[Scan]
initial_time=2016-01-15T22:32:05
final_time=2016-01-15T22:32:25
ip_count=19
run=1023
dataset=3
scan=184
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09364E0
qbias_imon=-1.08797E-4
ql1_vset=
ql1_vmon=-8.18658E-1
ql1_imon=7.68912E-10
ql2_vset=
ql2_vmon=-7.98631E-1
ql2_imon=3.44288E-10
ql3_vset=
ql3_vmon=-9.132E0
ql3_imon=5.60224E-10
ql4_vset=
ql4_vmon=-9.1428E0
ql4_imon=6.84619E-10
mult1=-1.03978E-8
mult2=-2.76245E-9
rf_tmon=-3.96087E-3
rf_agc=3.43827E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.05583E-3
ql5_imon=4.38511E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64751E0
bslens_imon=2.60985E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19857E1
lens5a_imon=1.97983E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12523E2
lens4a_imon=2.04772E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54001E1
cs_ef1b_imon=2.84899E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02132E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0467E1
cs_ea1_imon=2.54184E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34132E0
lens1_imon=2.74323E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64536E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03901E1
cs_ea2_imon=1.50361E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84532E1
cs_ef1a_imon=2.95423E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=4.58729E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11562E1
os_restr1_imon=2.84575E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15312E1
os_ea1_imon=1.90809E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63251E1
os_ef1bup_imon=3.08397E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24128E0
cs_ionrep_imon=1.19935E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91937E2
cs_nozzle_imon=1.93449E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=3.01369E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=8.42762E-10
tplens_vset=1.4E-1
tplens_vmon=1.64504E0
tplens_imon=-2.99346E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26986E1
iondef3_imon=1.51515E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26661E1
iondef2_imon=1.56021E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02982E2
lens6_imon=2.98256E-4
ql6_vset=1.0E-1
ql6_vmon=9.41515E-2
ql6_imon=5.22888E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3278E0
ionrepsh_imon=1.78696E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3406E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.30695E-1
os_ea2_imon=-7.3915E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00583E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.16506E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.69306E0
os_ef2alow_imon=-2.2519E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.54176E-1
os_ef2bup_imon=-5.35852E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11051E1
os_restr2_imon=2.8508E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.27657E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01941E1
cs_anode2_imon=2.21722E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73198E1
iondef1_imon=1.11752E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68472E1
iondef4_imon=1.11693E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.37786E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=3.5907E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-1.85907E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56657E1
einzel_imon=7.87525E-6
window_vset=0.0E0
window_vmon=2.37164E-1
window_imon=-9.18431E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82675E2
mask1_imon=2.39217E-4
mask2_vset=0.0E0
mask2_vmon=-1.8653E1
mask2_imon=-3.41797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=7.7397E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.76276E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.12325E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38653E0
defgridb_imon=6.26167E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3389E1
os_fil1_imon=4.34975E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.79154E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66612E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30649E1
cs_fil1_imon=9.95386E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62558E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67688E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.06681E-2
os_fil2_imon=-2.49778E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.27767E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66953E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30688E-1
