[Scan]
initial_time=2016-01-15T22:35:12
final_time=2016-01-15T22:35:31
ip_count=19
run=1023
dataset=3
scan=191
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08766E-4
ql1_vset=
ql1_vmon=-8.1861E-1
ql1_imon=7.37917E-10
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=3.631E-10
ql3_vset=
ql3_vmon=-9.13174E0
ql3_imon=5.30314E-10
ql4_vset=
ql4_vmon=-9.14285E0
ql4_imon=6.7445E-10
mult1=-9.66486E-9
mult2=-2.68014E-9
rf_tmon=-5.60669E-3
rf_agc=3.28313E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=4.38762E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68981E0
bslens_imon=2.23179E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19712E1
lens5a_imon=2.01023E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12526E2
lens4a_imon=2.04828E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54121E1
cs_ef1b_imon=2.84755E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04676E2
lens23_imon=1.021E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05147E1
cs_ea1_imon=2.53512E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35899E0
lens1_imon=2.6813E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.98162E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03484E1
cs_ea2_imon=1.5409E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84586E1
cs_ef1a_imon=2.95531E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=4.61328E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=2.85152E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15034E1
os_ea1_imon=1.90298E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.0919E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23499E0
cs_ionrep_imon=1.22165E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91912E2
cs_nozzle_imon=1.93586E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=3.00901E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=8.00622E-10
tplens_vset=1.4E-1
tplens_vmon=1.65913E0
tplens_imon=-1.07759E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26697E1
iondef3_imon=1.49383E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27003E1
iondef2_imon=1.57311E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03018E2
lens6_imon=2.97967E-4
ql6_vset=1.0E-1
ql6_vmon=9.46045E-2
ql6_imon=4.60494E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28808E0
ionrepsh_imon=1.83892E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33764E1
lens5b_imon=2.17375E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.11461E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.2036E-1
os_ea2_imon=-5.85579E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.16578E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6372E0
os_ef2alow_imon=-2.41408E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.47569E-1
os_ef2bup_imon=-5.19273E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1137E1
os_restr2_imon=2.86918E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.29433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.25326E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73505E1
iondef1_imon=1.1275E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68221E1
iondef4_imon=1.11657E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.38819E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81045E-1
olens1_imon=3.53348E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12474E0
cs_ionaccel_imon=-1.72572E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02118E2
cs_ionfocb_imon=1.47392E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56621E1
einzel_imon=7.80677E-6
window_vset=0.0E0
window_vmon=2.31758E-1
window_imon=-6.51738E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82694E2
mask1_imon=2.39261E-4
mask2_vset=0.0E0
mask2_vmon=-1.86272E1
mask2_imon=-8.67976E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.91254E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.63835E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50165E3
multb_neg_imon=7.56568E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46461E0
defgridb_imon=6.24902E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33857E1
os_fil1_imon=5.04652E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.67141E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66642E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30658E1
