[Scan]
initial_time=2016-01-15T22:39:12
final_time=2016-01-15T22:39:31
ip_count=19
run=1023
dataset=3
scan=200
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08781E-4
ql1_vset=
ql1_vmon=-8.18419E-1
ql1_imon=7.49576E-10
ql2_vset=
ql2_vmon=-7.98917E-1
ql2_imon=3.53205E-10
ql3_vset=
ql3_vmon=-9.13205E0
ql3_imon=5.36799E-10
ql4_vset=
ql4_vmon=-9.14311E0
ql4_imon=6.99997E-10
mult1=-1.10528E-8
mult2=-2.53098E-9
rf_tmon=-3.65925E-3
rf_agc=3.44631E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=4.67205E-10
bslens_vset=-6.2E0
bslens_vmon=-6.73346E0
bslens_imon=2.27426E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19877E1
lens5a_imon=1.99395E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54067E1
cs_ef1b_imon=2.85324E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04666E2
lens23_imon=1.01976E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05023E1
cs_ea1_imon=2.56698E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35191E0
lens1_imon=2.82995E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64591E1
os_ef1alow_imon=2.98009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04103E1
cs_ea2_imon=1.52179E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84417E1
cs_ef1a_imon=2.94499E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=4.49455E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11627E1
os_restr1_imon=2.82405E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15429E1
os_ea1_imon=1.9005E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63514E1
os_ef1bup_imon=3.08713E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=1.19829E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91903E2
cs_nozzle_imon=1.93477E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02058E1
cs_anode1_imon=2.99955E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=8.17919E-10
tplens_vset=1.4E-1
tplens_vmon=1.64497E0
tplens_imon=-4.72318E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25984E1
iondef3_imon=1.51789E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27155E1
iondef2_imon=1.5678E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03001E2
lens6_imon=2.98289E-4
ql6_vset=1.0E-1
ql6_vmon=9.4533E-2
ql6_imon=4.63188E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30519E0
ionrepsh_imon=1.79715E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33722E1
lens5b_imon=2.18012E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74519E1
cs_ef2b_imon=3.13752E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.29799E-1
os_ea2_imon=-5.50185E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00909E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71292E1
cs_ef2a_imon=3.15976E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60365E0
os_ef2alow_imon=-2.36954E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.43364E-1
os_ef2bup_imon=-5.10457E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1095E1
os_restr2_imon=2.86575E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.26707E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01717E1
cs_anode2_imon=2.25445E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73682E1
iondef1_imon=1.12856E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68238E1
iondef4_imon=1.09615E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.3458E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=3.64375E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12782E0
cs_ionaccel_imon=-1.68492E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47529E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56359E1
einzel_imon=7.68089E-6
window_vset=0.0E0
window_vmon=2.22899E-1
window_imon=-7.57025E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82692E2
mask1_imon=2.39105E-4
mask2_vset=0.0E0
mask2_vmon=-1.86112E1
mask2_imon=-6.07589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.32854E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93757E3
defgrida_imon=6.78701E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.18696E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42327E0
defgridb_imon=6.1393E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33742E1
os_fil1_imon=4.94741E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.1794E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65578E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30817E1
cs_fil1_imon=9.95487E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63246E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66589E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.20564E-2
