[Scan]
initial_time=2016-01-15T22:38:18
final_time=2016-01-15T22:38:38
ip_count=19
run=1023
dataset=3
scan=198
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08741E-4
ql1_vset=
ql1_vmon=-8.18253E-1
ql1_imon=7.59244E-10
ql2_vset=
ql2_vmon=-7.98869E-1
ql2_imon=3.47722E-10
ql3_vset=
ql3_vmon=-9.13172E0
ql3_imon=5.19812E-10
ql4_vset=
ql4_vmon=-9.14309E0
ql4_imon=7.08783E-10
mult1=-9.63202E-9
mult2=-2.84836E-9
rf_tmon=-5.83424E-3
rf_agc=3.31954E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.17504E-3
ql5_imon=4.62806E-10
bslens_vset=-6.2E0
bslens_vmon=-6.73118E0
bslens_imon=2.32957E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19057E1
lens5a_imon=1.9867E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12518E2
lens4a_imon=2.04978E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54109E1
cs_ef1b_imon=2.84575E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02048E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04797E1
cs_ea1_imon=2.54741E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32389E0
lens1_imon=2.632E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64488E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03829E1
cs_ea2_imon=1.55982E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84694E1
cs_ef1a_imon=2.95819E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=4.547E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10913E1
os_restr1_imon=2.86377E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15566E1
os_ea1_imon=1.89841E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63936E1
os_ef1bup_imon=3.06091E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.18315E0
cs_ionrep_imon=1.17605E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91935E2
cs_nozzle_imon=1.93643E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01731E1
cs_anode1_imon=3.00468E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20463E0
olens4_imon=8.22127E-10
tplens_vset=1.4E-1
tplens_vmon=1.67562E0
tplens_imon=-3.29731E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26146E1
iondef3_imon=1.48926E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26446E1
iondef2_imon=1.55391E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02976E2
lens6_imon=2.98328E-4
ql6_vset=1.0E-1
ql6_vmon=9.45807E-2
ql6_imon=4.78959E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2463E0
ionrepsh_imon=1.7969E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33327E1
lens5b_imon=2.1838E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74952E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.4226E-1
os_ea2_imon=-6.77351E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00536E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7133E1
cs_ef2a_imon=3.17551E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.642E0
os_ef2alow_imon=-2.46453E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.45767E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1128E1
os_restr2_imon=2.86161E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23106E2
cs_ionfoca_imon=6.30693E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.24929E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73838E1
iondef1_imon=1.09888E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68454E1
iondef4_imon=1.11476E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.38039E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=3.18313E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12233E0
cs_ionaccel_imon=-1.66445E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56501E1
einzel_imon=8.1023E-6
window_vset=0.0E0
window_vmon=2.47976E-1
window_imon=-1.02655E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8268E2
mask1_imon=2.39203E-4
mask2_vset=0.0E0
mask2_vmon=-1.8674E1
mask2_imon=-4.85955E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.70726E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=5.86139E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.09197E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3949E0
defgridb_imon=6.45582E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33771E1
os_fil1_imon=4.62606E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.9357E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65803E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30778E1
cs_fil1_imon=9.95921E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63315E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66918E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1032E-2
