[Scan]
initial_time=2016-01-15T22:40:58
final_time=2016-01-15T22:41:18
ip_count=19
run=1023
dataset=3
scan=204
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-8.18324E-1
ql1_imon=6.64413E-10
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=3.5336E-10
ql3_vset=
ql3_vmon=-9.13179E0
ql3_imon=4.7164E-10
ql4_vset=
ql4_vmon=-9.14342E0
ql4_imon=6.60539E-10
mult1=-9.18017E-9
mult2=-2.71346E-9
rf_tmon=-3.97856E-3
rf_agc=3.40229E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=4.51994E-10
bslens_vset=-6.2E0
bslens_vmon=-6.71687E0
bslens_imon=2.49531E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19994E1
lens5a_imon=2.00631E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.0553E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=2.818E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02191E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04155E1
cs_ea1_imon=2.53632E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4148E0
lens1_imon=2.68263E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64945E1
os_ef1alow_imon=3.01514E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03372E1
cs_ea2_imon=1.52809E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84562E1
cs_ef1a_imon=2.95747E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=4.72701E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1131E1
os_restr1_imon=2.83205E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15055E1
os_ea1_imon=1.92624E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.06956E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27414E0
cs_ionrep_imon=1.17585E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.93729E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01737E1
cs_anode1_imon=2.98955E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=8.30162E-10
tplens_vset=1.4E-1
tplens_vmon=1.6396E0
tplens_imon=-4.50414E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26785E1
iondef3_imon=1.5156E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26555E1
iondef2_imon=1.5336E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03001E2
lens6_imon=2.98151E-4
ql6_vset=1.0E-1
ql6_vmon=9.4533E-2
ql6_imon=4.81987E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32311E0
ionrepsh_imon=1.82193E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33548E1
lens5b_imon=2.16609E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7548E1
cs_ef2b_imon=3.14344E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.59171E-1
os_ea2_imon=-5.31219E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06146E2
lens4b_imon=2.00156E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71516E1
cs_ef2a_imon=3.14704E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59996E0
os_ef2alow_imon=-2.37443E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40962E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11232E1
os_restr2_imon=2.8526E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.31104E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01929E1
cs_anode2_imon=2.24965E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72945E1
iondef1_imon=1.09578E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68262E1
iondef4_imon=1.11585E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.3538E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=3.33071E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16017E0
cs_ionaccel_imon=-1.59237E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47251E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56952E1
einzel_imon=7.67342E-6
window_vset=0.0E0
window_vmon=2.85217E-1
window_imon=-6.66154E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82701E2
mask1_imon=2.39358E-4
mask2_vset=0.0E0
mask2_vmon=-1.8614E1
mask2_imon=-6.15698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=6.73024E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93751E3
defgrida_imon=6.70453E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=7.32159E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.01438E0
defgridb_imon=6.003E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33824E1
os_fil1_imon=4.68612E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.10078E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65418E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30786E1
