[Scan]
initial_time=2016-01-15T22:40:31
final_time=2016-01-15T22:40:51
ip_count=19
run=1023
dataset=3
scan=203
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-8.18014E-1
ql1_imon=7.35962E-10
ql2_vset=
ql2_vmon=-7.98917E-1
ql2_imon=3.41189E-10
ql3_vset=
ql3_vmon=-9.13181E0
ql3_imon=4.88567E-10
ql4_vset=
ql4_vmon=-9.14319E0
ql4_imon=6.94072E-10
mult1=-1.00565E-8
mult2=-2.8028E-9
rf_tmon=-4.5356E-3
rf_agc=3.35694E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.79357E-3
ql5_imon=4.5234E-10
bslens_vset=-6.2E0
bslens_vmon=-6.73278E0
bslens_imon=2.57611E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19321E1
lens5a_imon=1.99089E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1254E2
lens4a_imon=2.04814E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54265E1
cs_ef1b_imon=2.84683E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.02264E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=2.55579E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35175E0
lens1_imon=2.68263E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.98522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03531E1
cs_ea2_imon=1.50275E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84532E1
cs_ef1a_imon=2.94017E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=4.84002E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11538E1
os_restr1_imon=2.86125E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15159E1
os_ea1_imon=1.89833E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63449E1
os_ef1bup_imon=3.07893E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22945E0
cs_ionrep_imon=1.21001E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91927E2
cs_nozzle_imon=1.93475E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02013E1
cs_anode1_imon=2.98414E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=8.29184E-10
tplens_vset=1.4E-1
tplens_vmon=1.65857E0
tplens_imon=-2.31141E-9
iondef3_vset=-3.249E1
iondef3_vmon=-3.26411E1
iondef3_imon=1.50532E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2688E1
iondef2_imon=1.5549E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02996E2
lens6_imon=2.98228E-4
ql6_vset=1.0E-1
ql6_vmon=9.42707E-2
ql6_imon=4.96268E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28087E0
ionrepsh_imon=1.77381E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34184E1
lens5b_imon=2.14956E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.13587E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85712E-1
os_ea2_imon=-6.45081E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00744E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.15605E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60657E0
os_ef2alow_imon=-2.26992E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6679E-1
os_ef2bup_imon=-5.1603E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11268E1
os_restr2_imon=2.84106E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.27981E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01467E1
cs_anode2_imon=2.24893E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73109E1
iondef1_imon=1.11305E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68383E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.38688E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=3.22771E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13915E0
cs_ionaccel_imon=-1.75095E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47244E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56471E1
einzel_imon=7.91849E-6
window_vset=0.0E0
window_vmon=2.63593E-1
window_imon=-7.45441E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82668E2
mask1_imon=2.3898E-4
mask2_vset=0.0E0
mask2_vmon=-1.86404E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.45749E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.6678E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.70726E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39742E0
defgridb_imon=5.9075E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33741E1
os_fil1_imon=4.90236E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.86362E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65343E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30785E1
cs_fil1_imon=9.96365E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62534E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66431E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09358E-2