os_fil2_imon=-2.44329E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.81364E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.28871E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32773E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.82899E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22418E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.99E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.40875E-1
res40_imon=-2.43905E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=234
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.18539E-1	-7.98655E-1	-9.13179E0	-9.1433E0	5.79357E-3	9.42707E-2	2.73139E1	-3.26531E1	-3.25912E1	2.68208E1	1.20158E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.0071E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.1861E-1	-7.98798E-1	-9.13184E0	-9.14326E0	6.10352E-3	9.43422E-2	2.73369E1	-3.26603E1	-3.26517E1	2.6804E1	1.198E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.18372E-1	-7.99108E-1	-9.13165E0	-9.14333E0	5.8651E-3	9.4223E-2	2.73526E1	-3.26689E1	-3.2626E1	2.68123E1	1.20191E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.02277E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.18133E-1	-7.99108E-1	-9.13165E0	-9.14323E0	5.65052E-3	9.44614E-2	2.73207E1	-3.26789E1	-3.26506E1	2.68484E1	1.1969E-7	2.51709E-3	2.51709E-3	6.32858E-3	3.02621E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.1811E-1	-7.98869E-1	-9.13148E0	-9.14297E0	5.84126E-3	9.41515E-2	2.72612E1	-3.26873E1	-3.2632E1	2.68508E1	1.20017E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.18467E-1	-7.98345E-1	-9.13191E0	-9.14316E0	5.74589E-3	9.42707E-2	2.73153E1	-3.26669E1	-3.25954E1	2.68352E1	1.2035E-7	2.5225E-3	2.5225E-3	6.3074E-3	2.9829E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.18324E-1	-7.9875E-1	-9.13186E0	-9.14309E0	6.07967E-3	9.4223E-2	2.73081E1	-3.27137E1	-3.259E1	2.68388E1	1.19809E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.18992E-1	-7.98678E-1	-9.13157E0	-9.14323E0	5.84126E-3	9.43661E-2	2.73137E1	-3.26536E1	-3.26444E1	2.6865E1	1.20106E-7	2.51954E-3	2.51954E-3	6.34518E-3	2.99941E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.18563E-1	-7.99298E-1	-9.13181E0	-9.14297E0	5.76973E-3	9.41515E-2	2.73594E1	-3.26343E1	-3.25818E1	2.68603E1	1.20137E-7	2.52473E-3	2.52473E-3	6.32978E-3	3.03081E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.18443E-1	-7.98869E-1	-9.13162E0	-9.14323E0	6.03199E-3	9.4223E-2	2.72871E1	-3.26536E1	-3.26861E1	2.68406E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01738E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.18181E-1	-7.98583E-1	-9.13177E0	-9.14307E0	6.05583E-3	9.45568E-2	2.73399E1	-3.27161E1	-3.26392E1	2.68532E1	1.20122E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.18348E-1	-7.98631E-1	-9.13177E0	-9.14307E0	6.19888E-3	9.45568E-2	2.73411E1	-3.26744E1	-3.26384E1	2.6843E1	1.20069E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.18515E-1	-7.98583E-1	-9.13177E0	-9.14311E0	6.05583E-3	9.43184E-2	2.73736E1	-3.26609E1	-3.26092E1	2.68388E1	1.19953E-7	2.51847E-3	2.51847E-3	6.28592E-3	3.0071E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.183E-1	-7.98774E-1	-9.13174E0	-9.14316E0	5.76973E-3	9.42707E-2	2.73252E1	-3.26449E1	-3.26874E1	2.68285E1	1.19835E-7	2.51826E-3	2.51826E-3	6.31837E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.1861E-1	-7.99108E-1	-9.13196E0	-9.14328E0	5.74589E-3	9.46283E-2	2.73216E1	-3.26603E1	-3.25776E1	2.67914E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.17966E-1	-7.98917E-1	-9.13172E0	-9.14319E0	5.76973E-3	9.45568E-2	2.73309E1	-3.27119E1	-3.25575E1	2.6813E1	1.2033E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01609E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.18229E-1	-7.98917E-1	-9.13146E0	-9.14295E0	5.79357E-3	9.44853E-2	2.73517E1	-3.26514E1	-3.26903E1	2.68204E1	1.20278E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.18539E-1	-7.98392E-1	-9.13179E0	-9.14309E0	5.96046E-3	9.44614E-2	2.73405E1	-3.2662E1	-3.2626E1	2.68346E1	1.20363E-7	2.52276E-3	2.52276E-3	6.30202E-3	2.99941E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.18205E-1	-7.9906E-1	-9.13169E0	-9.14316E0	6.19888E-3	9.46283E-2	2.73808E1	-3.26975E1	-3.25984E1	2.68424E1	1.20004E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.18419E-1	-7.98917E-1	-9.13205E0	-9.14311E0	5.8651E-3	9.4533E-2	2.73682E1	-3.27155E1	-3.25984E1	2.68238E1	1.20174E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.99E-1