[Scan]
initial_time=2016-01-15T22:37:52
final_time=2016-01-15T22:38:11
ip_count=19
run=1023
dataset=3
scan=197
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08739E-4
ql1_vset=
ql1_vmon=-8.18729E-1
ql1_imon=7.45273E-10
ql2_vset=
ql2_vmon=-7.99036E-1
ql2_imon=3.60847E-10
ql3_vset=
ql3_vmon=-9.13203E0
ql3_imon=5.28896E-10
ql4_vset=
ql4_vmon=-9.14314E0
ql4_imon=6.64699E-10
mult1=-1.0824E-8
mult2=-2.68468E-9
rf_tmon=-4.91498E-3
rf_agc=3.32795E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.84126E-3
ql5_imon=4.43006E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69299E0
bslens_imon=2.32268E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20147E1
lens5a_imon=2.00411E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12537E2
lens4a_imon=2.05126E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5385E1
cs_ef1b_imon=2.84287E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04847E1
cs_ea1_imon=2.54293E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32297E0
lens1_imon=2.73038E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64879E1
os_ef1alow_imon=2.98486E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03996E1
cs_ea2_imon=1.51303E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=2.9481E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=4.90212E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=2.83818E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14889E1
os_ea1_imon=1.87262E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63509E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21537E0
cs_ionrep_imon=1.2192E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91969E2
cs_nozzle_imon=1.93648E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=3.00432E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=8.05581E-10
tplens_vset=1.4E-1
tplens_vmon=1.59858E0
tplens_imon=-8.67898E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26687E1
iondef3_imon=1.54021E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26506E1
iondef2_imon=1.54609E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02981E2
lens6_imon=2.98225E-4
ql6_vset=1.0E-1
ql6_vmon=9.4223E-2
ql6_imon=4.90999E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26006E0
ionrepsh_imon=1.80246E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33554E1
lens5b_imon=2.1738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74321E1
cs_ef2b_imon=3.14164E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.28563E-1
os_ea2_imon=-6.04679E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00707E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.15965E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62819E0
os_ef2alow_imon=-2.31317E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40962E-1
os_ef2bup_imon=-5.0702E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11268E1
os_restr2_imon=2.86701E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.29157E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.25506E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73604E1
iondef1_imon=1.09946E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68587E1
iondef4_imon=1.10792E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.42524E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=3.54874E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-1.97079E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02121E2
cs_ionfocb_imon=1.47576E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56483E1
einzel_imon=7.62297E-6
window_vset=0.0E0
window_vmon=2.48577E-1
window_imon=-6.0849E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82716E2
mask1_imon=2.39059E-4
mask2_vset=0.0E0
mask2_vmon=-1.86921E1
mask2_imon=-8.21124E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.79541E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.88084E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.77337E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52919E0
defgridb_imon=6.19766E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33765E1
os_fil1_imon=5.18467E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.85161E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65556E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30752E1
cs_fil1_imon=9.96191E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63027E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66615E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09358E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.05853E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.4112E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32889E-1
