[Scan]
initial_time=2016-01-15T22:33:52
final_time=2016-01-15T22:34:11
ip_count=19
run=1023
dataset=3
scan=188
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08782E-4
ql1_vset=
ql1_vmon=-8.19063E-1
ql1_imon=7.0473E-10
ql2_vset=
ql2_vmon=-7.98965E-1
ql2_imon=3.88956E-10
ql3_vset=
ql3_vmon=-9.13167E0
ql3_imon=5.74744E-10
ql4_vset=
ql4_vmon=-9.14347E0
ql4_imon=6.7656E-10
mult1=-9.42733E-9
mult2=-2.74656E-9
rf_tmon=-4.7107E-3
rf_agc=3.34958E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.07967E-3
ql5_imon=4.31728E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69257E0
bslens_imon=2.2818E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19791E1
lens5a_imon=2.0047E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1255E2
lens4a_imon=2.05161E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53887E1
cs_ef1b_imon=2.87458E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.0215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04778E1
cs_ea1_imon=2.51336E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38097E0
lens1_imon=2.62067E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64272E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04027E1
cs_ea2_imon=1.52885E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85643E1
cs_ef1a_imon=2.97729E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=4.49455E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11634E1
os_restr1_imon=2.91747E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14855E1
os_ea1_imon=1.89151E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63972E1
os_ef1bup_imon=3.03135E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20764E0
cs_ionrep_imon=1.21882E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91934E2
cs_nozzle_imon=1.9364E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=3.01766E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20432E0
olens4_imon=8.28075E-10
tplens_vset=1.4E-1
tplens_vmon=1.62581E0
tplens_imon=-1.91197E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25479E1
iondef3_imon=1.50614E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26783E1
iondef2_imon=1.57139E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03018E2
lens6_imon=2.98115E-4
ql6_vset=1.0E-1
ql6_vmon=9.44853E-2
ql6_imon=5.15699E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=1.78876E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33862E1
lens5b_imon=2.17053E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.31295E-1
os_ea2_imon=-7.42755E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.1629E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.57113E0
os_ef2alow_imon=-2.38885E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.5778E-1
os_ef2bup_imon=-5.17471E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11424E1
os_restr2_imon=2.88107E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.27765E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01016E1
cs_anode2_imon=2.26515E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73381E1
iondef1_imon=1.1031E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68581E1
iondef4_imon=1.11368E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=2.39573E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=3.0601E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12534E0
cs_ionaccel_imon=-1.68247E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47125E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56051E1
einzel_imon=7.83921E-6
window_vset=0.0E0
window_vmon=2.4197E-1
window_imon=-1.31126E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82715E2
mask1_imon=2.39697E-4
mask2_vset=0.0E0
mask2_vmon=-1.8626E1
mask2_imon=-4.42708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9267E3
multa_neg_imon=7.4513E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.60414E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50103E3
multb_neg_imon=7.33234E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46472E0
defgridb_imon=5.94443E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33873E1
os_fil1_imon=5.05853E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.52725E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66815E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3062E1
cs_fil1_imon=9.96203E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64024E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67389E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92494E-2
