[Scan]
initial_time=2016-01-15T22:33:25
final_time=2016-01-15T22:33:45
ip_count=19
run=1023
dataset=3
scan=187
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08734E-4
ql1_vset=
ql1_vmon=-8.18467E-1
ql1_imon=7.93564E-10
ql2_vset=
ql2_vmon=-7.99108E-1
ql2_imon=3.68762E-10
ql3_vset=
ql3_vmon=-9.13198E0
ql3_imon=5.8471E-10
ql4_vset=
ql4_vmon=-9.14333E0
ql4_imon=6.98912E-10
mult1=-1.02822E-8
mult2=-2.61681E-9
rf_tmon=-4.44033E-3
rf_agc=3.33816E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.03199E-3
ql5_imon=4.30477E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70869E0
bslens_imon=2.64236E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19264E1
lens5a_imon=2.00775E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.05008E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54031E1
cs_ef1b_imon=2.85043E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.02149E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04793E1
cs_ea1_imon=2.53901E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35604E0
lens1_imon=2.73439E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.98198E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03914E1
cs_ea2_imon=1.51719E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83956E1
cs_ef1a_imon=2.95927E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=4.57644E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11129E1
os_restr1_imon=2.8407E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15117E1
os_ea1_imon=1.90546E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.62999E1
os_ef1bup_imon=3.07136E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22968E0
cs_ionrep_imon=1.23014E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91956E2
cs_nozzle_imon=1.93576E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01791E1
cs_anode1_imon=3.02415E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=7.98106E-10
tplens_vset=1.4E-1
tplens_vmon=1.61666E0
tplens_imon=-5.11252E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26404E1
iondef3_imon=1.48887E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26777E1
iondef2_imon=1.58231E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02988E2
lens6_imon=2.98162E-4
ql6_vset=1.0E-1
ql6_vmon=9.4533E-2
ql6_imon=4.75335E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3164E0
ionrepsh_imon=1.80494E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33905E1
lens5b_imon=2.16915E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74856E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.39237E-1
os_ea2_imon=-6.70525E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00559E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71942E1
cs_ef2a_imon=3.15641E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61918E0
os_ef2alow_imon=-2.49336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.49972E-1
os_ef2bup_imon=-5.21075E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11183E1
os_restr2_imon=2.86665E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.30034E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.2547E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73622E1
iondef1_imon=1.10272E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6831E1
iondef4_imon=1.10179E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.39706E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=3.05605E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17459E0
cs_ionaccel_imon=-1.74374E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02115E2
cs_ionfocb_imon=1.47424E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56705E1
einzel_imon=7.78154E-6
window_vset=0.0E0
window_vmon=2.47376E-1
window_imon=-7.13005E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82683E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.86092E1
mask2_imon=-7.31025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92683E3
multa_neg_imon=6.68791E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.73392E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.17634E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45576E0
defgridb_imon=6.21009E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3391E1
os_fil1_imon=3.7611E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.28098E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66686E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30605E1
cs_fil1_imon=9.95639E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62948E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67911E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.06635E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.19648E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.5471E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31594E-1
