941E-1	-9.13172E0	-9.14328E0	5.8651E-3	9.46522E-2	2.73393E1	-3.27009E1	-3.27033E1	2.68526E1	1.19965E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-8.18586E-1	-7.98678E-1	-9.13172E0	-9.14319E0	5.60284E-3	9.45807E-2	2.73351E1	-3.26615E1	-3.25353E1	2.6825E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.18825E-1	-7.98821E-1	-9.13177E0	-9.14314E0	5.50747E-3	9.44614E-2	2.73263E1	-3.26655E1	-3.26986E1	2.68436E1	1.20055E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.00453E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-8.19016E-1	-7.98702E-1	-9.1316E0	-9.14319E0	5.29289E-3	9.41753E-2	2.737E1	-3.26951E1	-3.2647E1	2.6843E1	1.202E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.18944E-1	-7.98988E-1	-9.13153E0	-9.14342E0	5.62668E-3	9.42469E-2	2.7403E1	-3.27588E1	-3.24974E1	2.68418E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.18563E-1	-7.99298E-1	-9.13157E0	-9.1433E0	5.53131E-3	9.43422E-2	2.72839E1	-3.2629E1	-3.26166E1	2.68765E1	1.19902E-7	2.50989E-3	2.50989E-3	6.31817E-3	2.9943E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.18682E-1	-7.98702E-1	-9.13172E0	-9.14338E0	5.84126E-3	9.43422E-2	2.73057E1	-3.26326E1	-3.25852E1	2.68136E1	1.20226E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01085E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.18944E-1	-7.98512E-1	-9.13203E0	-9.14299E0	5.76973E-3	9.43422E-2	2.71629E1	-3.24897E1	-3.27947E1	2.68262E1	1.19913E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.02396E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.19135E-1	-7.98488E-1	-9.13193E0	-9.14316E0	5.98431E-3	9.43899E-2	2.736E1	-3.26644E1	-3.26537E1	2.68337E1	1.19841E-7	2.51709E-3	2.51709E-3	6.3074E-3	3.00348E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.19087E-1	-7.98774E-1	-9.13162E0	-9.14295E0	5.88894E-3	9.44138E-2	2.73228E1	-3.26809E1	-3.25847E1	2.68484E1	1.20209E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.97901E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.19087E-1	-7.98798E-1	-9.1315E0	-9.14295E0	6.05583E-3	9.43661E-2	2.7321E1	-3.26499E1	-3.27258E1	2.68388E1	1.20069E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.96414E-1