[Scan]
initial_time=2016-01-15T22:34:45
final_time=2016-01-15T22:35:04
ip_count=19
run=1023
dataset=3
scan=190
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.0878E-4
ql1_vset=
ql1_vmon=-8.18706E-1
ql1_imon=7.44808E-10
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=3.54266E-10
ql3_vset=
ql3_vmon=-9.13167E0
ql3_imon=5.18441E-10
ql4_vset=
ql4_vmon=-9.14314E0
ql4_imon=7.25043E-10
mult1=-9.80059E-9
mult2=-2.71661E-9
rf_tmon=-5.23342E-3
rf_agc=3.25946E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=4.49896E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68332E0
bslens_imon=2.2955E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19872E1
lens5a_imon=1.96775E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.04951E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54103E1
cs_ef1b_imon=2.85404E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.01933E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04481E1
cs_ea1_imon=2.54432E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36194E0
lens1_imon=2.84765E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.98522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04481E1
cs_ea2_imon=1.51436E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84514E1
cs_ef1a_imon=2.94702E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=4.69077E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=2.84755E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15087E1
os_ea1_imon=1.88776E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.08613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2285E0
cs_ionrep_imon=1.2128E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93335E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.99892E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=8.08334E-10
tplens_vset=1.4E-1
tplens_vmon=1.65854E0
tplens_imon=-4.40464E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26482E1
iondef3_imon=1.51223E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26831E1
iondef2_imon=1.5855E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03019E2
lens6_imon=2.98243E-4
ql6_vset=1.0E-1
ql6_vmon=9.45807E-2
ql6_imon=4.75001E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=1.79857E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3384E1
lens5b_imon=2.16738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75823E1
cs_ef2b_imon=3.13911E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.43956E-1
os_ea2_imon=-5.53725E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00718E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70915E1
cs_ef2a_imon=3.14128E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65522E0
os_ef2alow_imon=-2.45372E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.56579E-1
os_ef2bup_imon=-5.31167E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11117E1
os_restr2_imon=2.86197E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.28583E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.24317E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73586E1
iondef1_imon=1.11759E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6825E1
iondef4_imon=1.10071E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.38909E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81188E-1
olens1_imon=3.26455E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12413E0
cs_ionaccel_imon=-1.77978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47428E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56537E1
einzel_imon=7.67342E-6
window_vset=0.0E0
window_vmon=2.4257E-1
window_imon=-7.95896E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82687E2
mask1_imon=2.39026E-4
mask2_vset=0.0E0
mask2_vmon=-1.85954E1
mask2_imon=-5.18391E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=8.00811E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.71622E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50096E3
multb_neg_imon=7.56568E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52367E0
defgridb_imon=6.35874E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33735E1
os_fil1_imon=5.11259E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.89365E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66167E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30646E1
cs_fil1_imon=9.95813E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6281E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6709E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.95238E-2