os_fil2_imon=-2.46174E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.93839E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.53805E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33666E-1
cs_fil2_imon=-2.91825E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10018E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21857E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.49681E-1
res40_imon=-2.42489E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.18491E-1	-7.99227E-1	-9.13179E0	-9.14321E0	6.07967E-3	9.44614E-2	2.73399E1	-3.26419E1	-3.27682E1	2.68136E1	1.19861E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9874E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.18706E-1	-7.98845E-1	-9.13174E0	-9.14326E0	5.98431E-3	9.44853E-2	2.73241E1	-3.26536E1	-3.26713E1	2.68063E1	1.20466E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99175E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09394E0	-8.18467E-1	-7.98917E-1	-9.13174E0	-9.1433E0	6.1512E-3	9.43661E-2	2.73346E1	-3.26691E1	-3.25977E1	2.68041E1	1.20244E-7	2.51804E-3	2.51804E-3	6.32978E-3	2.98819E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.18086E-1	-7.98559E-1	-9.13205E0	-9.14321E0	5.72205E-3	9.43422E-2	2.7301E1	-3.26679E1	-3.26449E1	2.68308E1	1.20055E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.18372E-1	-7.99203E-1	-9.1321E0	-9.14335E0	5.65052E-3	9.42469E-2	2.73157E1	-3.26673E1	-3.26071E1	2.6852E1	1.19953E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.02253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.18014E-1	-7.98821E-1	-9.13212E0	-9.14333E0	5.84126E-3	9.44614E-2	2.73339E1	-3.26676E1	-3.26462E1	2.6828E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.18396E-1	-7.98678E-1	-9.13196E0	-9.14316E0	5.22137E-3	9.41038E-2	2.73134E1	-3.2675E1	-3.27192E1	2.6846E1	1.20017E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.18396E-1	-7.98726E-1	-9.13203E0	-9.14326E0	5.48363E-3	9.42469E-2	2.73141E1	-3.26765E1	-3.25076E1	2.67601E1	1.19809E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.18348E-1	-7.99251E-1	-9.13227E0	-9.14326E0	5.22137E-3	9.4223E-2	2.73069E1	-3.26567E1	-3.25948E1	2.68569E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.18682E-1	-7.99108E-1	-9.13215E0	-9.14311E0	5.81741E-3	9.43422E-2	2.72974E1	-3.26461E1	-3.27198E1	2.67978E1	1.20174E-7	2.52428E-3	2.52428E-3	6.34037E-3	2.9926E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.18229E-1	-7.98702E-1	-9.13208E0	-9.14307E0	5.57899E-3	9.41753E-2	2.73297E1	-3.26717E1	-3.25329E1	2.6787E1	1.20517E-7	2.51632E-3	2.51632E-3	6.28592E-3	2.99941E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.18563E-1	-7.99155E-1	-9.13169E0	-9.14309E0	5.76973E-3	9.41753E-2	2.73608E1	-3.26591E1	-3.26352E1	2.67463E1	1.19978E-7	2.52027E-3	2.52027E-3	6.32978E-3	3.00676E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.18443E-1	-7.99322E-1	-9.13174E0	-9.14302E0	5.67436E-3	9.43184E-2	2.73616E1	-3.26825E1	-3.25275E1	2.6849E1	1.19965E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.18586E-1	-7.9906E-1	-9.13196E0	-9.14319E0	5.72205E-3	9.44614E-2	2.73222E1	-3.26714E1	-3.259E1	2.68684E1	1.20226E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.01871E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.18706E-1	-7.99036E-1	-9.132E0	-9.14304E0	5.43594E-3	9.45568E-2	2.73171E1	-3.26753E1	-3.25389E1	2.68082E1	1.19953E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.18777E-1	-7.9875E-1	-9.13205E0	-9.1433E0	5.6982E-3	9.4676E-2	2.73241E1	-3.26058E1	-3.26376E1	2.68282E1	1.19757E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01871E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.19039E-1	-7.98774E-1	-9.1321E0	-9.14314E0	5.84126E-3	9.42707E-2	2.73712E1	-3.26873E1	-3.26753E1	2.68454E1	1.19705E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.02396E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.18872E-1	-7.99108E-1	-9.13198E0	-9.14352E0	6.1512E-3	9.41515E-2	2.73623E1	-3.26986E1	-3.26915E1	2.68314E1	1.19766E-7	2.51581E-3	2.51581E-3	6.28511E-3	3.0041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-8.19063E-1	-7.98941E-1	-9.13184E0	-9.14347E0	5.93662E-3	9.44376E-2	2.73411E1	-3.26738E1	-3.26313E1	2.68304E1	1.20132E-7	2.51578E-3	2.51578E-3	6.31548E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.19063E-1	-7.98965E-1	-9.13167E0	-9.14347E0	6.07967E-3	9.44853E-2	2.73381E1	-3.26783E1	-3.25479E1	2.68581E1