cs_fil2_imon=-2.12537E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13021E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22452E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.02922E-1
chamber_ion_pmon=1.20487E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.38869E-1
res40_imon=-2.42129E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.18372E-1	-7.98869E-1	-9.13174E0	-9.14319E0	6.05583E-3	9.45091E-2	2.73562E1	-3.27041E1	-3.26651E1	2.68635E1	1.2033E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01347E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.18801E-1	-7.98988E-1	-9.13146E0	-9.14321E0	5.4121E-3	9.46283E-2	2.73261E1	-3.26645E1	-3.2644E1	2.68082E1	1.19913E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09348E0	-8.18396E-1	-7.98678E-1	-9.13165E0	-9.14319E0	5.76973E-3	9.45568E-2	2.73167E1	-3.26851E1	-3.27187E1	2.68551E1	1.20435E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00302E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.18706E-1	-7.98869E-1	-9.13155E0	-9.14323E0	5.79357E-3	9.46999E-2	2.73484E1	-3.2647E1	-3.25671E1	2.68526E1	1.19697E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.02253E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.18801E-1	-7.98798E-1	-9.1315E0	-9.14309E0	5.91278E-3	9.45091E-2	2.73147E1	-3.26675E1	-3.26633E1	2.68641E1	1.20055E-7	2.51417E-3	2.51417E-3	6.33977E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.18634E-1	-7.99322E-1	-9.13131E0	-9.14345E0	5.57899E-3	9.46045E-2	2.73461E1	-3.26664E1	-3.2503E1	2.68001E1	1.20435E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.18539E-1	-7.99227E-1	-9.13169E0	-9.14311E0	5.48363E-3	9.45568E-2	2.73594E1	-3.2695E1	-3.27033E1	2.68406E1	1.20191E-7	2.52362E-3	2.52362E-3	6.33538E-3	2.98554E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.18968E-1	-7.98988E-1	-9.13165E0	-9.14302E0	5.74589E-3	9.43899E-2	2.72907E1	-3.26603E1	-3.25948E1	2.68321E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.18682E-1	-7.98917E-1	-9.13181E0	-9.14321E0	5.60284E-3	9.43422E-2	2.73219E1	-3.26362E1	-3.26879E1	2.68476E1	1.20174E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.19016E-1	-7.99155E-1	-9.13179E0	-9.1428E0	5.8651E-3	9.39608E-2	2.7349E1	-3.26573E1	-3.26104E1	2.67907E1	1.20004E-7	2.51847E-3	2.51847E-3	6.33977E-3	3.02253E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.18658E-1	-7.98726E-1	-9.13184E0	-9.14292E0	5.8651E-3	9.40323E-2	2.73596E1	-3.26585E1	-3.2648E1	2.68508E1	1.20137E-7	2.51915E-3	2.51915E-3	6.33538E-3	3.01475E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.18539E-1	-7.98798E-1	-9.13191E0	-9.14314E0	5.88894E-3	9.45568E-2	2.73257E1	-3.26679E1	-3.26915E1	2.68024E1	1.19913E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.02922E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-8.18348E-1	-7.99108E-1	-9.13184E0	-9.14304E0	5.72205E-3	9.44614E-2	2.73144E1	-3.26805E1	-3.25994E1	2.68366E1	1.20466E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.04063E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.18348E-1	-7.98702E-1	-9.13203E0	-9.14309E0	5.62668E-3	9.44138E-2	2.73499E1	-3.25853E1	-3.26343E1	2.68496E1	1.20042E-7	2.51498E-3	2.51498E-3	6.33388E-3	3.02368E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.18396E-1	-7.98798E-1	-9.13198E0	-9.14307E0	6.17504E-3	9.43422E-2	2.73442E1	-3.26633E1	-3.26512E1	2.68689E1	1.20174E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.18706E-1	-7.98798E-1	-9.13198E0	-9.14297E0	6.19888E-3	9.41753E-2	2.73544E1	-3.26116E1	-3.27095E1	2.68334E1	1.20158E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.99941E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.18467E-1	-7.99394E-1	-9.1316E0	-9.14288E0	5.79357E-3	9.41277E-2	2.74036E1	-3.26807E1	-3.25236E1	2.68424E1	1.20174E-7	2.52428E-3	2.52428E-3	6.29645E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.18753E-1	-7.98869E-1	-9.13165E0	-9.14338E0	5.74589E-3	9.41753E-2	2.73277E1	-3.26597E1	-3.2604E1	2.68412E1	1.20042E-7	2.51919E-3	2.51919E-3	6.31269E-3	3.01862E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.18443E-1	-7.98702E-1	-9.13155E0	-9.14299E0	5.76973E-3	9.41992E-2	2.73189E1	-3.26897E1	-3.26567E1	2.68322E1	1.20226E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.01871E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09364E0	-8.18658E-1	-7.98631E-1	-9.132E0	-9.1428E0	6.05583E-3	9.41515E-2	2.73198E1	-3.26661E1	-3.26986E1	2.68472E1	1.20487E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.02922E-1