[Scan]
initial_time=2016-01-15T22:39:38
final_time=2016-01-15T22:39:58
ip_count=19
run=1023
dataset=3
scan=201
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08763E-4
ql1_vset=
ql1_vmon=-8.18276E-1
ql1_imon=7.36356E-10
ql2_vset=
ql2_vmon=-7.98917E-1
ql2_imon=3.33416E-10
ql3_vset=
ql3_vmon=-9.1321E0
ql3_imon=5.44453E-10
ql4_vset=
ql4_vmon=-9.1428E0
ql4_imon=6.77121E-10
mult1=-8.43541E-9
mult2=-2.63115E-9
rf_tmon=-4.68055E-3
rf_agc=3.37515E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=5.29659E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65678E0
bslens_imon=2.55742E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19441E1
lens5a_imon=1.99748E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12528E2
lens4a_imon=2.0476E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54043E1
cs_ef1b_imon=2.82413E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04654E2
lens23_imon=1.02202E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05112E1
cs_ea1_imon=2.55742E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3413E0
lens1_imon=2.66714E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64909E1
os_ef1alow_imon=2.99928E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03873E1
cs_ea2_imon=1.52143E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8464E1
cs_ef1a_imon=2.93333E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=4.62329E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11484E1
os_restr1_imon=2.83674E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1514E1
os_ea1_imon=1.89697E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63491E1
os_ef1bup_imon=3.08974E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24502E0
cs_ionrep_imon=1.20501E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91927E2
cs_nozzle_imon=1.93509E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=2.98558E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=8.14474E-10
tplens_vset=1.4E-1
tplens_vmon=1.65854E0
tplens_imon=-1.32535E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26083E1
iondef3_imon=1.49949E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27003E1
iondef2_imon=1.57205E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98215E-4
ql6_vset=1.0E-1
ql6_vmon=9.4533E-2
ql6_imon=5.65004E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30814E0
ionrepsh_imon=1.78016E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33481E1
lens5b_imon=2.16419E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73648E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.25669E-1
os_ea2_imon=-6.17434E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06139E2
lens4b_imon=2.00775E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70981E1
cs_ef2a_imon=3.16506E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60416E0
os_ef2alow_imon=-2.41047E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.60183E-1
os_ef2bup_imon=-5.22517E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11111E1
os_restr2_imon=2.85188E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23088E2
cs_ionfoca_imon=6.28194E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.25902E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72909E1
iondef1_imon=1.10945E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68267E1
iondef4_imon=1.09855E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.36272E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=3.7967E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12954E0
cs_ionaccel_imon=-1.72932E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02114E2
cs_ionfocb_imon=1.47392E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56754E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=2.84016E-1
window_imon=-6.30114E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82687E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.86248E1
mask2_imon=-5.7245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.27191E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.62066E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.65063E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37012E0
defgridb_imon=6.11806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33735E1
os_fil1_imon=4.61404E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.74349E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65433E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30781E1
cs_fil1_imon=9.9678E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62606E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66593E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.19298E-2