cs_fil2_imon=-2.47376E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.37998E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22455E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.01871E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.3017E-1
res40_imon=-2.48976E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=424
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.18658E-1	-7.98702E-1	-9.13196E0	-9.14314E0	5.60284E-3	9.43184E-2	2.72542E1	-3.27087E1	-3.26495E1	2.68918E1					
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.18896E-1	-7.99084E-1	-9.13165E0	-9.14321E0	5.91278E-3	9.41515E-2	2.735E1	-3.26372E1	-3.25206E1	2.68219E1	1.20171E-7	2.51527E-3	2.51527E-3	6.28423E-3	3.00363E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.18467E-1	-7.98845E-1	-9.1316E0	-9.14335E0	5.81741E-3	9.4223E-2	2.73153E1	-3.26476E1	-3.25719E1	2.68406E1	1.201E-7	2.51611E-3	2.51611E-3	6.3074E-3	2.9917E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.19039E-1	-7.98416E-1	-9.13188E0	-9.14311E0	6.07967E-3	9.45807E-2	2.73464E1	-3.26526E1	-3.26508E1	2.68214E1	1.20122E-7	2.52867E-3	2.52867E-3	6.28552E-3	3.01347E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-8.1861E-1	-7.98988E-1	-9.13169E0	-9.14307E0	6.19888E-3	9.43899E-2	2.73062E1	-3.2739E1	-3.25455E1	2.68267E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.18539E-1	-7.98988E-1	-9.13165E0	-9.14326E0	6.05583E-3	9.45568E-2	2.73749E1	-3.26315E1	-3.25746E1	2.68082E1	1.1987E-7	2.53079E-3	2.53079E-3	6.32273E-3	3.01365E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-8.18324E-1	-7.99131E-1	-9.13184E0	-9.1433E0	5.67436E-3	9.44853E-2	2.72998E1	-3.26703E1	-3.27039E1	2.68556E1	1.19872E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.01209E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.18491E-1	-7.99084E-1	-9.13174E0	-9.14314E0	6.12736E-3	9.46522E-2	2.73315E1	-3.26747E1	-3.27047E1	2.68304E1	1.20106E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.02511E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.18515E-1	-7.98941E-1	-9.13167E0	-9.14326E0	5.93662E-3	9.44138E-2	2.73598E1	-3.26422E1	-3.25695E1	2.68304E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09387E0	-8.18801E-1	-7.99322E-1	-9.13186E0	-9.14297E0	5.62668E-3	9.43899E-2	2.73511E1	-3.26703E1	-3.26083E1	2.68366E1	1.19965E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.18729E-1	-7.98941E-1	-9.13177E0	-9.14316E0	5.62668E-3	9.4223E-2	2.73405E1	-3.26815E1	-3.27068E1	2.68647E1	1.19902E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99941E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.18133E-1	-7.99203E-1	-9.13181E0	-9.14314E0	5.88894E-3	9.44376E-2	2.73075E1	-3.26697E1	-3.26667E1	2.68082E1	1.20209E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.9943E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.18229E-1	-7.98988E-1	-9.13193E0	-9.14304E0	5.88894E-3	9.43184E-2	2.73653E1	-3.26974E1	-3.26154E1	2.68172E1	1.20004E-7	2.52492E-3	2.52492E-3	6.31278E-3	3.02511E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.18396E-1	-7.99322E-1	-9.13205E0	-9.14304E0	6.07967E-3	9.43422E-2	2.73285E1	-3.26645E1	-3.26723E1	2.6816E1	1.20209E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.0148E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09595E0	-8.18539E-1	-7.99155E-1	-9.13184E0	-9.14321E0	5.93662E-3	9.41992E-2	2.73448E1	-3.26416E1	-3.26879E1	2.6825E1	1.19757E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.18515E-1	-7.99036E-1	-9.13165E0	-9.14323E0	5.60284E-3	9.45091E-2	2.73472E1	-3.26777E1	-3.26164E1	2.69283E1	1.20069E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.01609E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.18467E-1	-7.99012E-1	-9.13193E0	-9.1433E0	5.48363E-3	9.45568E-2	2.72624E1	-3.25924E1	-3.25034E1	2.68929E1	1.19809E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.18706E-1	-7.99346E-1	-9.13177E0	-9.14328E0	5.88894E-3	9.4676E-2	2.73578E1	-3.26324E1	-3.27048E1	2.68319E1	1.20017E-7	2.52757E-3	2.52757E-3	6.32386E-3	2.9874E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.18992E-1	-7.99203E-1	-9.13198E0	-9.14335E0	5.84126E-3	9.47714E-2	2.73357E1	-3.27071E1	-3.25641E1	2.69073E1	1.20444E-7	2.52553E-3	2.52553E-3	6.30212E-3	2.99594E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.18467E-1	-7.99108E-1	-9.13198E0	-9.14333E0	6.03199E-3	9.4533E-2	2.73622E1	-3.26777E1	-3.26404E1	2.6831E1	1.19809E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.01871E-1