cs_fil1_imon=9.95795E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63219E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66006E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.44973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.25985E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.37049E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.0593E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22338E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.55378E-1
res40_imon=-2.37804E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.18157E-1	-7.98225E-1	-9.1321E0	-9.14321E0	5.84126E-3	9.44376E-2	2.73417E1	-3.26826E1	-3.26313E1	2.6837E1	1.20084E-7	2.5147E-3	2.5147E-3	6.31299E-3	2.98819E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.18443E-1	-7.99131E-1	-9.13212E0	-9.14297E0	6.03199E-3	9.44853E-2	2.7351E1	-3.2686E1	-3.26407E1	2.68082E1	1.20209E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.98156E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.18396E-1	-7.99322E-1	-9.13198E0	-9.14302E0	5.8651E-3	9.45807E-2	2.737E1	-3.2698E1	-3.26366E1	2.68623E1	1.19766E-7	2.51581E-3	2.51581E-3	6.3074E-3	2.99348E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.18682E-1	-7.98893E-1	-9.13217E0	-9.14307E0	5.60284E-3	9.43899E-2	2.73246E1	-3.26514E1	-3.2639E1	2.68204E1	1.20055E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.18467E-1	-7.99394E-1	-9.13219E0	-9.14302E0	5.74589E-3	9.44376E-2	2.7349E1	-3.26711E1	-3.26633E1	2.68833E1	1.20106E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.18539E-1	-7.98988E-1	-9.13179E0	-9.14299E0	5.84126E-3	9.4676E-2	2.72889E1	-3.26332E1	-3.26146E1	2.68545E1	1.20055E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.01738E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.1861E-1	-7.98845E-1	-9.13191E0	-9.14361E0	6.17504E-3	9.44853E-2	2.73393E1	-3.26669E1	-3.25858E1	2.68508E1	1.20031E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.00676E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.18515E-1	-7.98774E-1	-9.13219E0	-9.14338E0	6.17504E-3	9.4223E-2	2.73033E1	-3.2652E1	-3.25906E1	2.68502E1	1.198E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.18062E-1	-7.98869E-1	-9.13231E0	-9.14299E0	5.84126E-3	9.43422E-2	2.72985E1	-3.26573E1	-3.26374E1	2.68821E1	1.20017E-7	2.50898E-3	2.50898E-3	6.32386E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.1811E-1	-7.98583E-1	-9.132E0	-9.1429E0	5.57899E-3	9.43422E-2	2.73275E1	-3.26726E1	-3.2629E1	2.67578E1	1.20017E-7	2.52647E-3	2.52647E-3	6.31288E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.18586E-1	-7.98774E-1	-9.13191E0	-9.14309E0	5.62668E-3	9.41753E-2	2.73249E1	-3.26585E1	-3.26104E1	2.68605E1	1.20017E-7	2.51826E-3	2.51826E-3	6.31563E-3	3.02265E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.18539E-1	-7.98988E-1	-9.13186E0	-9.14309E0	5.93662E-3	9.39846E-2	2.73153E1	-3.26494E1	-3.26783E1	2.68514E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.18491E-1	-7.9937E-1	-9.13155E0	-9.14326E0	5.81741E-3	9.4223E-2	2.73645E1	-3.26823E1	-3.25985E1	2.68088E1	1.19856E-7	2.52134E-3	2.52134E-3	6.32644E-3	3.01934E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.18777E-1	-7.98774E-1	-9.13174E0	-9.14297E0	5.67436E-3	9.41992E-2	2.72978E1	-3.26713E1	-3.26495E1	2.68641E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.18753E-1	-7.98392E-1	-9.13157E0	-9.14288E0	5.62668E-3	9.43184E-2	2.73375E1	-3.26663E1	-3.26122E1	2.68151E1	1.20064E-7	2.51345E-3	2.51345E-3	6.31251E-3	3.00635E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.18419E-1	-7.98559E-1	-9.13169E0	-9.14307E0	5.62668E-3	9.43661E-2	2.73141E1	-3.26116E1	-3.26242E1	2.68623E1	1.19872E-7	2.50914E-3	2.50914E-3	6.29067E-3	2.99083E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.18062E-1	-7.98798E-1	-9.13169E0	-9.14316E0	5.84126E-3	9.41753E-2	2.73177E1	-3.26428E1	-3.2608E1	2.68466E1	1.20122E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.18491E-1	-7.9906E-1	-9.13174E0	-9.14304E0	5.57899E-3	9.43661E-2	2.73246E1	-3.26691E1	-3.26461E1	2.68597E1	1.19757E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.18276E-1	-7.98607E-1	-9.1321E0	-9.14342E0	5.45979E-3	9.45091E-2	2.73305E1	-3.26785E1	-3.2626E1	2.68256E1	1.1979E-7	2.51287E-3	2.51287E-3	6.3445E-3	3.01356E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.18324E-1	-7.98678E-1	-9.13179E0	-9.14342E0	5.36442E-3	9.4533E-2	2.72945E1	-3.26555E1	-3.26785E1	2.68262E1	1.20055E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.0148E-1