[Scan]
initial_time=2016-01-15T22:37:25
final_time=2016-01-15T22:37:44
ip_count=19
run=1023
dataset=3
scan=196
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08729E-4
ql1_vset=
ql1_vmon=-8.18682E-1
ql1_imon=7.2546E-10
ql2_vset=
ql2_vmon=-7.99417E-1
ql2_imon=3.98922E-10
ql3_vset=
ql3_vmon=-9.13205E0
ql3_imon=3.96907E-10
ql4_vset=
ql4_vmon=-9.14314E0
ql4_imon=6.90198E-10
mult1=-9.55978E-9
mult2=-2.70065E-9
rf_tmon=-4.64461E-3
rf_agc=3.35198E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.07967E-3
ql5_imon=4.76551E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63849E0
bslens_imon=2.36983E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19258E1
lens5a_imon=1.97943E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12549E2
lens4a_imon=2.04852E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54127E1
cs_ef1b_imon=2.84395E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04679E2
lens23_imon=1.02248E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0464E1
cs_ea1_imon=2.54822E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38731E0
lens1_imon=2.84411E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65083E1
os_ef1alow_imon=2.98666E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04074E1
cs_ea2_imon=1.50905E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84184E1
cs_ef1a_imon=2.94702E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=5.28312E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11592E1
os_restr1_imon=2.84971E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15188E1
os_ea1_imon=1.8867E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63551E1
os_ef1bup_imon=3.0955E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26626E0
cs_ionrep_imon=1.1951E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01725E1
cs_anode1_imon=2.98306E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=8.62312E-10
tplens_vset=1.4E-1
tplens_vmon=1.64969E0
tplens_imon=-4.54621E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.47294E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26476E1
iondef2_imon=1.57276E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03007E2
lens6_imon=2.98091E-4
ql6_vset=1.0E-1
ql6_vmon=9.43899E-2
ql6_imon=4.90308E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27687E0
ionrepsh_imon=1.78229E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33563E1
lens5b_imon=2.20489E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.736E1
cs_ef2b_imon=3.11497E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.97944E-1
os_ea2_imon=-7.5901E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00559E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7133E1
cs_ef2a_imon=3.16038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6378E0
os_ef2alow_imon=-2.45012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.73998E-1
os_ef2bup_imon=-5.26121E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11394E1
os_restr2_imon=2.86413E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.27557E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02037E1
cs_anode2_imon=2.23884E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73448E1
iondef1_imon=1.12254E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68508E1
iondef4_imon=1.09963E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.41131E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=3.26359E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13495E0
cs_ionaccel_imon=-1.85907E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.4746E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56531E1
einzel_imon=7.80317E-6
window_vset=0.0E0
window_vmon=2.52181E-1
window_imon=-6.12094E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82674E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.865E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.88777E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.57464E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=6.98876E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.61816E0
defgridb_imon=6.32335E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3372E1
os_fil1_imon=4.70414E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.42514E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65908E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30754E1
cs_fil1_imon=9.96101E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62228E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66995E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10433E-2