os_fil2_imon=-2.4197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.15753E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.11391E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33666E-1
cs_fil2_imon=-2.49178E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19028E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22487E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31012E-3
inlet_lpb_pmon=3.0012E-1
chamber_ion_pmon=1.19856E-7
chamber_cvt_pmon=2.51755E-3
foreline_cvt_pmon=2.51755E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.52995E-1
res40_imon=-2.51138E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=189
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.18229E-1	-7.98798E-1	-9.13217E0	-9.14319E0	5.6982E-3	9.44614E-2	2.73393E1	-3.26644E1	-3.26272E1	2.68557E1	1.20243E-7	2.51709E-3	2.51709E-3	6.31269E-3	3.006E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.17966E-1	-7.98512E-1	-9.13205E0	-9.14314E0	5.79357E-3	9.41038E-2	2.73412E1	-3.26738E1	-3.26334E1	2.68331E1	1.19851E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.9892E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.17943E-1	-7.98416E-1	-9.13198E0	-9.14326E0	6.03199E-3	9.40561E-2	2.73204E1	-3.26366E1	-3.26661E1	2.6847E1	1.20191E-7	2.52027E-3	2.52027E-3	6.3074E-3	2.98554E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.18086E-1	-7.9875E-1	-9.13179E0	-9.14333E0	5.76973E-3	9.43184E-2	2.73263E1	-3.26714E1	-3.26337E1	2.68244E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.18229E-1	-7.98941E-1	-9.13188E0	-9.14338E0	5.8651E-3	9.43184E-2	2.73556E1	-3.26861E1	-3.26585E1	2.68478E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.18563E-1	-7.98726E-1	-9.13191E0	-9.14311E0	5.93662E-3	9.43184E-2	2.73201E1	-3.26687E1	-3.25966E1	2.68466E1	1.20069E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.18348E-1	-7.98869E-1	-9.13205E0	-9.14345E0	5.60284E-3	9.44138E-2	2.72821E1	-3.26225E1	-3.26236E1	2.68163E1	1.20278E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.18396E-1	-7.9875E-1	-9.13203E0	-9.14321E0	5.62668E-3	9.43661E-2	2.73399E1	-3.26627E1	-3.26693E1	2.68418E1	1.2026E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00966E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.18372E-1	-7.99298E-1	-9.13179E0	-9.14321E0	5.34058E-3	9.43184E-2	2.73351E1	-3.26548E1	-3.25868E1	2.68544E1	1.1966E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.00676E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.18348E-1	-7.98965E-1	-9.13157E0	-9.14297E0	5.76973E-3	9.43184E-2	2.73611E1	-3.26531E1	-3.26838E1	2.68111E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.17943E-1	-7.98821E-1	-9.13208E0	-9.14307E0	5.81741E-3	9.41515E-2	2.72855E1	-3.26554E1	-3.2626E1	2.68076E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0148E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09279E0	-8.18014E-1	-7.99036E-1	-9.13205E0	-9.14309E0	5.88894E-3	9.41277E-2	2.73358E1	-3.26744E1	-3.2649E1	2.68306E1	1.20244E-7	2.52027E-3	2.52027E-3	6.33538E-3	3.0201E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09317E0	-8.17966E-1	-7.98821E-1	-9.13184E0	-9.14288E0	5.74589E-3	9.42707E-2	2.73399E1	-3.26146E1	-3.26729E1	2.6846E1	1.20106E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.03545E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.18038E-1	-7.99465E-1	-9.13227E0	-9.14319E0	5.81741E-3	9.44376E-2	2.73771E1	-3.26762E1	-3.25847E1	2.68472E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01085E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.18062E-1	-7.99084E-1	-9.13205E0	-9.14345E0	5.55515E-3	9.43899E-2	2.73391E1	-3.26537E1	-3.26129E1	2.68202E1	1.19991E-7	2.51803E-3	2.51803E-3	6.32273E-3	3.00635E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.18181E-1	-7.99084E-1	-9.13203E0	-9.14321E0	5.93662E-3	9.42707E-2	2.73012E1	-3.26753E1	-3.26669E1	2.68387E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.1811E-1	-7.98845E-1	-9.13191E0	-9.14352E0	5.67436E-3	9.42469E-2	2.73251E1	-3.26135E1	-3.26216E1	2.68026E1	1.20171E-7	2.51758E-3	2.51758E-3	6.31321E-3	3.00916E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.18062E-1	-7.98702E-1	-9.13219E0	-9.1433E0	5.72205E-3	9.41038E-2	2.7357E1	-3.2682E1	-3.2639E1	2.68221E1	1.20208E-7	2.51611E-3	2.51611E-3	6.3131E-3	3.02972E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.18443E-1	-7.98726E-1	-9.13205E0	-9.14314E0	6.31809E-3	9.46522E-2	2.73305E1	-3.2718E1	-3.26278E1	2.6813E1	1.19953E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.18253E-1	-7.98869E-1	-9.13172E0	-9.14309E0	6.17504E-3	9.45807E-2	2.73838E1	-3.26446E1	-3.26146E1	2.68454E1	1.19856E-7	2.51755E-3	2.51755E-3	6.31012E-3	3.0012E-1