cs_fil2_imon=-2.10135E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62024E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22283E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.26566E-1
res40_imon=-2.37083E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.183E-1	-7.98869E-1	-9.13167E0	-9.14297E0	6.1512E-3	9.41992E-2	2.73216E1	-3.26726E1	-3.26083E1	2.6822E1	1.20084E-7	2.51693E-3	2.51693E-3	6.32978E-3	2.99613E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.18467E-1	-7.98726E-1	-9.13193E0	-9.14299E0	5.67436E-3	9.41992E-2	2.72853E1	-3.26849E1	-3.2647E1	2.68202E1	1.20106E-7	2.51417E-3	2.51417E-3	6.35059E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.18205E-1	-7.9906E-1	-9.13205E0	-9.14333E0	5.98431E-3	9.43661E-2	2.73505E1	-3.26531E1	-3.26384E1	2.68418E1	1.20174E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00563E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.18872E-1	-7.98631E-1	-9.13215E0	-9.14335E0	5.98431E-3	9.43899E-2	2.7344E1	-3.26431E1	-3.2616E1	2.68448E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01995E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.18563E-1	-7.99155E-1	-9.132E0	-9.14295E0	5.67436E-3	9.41277E-2	2.73241E1	-3.2604E1	-3.2604E1	2.67974E1	1.20122E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.18682E-1	-7.99012E-1	-9.13191E0	-9.14307E0	5.72205E-3	9.45091E-2	2.73105E1	-3.26915E1	-3.26038E1	2.6822E1	1.20278E-7	2.51771E-3	2.51771E-3	6.28006E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.18563E-1	-7.98941E-1	-9.13188E0	-9.14288E0	5.88894E-3	9.44138E-2	2.73234E1	-3.26708E1	-3.26791E1	2.68532E1	1.19809E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.18753E-1	-7.99108E-1	-9.1321E0	-9.14297E0	6.03199E-3	9.43899E-2	2.73115E1	-3.2666E1	-3.26573E1	2.6847E1	1.19705E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.02396E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.183E-1	-7.99036E-1	-9.13174E0	-9.14292E0	5.98431E-3	9.44138E-2	2.73182E1	-3.26372E1	-3.26104E1	2.6837E1	1.1974E-7	2.51709E-3	2.51709E-3	6.31269E-3	3.03383E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.18634E-1	-7.98535E-1	-9.132E0	-9.1433E0	5.96046E-3	9.45807E-2	2.73364E1	-3.26679E1	-3.26838E1	2.68477E1	1.20563E-7	2.51693E-3	2.51693E-3	6.34661E-3	3.00676E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.18634E-1	-7.98535E-1	-9.13196E0	-9.1429E0	5.50747E-3	9.45807E-2	2.73382E1	-3.26585E1	-3.26493E1	2.68627E1	1.20414E-7	2.52169E-3	2.52169E-3	6.32896E-3	2.99941E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.18872E-1	-7.98917E-1	-9.13196E0	-9.14338E0	5.60284E-3	9.42707E-2	2.73175E1	-3.26484E1	-3.26119E1	2.68601E1	1.20137E-7	2.51915E-3	2.51915E-3	6.30182E-3	3.00942E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.18348E-1	-7.98607E-1	-9.13198E0	-9.14314E0	5.48363E-3	9.43899E-2	2.73316E1	-3.26555E1	-3.25723E1	2.68761E1	1.198E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00966E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.18443E-1	-7.98917E-1	-9.13198E0	-9.14316E0	5.65052E-3	9.45568E-2	2.73788E1	-3.2698E1	-3.25806E1	2.68406E1	1.20158E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.9892E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.183E-1	-7.98893E-1	-9.13179E0	-9.14319E0	5.96046E-3	9.42707E-2	2.72949E1	-3.26735E1	-3.26512E1	2.68214E1	1.198E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.98665E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.18205E-1	-7.98678E-1	-9.13205E0	-9.14304E0	5.76973E-3	9.4223E-2	2.7373E1	-3.27053E1	-3.25888E1	2.68274E1	1.20069E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.00563E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.18467E-1	-7.98512E-1	-9.13205E0	-9.14326E0	5.76973E-3	9.45091E-2	2.72961E1	-3.2632E1	-3.26194E1	2.6837E1	1.20122E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.18706E-1	-7.98655E-1	-9.13208E0	-9.14328E0	6.10352E-3	9.41277E-2	2.73517E1	-3.26679E1	-3.2636E1	2.68869E1	1.20278E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01609E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.18682E-1	-7.99084E-1	-9.13212E0	-9.14299E0	5.96046E-3	9.41038E-2	2.73243E1	-3.27059E1	-3.26098E1	2.68532E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.18729E-1	-7.99036E-1	-9.13203E0	-9.14314E0	5.84126E-3	9.4223E-2	2.73604E1	-3.26506E1	-3.26687E1	2.68587E1	1.19965E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.00302E-1