os_fil2_imon=-2.44372E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.41892E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.00143E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32112E-1
cs_fil2_imon=-2.48577E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22291E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.02922E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.04342E-1
res40_imon=-2.58346E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=189
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.18753E-1	-7.99108E-1	-9.13172E0	-9.14309E0	6.07967E-3	9.41277E-2	2.73428E1	-3.26461E1	-3.26543E1	2.6818E1	1.2026E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00197E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.18372E-1	-7.98678E-1	-9.13165E0	-9.14304E0	5.98431E-3	9.43661E-2	2.73488E1	-3.2646E1	-3.27009E1	2.68562E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.18682E-1	-7.98535E-1	-9.13162E0	-9.14328E0	6.31809E-3	9.42469E-2	2.73207E1	-3.26955E1	-3.25733E1	2.68522E1	1.19829E-7	2.51611E-3	2.51611E-3	6.31879E-3	3.01065E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.18491E-1	-7.98345E-1	-9.13157E0	-9.1434E0	6.03199E-3	9.42945E-2	2.73181E1	-3.27599E1	-3.26502E1	2.6807E1	1.19979E-7	2.5199E-3	2.5199E-3	6.31779E-3	3.00741E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.18133E-1	-7.98726E-1	-9.13148E0	-9.14311E0	5.79357E-3	9.44614E-2	2.73532E1	-3.27173E1	-3.25761E1	2.68304E1	1.19861E-7	2.52428E-3	2.52428E-3	6.32386E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.18443E-1	-7.98678E-1	-9.1321E0	-9.14314E0	5.72205E-3	9.43899E-2	2.7364E1	-3.26639E1	-3.26759E1	2.68827E1	1.20122E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.18372E-1	-7.98678E-1	-9.13188E0	-9.14311E0	5.67436E-3	9.44614E-2	2.73249E1	-3.26543E1	-3.24992E1	2.68388E1	1.20017E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.02922E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.183E-1	-7.99012E-1	-9.13186E0	-9.14309E0	5.8651E-3	9.42945E-2	2.73472E1	-3.27023E1	-3.27197E1	2.68238E1	1.20069E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.18706E-1	-7.98988E-1	-9.13198E0	-9.14347E0	5.65052E-3	9.41277E-2	2.73387E1	-3.27107E1	-3.24806E1	2.68304E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02659E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.18825E-1	-7.98798E-1	-9.13177E0	-9.14354E0	6.05583E-3	9.42945E-2	2.73623E1	-3.26986E1	-3.27505E1	2.68526E1	1.19749E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.03804E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.18753E-1	-7.98893E-1	-9.13169E0	-9.14369E0	5.84126E-3	9.4223E-2	2.7359E1	-3.26989E1	-3.25685E1	2.68394E1	1.20017E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.18348E-1	-7.99274E-1	-9.13172E0	-9.14338E0	5.79357E-3	9.41992E-2	2.73802E1	-3.26795E1	-3.2587E1	2.68478E1	1.20017E-7	2.5188E-3	2.5188E-3	6.26916E-3	3.02659E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.18443E-1	-7.98821E-1	-9.13169E0	-9.14309E0	6.1512E-3	9.46283E-2	2.73375E1	-3.26366E1	-3.25918E1	2.68377E1	1.20031E-7	2.5147E-3	2.5147E-3	6.29067E-3	3.01742E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.18014E-1	-7.98512E-1	-9.13143E0	-9.1433E0	5.74589E-3	9.42469E-2	2.73051E1	-3.27052E1	-3.27464E1	2.68048E1	1.2026E-7	2.50989E-3	2.50989E-3	6.31278E-3	3.03027E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.18777E-1	-7.98869E-1	-9.13157E0	-9.14335E0	5.79357E-3	9.45091E-2	2.73435E1	-3.26684E1	-3.26128E1	2.67278E1	1.19956E-7	2.51923E-3	2.51923E-3	6.31744E-3	3.00054E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.18944E-1	-7.98845E-1	-9.1315E0	-9.1435E0	5.60284E-3	9.46045E-2	2.73267E1	-3.26759E1	-3.25623E1	2.68286E1	1.20207E-7	2.51107E-3	2.51107E-3	6.31949E-3	3.00312E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09371E0	-8.18896E-1	-7.99227E-1	-9.13157E0	-9.1435E0	6.19888E-3	9.48429E-2	2.7202E1	-3.25055E1	-3.27853E1	2.68499E1	1.19902E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.02253E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.18801E-1	-7.98798E-1	-9.13141E0	-9.14333E0	5.98431E-3	9.44853E-2	2.73457E1	-3.2677E1	-3.26237E1	2.6843E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.01223E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.18515E-1	-7.99084E-1	-9.13134E0	-9.14342E0	5.76973E-3	9.44614E-2	2.72537E1	-3.26995E1	-3.26156E1	2.684E1	1.20142E-7	2.52131E-3	2.52131E-3	6.33919E-3	3.01862E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.18706E-1	-7.98583E-1	-9.13167E0	-9.14314E0	5.8651E-3	9.45807E-2	2.73586E1	-3.26831E1	-3.26482E1	2.6825E1	1.20017E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.02922E-1