[Scan]
initial_time=2016-01-15T22:36:05
final_time=2016-01-15T22:36:24
ip_count=19
run=1023
dataset=3
scan=193
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08759E-4
ql1_vset=
ql1_vmon=-8.18372E-1
ql1_imon=7.53927E-10
ql2_vset=
ql2_vmon=-7.98965E-1
ql2_imon=3.90613E-10
ql3_vset=
ql3_vmon=-9.13177E0
ql3_imon=5.10085E-10
ql4_vset=
ql4_vmon=-9.14328E0
ql4_imon=7.02703E-10
mult1=-8.09083E-9
mult2=-2.61282E-9
rf_tmon=-3.12452E-3
rf_agc=3.49858E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.91278E-3
ql5_imon=4.51386E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68096E0
bslens_imon=2.26364E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19877E1
lens5a_imon=1.99465E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.0487E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53869E1
cs_ef1b_imon=2.84863E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0469E2
lens23_imon=1.02443E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04811E1
cs_ea1_imon=2.51849E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3177E0
lens1_imon=2.72377E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64867E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03979E1
cs_ea2_imon=1.53949E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84514E1
cs_ef1a_imon=2.95459E-5
olens2_vset=9.7E-1
olens2_vmon=9.70674E-1
olens2_imon=4.49908E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11508E1
os_restr1_imon=2.84034E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14946E1
os_ea1_imon=1.88847E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63948E1
os_ef1bup_imon=3.07532E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20904E0
cs_ionrep_imon=1.18838E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91909E2
cs_nozzle_imon=1.9365E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=3.00721E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20408E0
olens4_imon=8.76439E-10
tplens_vset=1.4E-1
tplens_vmon=1.64556E0
tplens_imon=-4.44003E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26164E1
iondef3_imon=1.5094E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26873E1
iondef2_imon=1.57169E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98204E-4
ql6_vset=1.0E-1
ql6_vmon=9.44376E-2
ql6_imon=4.84967E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27687E0
ionrepsh_imon=1.80706E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33858E1
lens5b_imon=2.15817E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.76567E1
cs_ef2b_imon=3.15497E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.97944E-1
os_ea2_imon=-5.53725E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.00637E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70837E1
cs_ef2a_imon=3.15821E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.57773E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.37958E-1
os_ef2bup_imon=-5.1639E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11316E1
os_restr2_imon=2.87602E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.26743E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01677E1
cs_anode2_imon=2.26371E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72877E1
iondef1_imon=1.11051E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68478E1
iondef4_imon=1.10756E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.41681E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=3.82781E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10071E0
cs_ionaccel_imon=-1.64643E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47543E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56549E1
einzel_imon=7.78154E-6
window_vset=0.0E0
window_vmon=2.54584E-1
window_imon=-7.02193E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39246E-4
mask2_vset=0.0E0
mask2_vmon=-1.86554E1
mask2_imon=-5.7245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.54444E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.73392E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.04893E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46461E0
defgridb_imon=5.96233E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33878E1
os_fil1_imon=5.32883E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.55128E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6648E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30679E1
cs_fil1_imon=9.95278E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6272E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67661E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.14232E-2
