[Scan]
initial_time=2016-01-15T22:36:32
final_time=2016-01-15T22:36:51
ip_count=19
run=1023
dataset=3
scan=194
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-8.18419E-1
ql1_imon=7.46202E-10
ql2_vset=
ql2_vmon=-7.98774E-1
ql2_imon=3.26467E-10
ql3_vset=
ql3_vmon=-9.13165E0
ql3_imon=4.9547E-10
ql4_vset=
ql4_vmon=-9.14328E0
ql4_imon=6.65963E-10
mult1=-9.81854E-9
mult2=-2.6625E-9
rf_tmon=-4.19683E-3
rf_agc=3.29611E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.72205E-3
ql5_imon=4.23563E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67742E0
bslens_imon=2.34505E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19559E1
lens5a_imon=2.0035E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.04951E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54151E1
cs_ef1b_imon=2.86629E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04639E2
lens23_imon=1.02284E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04634E1
cs_ea1_imon=2.55423E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35663E0
lens1_imon=2.64944E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.98847E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0418E1
cs_ea2_imon=1.50905E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84616E1
cs_ef1a_imon=2.94918E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=4.81892E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11874E1
os_restr1_imon=2.84503E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14857E1
os_ea1_imon=1.87821E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63413E1
os_ef1bup_imon=3.08217E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26272E0
cs_ionrep_imon=1.19262E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91945E2
cs_nozzle_imon=1.93459E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=3.00504E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=8.41939E-10
tplens_vset=1.4E-1
tplens_vmon=1.62374E0
tplens_imon=-1.0422E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26077E1
iondef3_imon=1.49135E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26661E1
iondef2_imon=1.5501E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03027E2
lens6_imon=2.98137E-4
ql6_vset=1.0E-1
ql6_vmon=9.41992E-2
ql6_imon=5.21898E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31168E0
ionrepsh_imon=1.80246E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34082E1
lens5b_imon=2.15853E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.753E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.2508E-1
os_ea2_imon=-5.85579E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06152E2
lens4b_imon=2.0052E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71654E1
cs_ef2a_imon=3.14668E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59335E0
os_ef2alow_imon=-2.18342E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.86902E-1
os_ef2bup_imon=-5.08462E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11352E1
os_restr2_imon=2.8598E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.28017E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01425E1
cs_anode2_imon=2.24893E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73405E1
iondef1_imon=1.09883E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68586E1
iondef4_imon=1.06863E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.39893E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=2.92325E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15477E0
cs_ionaccel_imon=-1.55994E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.47601E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.63738E-6
window_vset=0.0E0
window_vmon=2.0593E-1
window_imon=-7.81481E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82689E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-4.78747E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92608E3
multa_neg_imon=7.48427E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93746E3
defgrida_imon=6.64897E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.00291E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41146E0
defgridb_imon=6.27733E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33749E1
os_fil1_imon=4.81226E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.37108E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6603E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30689E1
cs_fil1_imon=9.96528E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62696E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67042E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.06635E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.17866E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.23682E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3263E-1