cs_fil1_imon=9.95981E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62888E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67738E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09167E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.29879E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.53571E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33018E-1
cs_fil2_imon=-2.28154E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22492E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34588E-3
inlet_lpb_pmon=2.99E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.79714E-1
res40_imon=-2.42129E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.18539E-1	-7.98726E-1	-9.13217E0	-9.1435E0	5.57899E-3	9.43184E-2	2.73316E1	-3.2652E1	-3.24237E1	2.68412E1	1.20106E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00453E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.18038E-1	-7.98559E-1	-9.13174E0	-9.14354E0	5.48363E-3	9.43184E-2	2.73469E1	-3.2684E1	-3.26241E1	2.68101E1	1.20363E-7	2.52276E-3	2.52276E-3	6.29665E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.18372E-1	-7.98893E-1	-9.13169E0	-9.14321E0	5.43594E-3	9.41753E-2	2.73428E1	-3.27019E1	-3.27118E1	2.68204E1	1.20045E-7	2.51725E-3	2.51725E-3	6.3131E-3	2.9971E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.18563E-1	-7.99322E-1	-9.13146E0	-9.14345E0	5.76973E-3	9.41992E-2	2.73328E1	-3.26697E1	-3.27428E1	2.68478E1	1.19991E-7	2.52025E-3	2.52025E-3	6.29684E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.18658E-1	-7.98821E-1	-9.1316E0	-9.14328E0	5.67436E-3	9.43422E-2	2.73175E1	-3.26626E1	-3.28E1	2.68655E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.18515E-1	-7.99513E-1	-9.13186E0	-9.14338E0	6.00815E-3	9.44614E-2	2.73394E1	-3.26652E1	-3.27735E1	2.68431E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.18205E-1	-7.99155E-1	-9.13198E0	-9.1435E0	5.98431E-3	9.43899E-2	2.73123E1	-3.26543E1	-3.27029E1	2.6831E1	1.20084E-7	2.51915E-3	2.51915E-3	6.34099E-3	2.99879E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.18324E-1	-7.9906E-1	-9.13165E0	-9.14311E0	5.57899E-3	9.44376E-2	2.73027E1	-3.26831E1	-3.25347E1	2.6846E1	1.20106E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.01995E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.18062E-1	-7.98869E-1	-9.13179E0	-9.14297E0	5.55515E-3	9.44853E-2	2.73434E1	-3.26679E1	-3.26343E1	2.68511E1	1.19978E-7	2.52139E-3	2.52139E-3	6.32978E-3	2.98819E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.18372E-1	-7.98512E-1	-9.13179E0	-9.14302E0	6.00815E-3	9.41753E-2	2.73598E1	-3.26783E1	-3.26482E1	2.68238E1	1.19841E-7	2.51709E-3	2.51709E-3	6.32328E-3	2.97593E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.18205E-1	-7.98821E-1	-9.13196E0	-9.14311E0	5.50747E-3	9.41515E-2	2.73172E1	-3.26415E1	-3.27233E1	2.68588E1	1.19978E-7	2.52362E-3	2.52362E-3	6.33538E-3	2.97499E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.18086E-1	-7.98607E-1	-9.13174E0	-9.14297E0	5.62668E-3	9.44376E-2	2.73235E1	-3.26854E1	-3.2667E1	2.68388E1	1.20296E-7	2.51872E-3	2.51872E-3	6.32509E-3	2.98771E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.18515E-1	-7.98893E-1	-9.13169E0	-9.14309E0	5.74589E-3	9.4533E-2	2.73311E1	-3.26307E1	-3.26744E1	2.68472E1	1.20226E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.18491E-1	-7.98988E-1	-9.13177E0	-9.14321E0	5.62668E-3	9.45568E-2	2.73484E1	-3.25695E1	-3.24752E1	2.6843E1	1.20088E-7	2.5208E-3	2.5208E-3	6.32099E-3	3.02064E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.183E-1	-7.99108E-1	-9.13169E0	-9.14304E0	5.8651E-3	9.43422E-2	2.7376E1	-3.2653E1	-3.26999E1	2.67842E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.18586E-1	-7.98512E-1	-9.1315E0	-9.14342E0	5.6982E-3	9.41277E-2	2.73936E1	-3.26738E1	-3.26231E1	2.68516E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00302E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.18706E-1	-7.98893E-1	-9.1321E0	-9.14309E0	6.07967E-3	9.44138E-2	2.74396E1	-3.26997E1	-3.25074E1	2.68418E1	1.20226E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.18563E-1	-7.98416E-1	-9.13191E0	-9.14309E0	5.96046E-3	9.41992E-2	2.73399E1	-3.26732E1	-3.25346E1	2.68157E1	1.19953E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.18539E-1	-7.99131E-1	-9.13186E0	-9.14304E0	5.65052E-3	9.43184E-2	2.73284E1	-3.26364E1	-3.26811E1	2.68238E1	1.20106E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.9892E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.1861E-1	-7.98583E-1	-9.13174E0	-9.14285E0	5.48363E-3	9.46045E-2	2.73505E1	-3.27003E1	-3.26697E1	2.68221E1	1.20174E-7	2.51771E-3	2.51771E-3	6.34588E-3	2.99E-1