os_fil2_imon=-2.47376E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.35886E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72048E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32759E-1
cs_fil2_imon=-2.13138E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22506E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.02133E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.15754E-1
res40_imon=-2.44291E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.18419E-1	-7.99012E-1	-9.1321E0	-9.14326E0	5.76973E-3	9.44853E-2	2.73139E1	-3.2649E1	-3.25063E1	2.67995E1	1.1974E-7	2.51287E-3	2.51287E-3	6.32328E-3	3.00097E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.18491E-1	-7.98416E-1	-9.13205E0	-9.14321E0	5.48363E-3	9.43422E-2	2.73724E1	-3.26352E1	-3.27411E1	2.68394E1	1.20158E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01995E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.18539E-1	-7.98678E-1	-9.13196E0	-9.14326E0	5.8651E-3	9.44138E-2	2.73252E1	-3.26278E1	-3.2557E1	2.6865E1	1.19667E-7	2.52521E-3	2.52521E-3	6.33021E-3	3.01065E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.18014E-1	-7.99131E-1	-9.13196E0	-9.14338E0	5.81741E-3	9.42707E-2	2.7346E1	-3.26554E1	-3.27179E1	2.68581E1	1.20004E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.18491E-1	-7.99227E-1	-9.13236E0	-9.14328E0	5.43594E-3	9.43422E-2	2.73635E1	-3.26526E1	-3.26602E1	2.68569E1	1.20158E-7	2.51096E-3	2.51096E-3	6.32356E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.18539E-1	-7.99155E-1	-9.13191E0	-9.14319E0	5.53131E-3	9.41277E-2	2.73526E1	-3.27312E1	-3.25467E1	2.68202E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.18515E-1	-7.99108E-1	-9.13184E0	-9.14326E0	5.8651E-3	9.40084E-2	2.73544E1	-3.26296E1	-3.26957E1	2.6855E1	1.19913E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.18563E-1	-7.98416E-1	-9.13193E0	-9.14321E0	6.05583E-3	9.43184E-2	2.73279E1	-3.26218E1	-3.26116E1	2.68436E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.02659E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.18253E-1	-7.98583E-1	-9.13203E0	-9.14314E0	5.98431E-3	9.41515E-2	2.73249E1	-3.26392E1	-3.25858E1	2.68376E1	1.19809E-7	2.52428E-3	2.52428E-3	6.29098E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.17919E-1	-7.98678E-1	-9.13191E0	-9.14345E0	6.07967E-3	9.44853E-2	2.7367E1	-3.26855E1	-3.2632E1	2.68851E1	1.19705E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.18038E-1	-7.98917E-1	-9.13174E0	-9.14328E0	6.27041E-3	9.43661E-2	2.7324E1	-3.26703E1	-3.25334E1	2.68696E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.18467E-1	-7.98821E-1	-9.13203E0	-9.14316E0	5.74589E-3	9.4533E-2	2.73045E1	-3.26836E1	-3.26425E1	2.68113E1	1.20055E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.01738E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.18491E-1	-7.98607E-1	-9.13236E0	-9.14316E0	6.12736E-3	9.42469E-2	2.73619E1	-3.26654E1	-3.26023E1	2.68632E1	1.20069E-7	2.52428E-3	2.52428E-3	6.29645E-3	3.02133E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-8.18181E-1	-7.99084E-1	-9.13203E0	-9.14307E0	5.76973E-3	9.43422E-2	2.74481E1	-3.27348E1	-3.26134E1	2.68791E1	1.19953E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.97901E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.18539E-1	-7.99084E-1	-9.13191E0	-9.14302E0	6.07967E-3	9.42469E-2	2.73201E1	-3.26693E1	-3.26554E1	2.69247E1	1.19497E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.96929E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.18753E-1	-7.98893E-1	-9.13229E0	-9.14316E0	6.10352E-3	9.40561E-2	2.73399E1	-3.26855E1	-3.25882E1	2.68304E1	1.20017E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.98222E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.18586E-1	-7.99251E-1	-9.13196E0	-9.14328E0	6.10352E-3	9.4533E-2	2.74102E1	-3.28045E1	-3.2745E1	2.68635E1	1.19809E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.18205E-1	-7.98798E-1	-9.13184E0	-9.14307E0	6.05583E-3	9.46999E-2	2.7301E1	-3.26787E1	-3.26283E1	2.68592E1	1.2026E-7	2.52061E-3	2.52061E-3	6.33977E-3	2.99941E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09634E0	-8.18682E-1	-7.98821E-1	-9.13165E0	-9.14311E0	5.67436E-3	9.40561E-2	2.73225E1	-3.26332E1	-3.26705E1	2.6852E1	1.19595E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.03545E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.18372E-1	-7.98965E-1	-9.13177E0	-9.14328E0	5.91278E-3	9.44376E-2	2.72877E1	-3.26873E1	-3.26164E1	2.68478E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.02133E-1