os_fil2_imon=-2.48577E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.81826E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.55829E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33277E-1
cs_fil2_imon=-2.65996E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10618E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22317E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.62606E-1
res40_imon=-2.51499E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=146
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.183E-1	-7.99012E-1	-9.13193E0	-9.14266E0	5.8651E-3	9.41277E-2	2.73535E1	-3.26442E1	-3.26277E1	2.68505E1	1.20383E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.00302E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.18181E-1	-7.99155E-1	-9.13186E0	-9.14283E0	5.57899E-3	9.41277E-2	2.73755E1	-3.26505E1	-3.26003E1	2.68244E1	1.19991E-7	2.51603E-3	2.51603E-3	6.33919E-3	3.01104E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.18324E-1	-7.99251E-1	-9.13169E0	-9.14273E0	5.65052E-3	9.4223E-2	2.73769E1	-3.26793E1	-3.26393E1	2.68557E1	1.20191E-7	2.51915E-3	2.51915E-3	6.27399E-3	3.0041E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.183E-1	-7.98798E-1	-9.13148E0	-9.14333E0	5.67436E-3	9.43422E-2	2.73303E1	-3.26933E1	-3.26254E1	2.68659E1	1.19841E-7	2.52236E-3	2.52236E-3	6.33388E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.18205E-1	-7.99108E-1	-9.13191E0	-9.14326E0	6.00815E-3	9.41753E-2	2.73285E1	-3.26549E1	-3.26272E1	2.68383E1	1.19913E-7	2.51443E-3	2.51443E-3	6.26916E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.18038E-1	-7.99203E-1	-9.13162E0	-9.14311E0	5.84126E-3	9.44376E-2	2.73439E1	-3.26648E1	-3.26063E1	2.68418E1	1.19902E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.17943E-1	-7.99036E-1	-9.13165E0	-9.14323E0	6.00815E-3	9.43422E-2	2.73171E1	-3.26452E1	-3.26248E1	2.67704E1	1.20209E-7	2.51847E-3	2.51847E-3	6.29128E-3	2.9943E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.17966E-1	-7.98774E-1	-9.13162E0	-9.14333E0	5.72205E-3	9.41753E-2	2.72949E1	-3.26783E1	-3.26278E1	2.68659E1	1.20122E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.18515E-1	-7.99227E-1	-9.13157E0	-9.14321E0	5.55515E-3	9.41753E-2	2.73157E1	-3.26714E1	-3.26083E1	2.68262E1	1.20226E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.18348E-1	-7.98821E-1	-9.1316E0	-9.14311E0	5.62668E-3	9.408E-2	2.73496E1	-3.2653E1	-3.26597E1	2.68448E1	1.20055E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.00453E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.18253E-1	-7.99203E-1	-9.13188E0	-9.14299E0	5.8651E-3	9.43661E-2	2.73057E1	-3.26308E1	-3.26206E1	2.68478E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.02133E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.18133E-1	-7.99155E-1	-9.13177E0	-9.14307E0	5.76973E-3	9.408E-2	2.73448E1	-3.26765E1	-3.26266E1	2.68821E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.18467E-1	-7.98869E-1	-9.13165E0	-9.14311E0	5.74589E-3	9.4223E-2	2.73045E1	-3.26765E1	-3.26404E1	2.68424E1	1.20017E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.18205E-1	-7.99203E-1	-9.13157E0	-9.14335E0	5.72205E-3	9.43899E-2	2.73458E1	-3.26797E1	-3.26313E1	2.68256E1	1.19902E-7	2.52384E-3	2.52384E-3	6.31817E-3	2.9943E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.18372E-1	-7.98345E-1	-9.13155E0	-9.14307E0	5.98431E-3	9.42707E-2	2.73231E1	-3.2623E1	-3.26404E1	2.68358E1	1.20017E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09387E0	-8.18396E-1	-7.98869E-1	-9.13167E0	-9.14307E0	6.00815E-3	9.42945E-2	2.73484E1	-3.26591E1	-3.26296E1	2.68395E1	1.20174E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.9978E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0934E0	-8.18658E-1	-7.98392E-1	-9.13208E0	-9.14314E0	6.03199E-3	9.38892E-2	2.73303E1	-3.26909E1	-3.26062E1	2.6848E1	1.20055E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.00197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.18634E-1	-7.98678E-1	-9.13203E0	-9.14302E0	5.98431E-3	9.43422E-2	2.73169E1	-3.2649E1	-3.26472E1	2.68337E1	1.20031E-7	2.51915E-3	2.51915E-3	6.29624E-3	3.02813E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-8.18467E-1	-7.99203E-1	-9.13212E0	-9.14304E0	5.62668E-3	9.41277E-2	2.73375E1	-3.26987E1	-3.26266E1	2.68292E1	1.19851E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.18014E-1	-7.98917E-1	-9.13181E0	-9.14319E0	5.79357E-3	9.42707E-2	2.73109E1	-3.2688E1	-3.26411E1	2.68383E1	1.2026E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.00197E-1