cs_fil2_imon=-2.04729E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.31991E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22304E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.56289E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.18682E-1	-7.98917E-1	-9.13177E0	-9.14338E0	5.84126E-3	9.42945E-2	2.73423E1	-3.26675E1	-3.26409E1	2.68176E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01085E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.18443E-1	-7.99203E-1	-9.13191E0	-9.14321E0	6.1512E-3	9.45568E-2	2.73512E1	-3.26474E1	-3.26487E1	2.67887E1	1.19787E-7	2.52022E-3	2.52022E-3	6.2931E-3	3.00016E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.1861E-1	-7.9937E-1	-9.13157E0	-9.1433E0	6.00815E-3	9.46522E-2	2.73202E1	-3.26735E1	-3.26034E1	2.68615E1	1.20076E-7	2.51557E-3	2.51557E-3	6.31332E-3	3.00197E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.18253E-1	-7.99108E-1	-9.13184E0	-9.14361E0	6.4373E-3	9.43184E-2	2.73375E1	-3.26596E1	-3.26201E1	2.6783E1	1.19991E-7	2.52236E-3	2.52236E-3	6.31269E-3	2.98842E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-8.18491E-1	-7.99131E-1	-9.13177E0	-9.14311E0	5.98431E-3	9.4223E-2	2.73181E1	-3.26626E1	-3.26561E1	2.68244E1	1.19646E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.9841E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.18586E-1	-7.98559E-1	-9.13186E0	-9.14335E0	6.07967E-3	9.44138E-2	2.73454E1	-3.26629E1	-3.26361E1	2.68809E1	1.20069E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.03185E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.18706E-1	-7.99203E-1	-9.13208E0	-9.14333E0	5.96046E-3	9.42707E-2	2.73293E1	-3.26614E1	-3.26089E1	2.68172E1	1.1991E-7	2.51798E-3	2.51798E-3	6.32576E-3	2.99425E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.18133E-1	-7.98774E-1	-9.13172E0	-9.1434E0	6.1512E-3	9.45568E-2	2.73185E1	-3.26616E1	-3.27017E1	2.68662E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.18276E-1	-7.98559E-1	-9.13196E0	-9.14323E0	6.00815E-3	9.4533E-2	2.73511E1	-3.26691E1	-3.26537E1	2.68532E1	1.20005E-7	2.52338E-3	2.52338E-3	6.3016E-3	2.98985E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.18348E-1	-7.99274E-1	-9.13181E0	-9.1433E0	5.57899E-3	9.44614E-2	2.73417E1	-3.26868E1	-3.26231E1	2.68742E1	1.19891E-7	2.52131E-3	2.52131E-3	6.31798E-3	3.01609E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.18634E-1	-7.98917E-1	-9.13205E0	-9.14333E0	6.05583E-3	9.45568E-2	2.73242E1	-3.26845E1	-3.26028E1	2.68296E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.18253E-1	-7.99084E-1	-9.1321E0	-9.14319E0	6.19888E-3	9.41753E-2	2.73448E1	-3.26627E1	-3.26242E1	2.68725E1	1.20042E-7	2.51182E-3	2.51182E-3	6.3074E-3	3.02368E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.18348E-1	-7.98988E-1	-9.13177E0	-9.14326E0	5.96046E-3	9.46522E-2	2.73135E1	-3.26681E1	-3.26326E1	2.68244E1	1.19902E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.99686E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.18396E-1	-7.98464E-1	-9.13198E0	-9.14307E0	6.10352E-3	9.48191E-2	2.72426E1	-3.25882E1	-3.273E1	2.68328E1	1.20017E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01609E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09642E0	-8.18229E-1	-7.98488E-1	-9.13198E0	-9.14314E0	5.84126E-3	9.41515E-2	2.73484E1	-3.26609E1	-3.26975E1	2.67668E1	1.19978E-7	2.51248E-3	2.51248E-3	6.30182E-3	3.00942E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.18443E-1	-7.99346E-1	-9.13165E0	-9.14321E0	6.03199E-3	9.44376E-2	2.73772E1	-3.26627E1	-3.25864E1	2.68737E1	1.20055E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.9892E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.18396E-1	-7.98535E-1	-9.13167E0	-9.14316E0	5.79357E-3	9.4533E-2	2.75022E1	-3.28159E1	-3.25521E1	2.6828E1	1.19913E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.9874E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.1811E-1	-7.99036E-1	-9.13157E0	-9.14309E0	6.12736E-3	9.44614E-2	2.72886E1	-3.26903E1	-3.25971E1	2.68496E1	1.19913E-7	2.52428E-3	2.52428E-3	6.31837E-3	2.98222E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.18276E-1	-7.99227E-1	-9.13172E0	-9.14321E0	5.81741E-3	9.42469E-2	2.73159E1	-3.26615E1	-3.26014E1	2.68082E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.18419E-1	-7.98774E-1	-9.13165E0	-9.14328E0	5.72205E-3	9.41992E-2	2.73405E1	-3.26661E1	-3.26077E1	2.68586E1	1.2026E-7	2.51203E-3	2.51203E-3	6.3074E-3	3.01738E-1