os_fil2_imon=-2.46775E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.99846E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.32288E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-2.10735E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24434E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22349E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.02511E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.4848E-1
res40_imon=-2.47895E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.183E-1	-7.98488E-1	-9.13167E0	-9.14304E0	6.03199E-3	9.42945E-2	2.73478E1	-3.26607E1	-3.26226E1	2.68306E1	1.20209E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99941E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.183E-1	-7.98869E-1	-9.132E0	-9.14345E0	5.43594E-3	9.46283E-2	2.7346E1	-3.26987E1	-3.26604E1	2.6827E1	1.20424E-7	2.51886E-3	2.51886E-3	6.33341E-3	3.01981E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.1861E-1	-7.98678E-1	-9.13181E0	-9.14311E0	5.48363E-3	9.44614E-2	2.73405E1	-3.26797E1	-3.26089E1	2.68551E1	1.20019E-7	2.51439E-3	2.51439E-3	6.29558E-3	2.99353E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.18324E-1	-7.98655E-1	-9.13193E0	-9.14295E0	5.65052E-3	9.45568E-2	2.73346E1	-3.26762E1	-3.2629E1	2.67589E1	1.1979E-7	2.51287E-3	2.51287E-3	6.32858E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.18777E-1	-7.99012E-1	-9.13181E0	-9.14292E0	5.6982E-3	9.46522E-2	2.73069E1	-3.26572E1	-3.26603E1	2.68286E1	1.19965E-7	2.51225E-3	2.51225E-3	6.30192E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.18563E-1	-7.98893E-1	-9.13196E0	-9.14299E0	5.74589E-3	9.45807E-2	2.73312E1	-3.26724E1	-3.26057E1	2.68082E1	1.20084E-7	2.5225E-3	2.5225E-3	6.34661E-3	3.01742E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.18014E-1	-7.98988E-1	-9.13157E0	-9.14292E0	5.81741E-3	9.46045E-2	2.73639E1	-3.26603E1	-3.26156E1	2.68304E1	1.20192E-7	2.51603E-3	2.51603E-3	6.32328E-3	3.01356E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.18777E-1	-7.98678E-1	-9.13155E0	-9.14323E0	6.05583E-3	9.44853E-2	2.73086E1	-3.26372E1	-3.26343E1	2.68406E1	1.20137E-7	2.5147E-3	2.5147E-3	6.32978E-3	3.02545E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.18777E-1	-7.99108E-1	-9.132E0	-9.14307E0	5.6982E-3	9.44376E-2	2.73315E1	-3.2647E1	-3.25635E1	2.68563E1	1.2026E-7	2.51203E-3	2.51203E-3	6.3074E-3	3.02769E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.18896E-1	-7.98726E-1	-9.13181E0	-9.14335E0	6.05583E-3	9.4676E-2	2.73187E1	-3.26986E1	-3.26236E1	2.68447E1	1.19549E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.18825E-1	-7.98392E-1	-9.13172E0	-9.14333E0	5.76973E-3	9.43422E-2	2.7344E1	-3.26815E1	-3.26349E1	2.6846E1	1.19851E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.18539E-1	-7.98869E-1	-9.13205E0	-9.14316E0	5.6982E-3	9.44376E-2	2.73186E1	-3.26811E1	-3.2596E1	2.6819E1	1.20363E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.01223E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-8.1811E-1	-7.98869E-1	-9.13188E0	-9.14295E0	5.48363E-3	9.42707E-2	2.7357E1	-3.26956E1	-3.26384E1	2.68514E1	1.19925E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.02277E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-8.18515E-1	-7.98512E-1	-9.13208E0	-9.14304E0	5.67436E-3	9.4533E-2	2.73622E1	-3.26567E1	-3.26164E1	2.68034E1	1.20158E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01995E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09387E0	-8.1861E-1	-7.98726E-1	-9.13208E0	-9.14295E0	5.81741E-3	9.408E-2	2.73243E1	-3.26837E1	-3.26356E1	2.68334E1	1.20017E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.18157E-1	-7.98917E-1	-9.13203E0	-9.14311E0	5.6982E-3	9.39608E-2	2.7385E1	-3.26536E1	-3.25966E1	2.68575E1	1.20017E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.98481E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.18419E-1	-7.98559E-1	-9.13193E0	-9.14309E0	5.50747E-3	9.408E-2	2.73399E1	-3.26795E1	-3.26458E1	2.68671E1	1.19913E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.18467E-1	-7.99131E-1	-9.13193E0	-9.14285E0	5.74589E-3	9.46045E-2	2.7321E1	-3.26626E1	-3.26526E1	2.68262E1	1.2033E-7	2.52538E-3	2.52538E-3	6.31288E-3	3.01871E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.18658E-1	-7.98488E-1	-9.132E0	-9.14264E0	5.84126E-3	9.45568E-2	2.73063E1	-3.26791E1	-3.26472E1	2.6825E1	1.2026E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.01738E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.18276E-1	-7.98917E-1	-9.1321E0	-9.1428E0	5.67436E-3	9.4533E-2	2.72909E1	-3.27003E1	-3.26083E1	2.68267E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.02511E-1