os_fil2_imon=-2.54584E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.25654E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.23176E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32112E-1
cs_fil2_imon=-2.19145E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11219E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22386E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.03741E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.19159E-1	-7.9906E-1	-9.13188E0	-9.14309E0	5.65052E-3	9.39846E-2	2.73134E1	-3.26526E1	-3.26797E1	2.68545E1	1.19841E-7	2.52236E-3	2.52236E-3	6.31269E-3	3.00097E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.19087E-1	-7.98726E-1	-9.13157E0	-9.14321E0	6.10352E-3	9.41515E-2	2.73216E1	-3.26695E1	-3.25177E1	2.68338E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9978E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.19063E-1	-7.98965E-1	-9.13155E0	-9.1428E0	6.1512E-3	9.43422E-2	2.73178E1	-3.26666E1	-3.26098E1	2.68511E1	1.19819E-7	2.51359E-3	2.51359E-3	6.3074E-3	2.99348E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.18133E-1	-7.99108E-1	-9.13181E0	-9.14304E0	5.88894E-3	9.4533E-2	2.73311E1	-3.2695E1	-3.26549E1	2.6829E1	1.1988E-7	2.51679E-3	2.51679E-3	6.323E-3	3.00247E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.18443E-1	-7.98559E-1	-9.13191E0	-9.14333E0	6.29425E-3	9.46522E-2	2.73454E1	-3.26482E1	-3.25791E1	2.67902E1	1.19705E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.03449E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.18467E-1	-7.99179E-1	-9.13177E0	-9.14338E0	5.84126E-3	9.45807E-2	2.73303E1	-3.26849E1	-3.26164E1	2.68418E1	1.20209E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.0148E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.18563E-1	-7.98702E-1	-9.13179E0	-9.14316E0	6.1512E-3	9.44376E-2	2.73105E1	-3.26266E1	-3.26104E1	2.68418E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.18491E-1	-7.98655E-1	-9.13153E0	-9.14316E0	6.07967E-3	9.43661E-2	2.73193E1	-3.26732E1	-3.27623E1	2.68689E1	1.19809E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.18205E-1	-7.99155E-1	-9.13184E0	-9.1428E0	5.96046E-3	9.4223E-2	2.73478E1	-3.26194E1	-3.25473E1	2.68262E1	1.19965E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.9874E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.1811E-1	-7.9875E-1	-9.13181E0	-9.14302E0	5.93662E-3	9.42707E-2	2.73303E1	-3.26332E1	-3.26615E1	2.68304E1	1.20311E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.98665E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.18396E-1	-7.98988E-1	-9.13215E0	-9.14299E0	5.74589E-3	9.41515E-2	2.7285E1	-3.26626E1	-3.26254E1	2.68238E1	1.20069E-7	2.52318E-3	2.52318E-3	6.34037E-3	2.9874E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.18253E-1	-7.9875E-1	-9.13191E0	-9.14311E0	5.48363E-3	9.41992E-2	2.73502E1	-3.26831E1	-3.26879E1	2.68406E1	1.20106E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.0148E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.18229E-1	-7.98821E-1	-9.13215E0	-9.14316E0	5.45979E-3	9.41992E-2	2.72775E1	-3.26609E1	-3.25347E1	2.68298E1	1.19913E-7	2.51116E-3	2.51116E-3	6.28552E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.18253E-1	-7.98917E-1	-9.13186E0	-9.14311E0	5.48363E-3	9.41753E-2	2.72696E1	-3.25918E1	-3.27348E1	2.68611E1	1.20069E-7	2.52318E-3	2.52318E-3	6.29645E-3	2.9952E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.18563E-1	-7.99084E-1	-9.13172E0	-9.1428E0	5.65052E-3	9.44614E-2	2.73231E1	-3.26693E1	-3.24722E1	2.68526E1	1.20226E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.18205E-1	-7.99131E-1	-9.13167E0	-9.14316E0	5.55515E-3	9.42469E-2	2.73466E1	-3.27029E1	-3.27149E1	2.68869E1	1.19809E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.00824E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.183E-1	-7.98869E-1	-9.13205E0	-9.14314E0	5.36442E-3	9.44138E-2	2.7229E1	-3.25753E1	-3.24868E1	2.68316E1	1.19757E-7	2.52538E-3	2.52538E-3	6.32936E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.18372E-1	-7.98893E-1	-9.13205E0	-9.14342E0	5.60284E-3	9.44614E-2	2.73454E1	-3.26735E1	-3.26951E1	2.68395E1	1.19902E-7	2.51847E-3	2.51847E-3	6.34518E-3	3.01223E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-8.1861E-1	-7.99084E-1	-9.13177E0	-9.14321E0	5.81741E-3	9.43422E-2	2.73291E1	-3.26524E1	-3.2599E1	2.68351E1	1.20069E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.18682E-1	-7.99417E-1	-9.13205E0	-9.14314E0	6.07967E-3	9.43899E-2	2.73448E1	-3.26476E1	-3.26224E1	2.68508E1	1.20226E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00824E-1