[Scan]
initial_time=2016-01-15T22:41:51
final_time=2016-01-15T22:42:11
ip_count=19
run=1023
dataset=3
scan=206
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08822E-4
ql1_vset=
ql1_vmon=-8.18586E-1
ql1_imon=6.96862E-10
ql2_vset=
ql2_vmon=-7.98917E-1
ql2_imon=3.49295E-10
ql3_vset=
ql3_vmon=-9.13184E0
ql3_imon=4.63521E-10
ql4_vset=
ql4_vmon=-9.14338E0
ql4_imon=6.52575E-10
mult1=-9.49958E-9
mult2=-2.91223E-9
rf_tmon=-4.57251E-3
rf_agc=3.34838E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.03199E-3
ql5_imon=4.43637E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65893E0
bslens_imon=2.22773E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19737E1
lens5a_imon=1.99929E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05125E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54072E1
cs_ef1b_imon=2.85533E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04683E2
lens23_imon=1.02377E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04147E1
cs_ea1_imon=2.53427E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37436E0
lens1_imon=2.8622E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64666E1
os_ef1alow_imon=2.98773E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04219E1
cs_ea2_imon=1.52596E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84209E1
cs_ef1a_imon=2.91406E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=4.61352E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=2.84282E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14933E1
os_ea1_imon=1.90232E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63433E1
os_ef1bup_imon=3.08817E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24789E0
cs_ionrep_imon=1.17845E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.93636E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02342E1
cs_anode1_imon=2.99851E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=8.32224E-10
tplens_vset=1.4E-1
tplens_vmon=1.64444E0
tplens_imon=-3.10161E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2638E1
iondef3_imon=1.49352E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26933E1
iondef2_imon=1.57319E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02991E2
lens6_imon=2.98267E-4
ql6_vset=1.0E-1
ql6_vmon=9.44853E-2
ql6_imon=5.2675E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26592E0
ionrepsh_imon=1.80102E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.16224E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75411E1
cs_ef2b_imon=3.11771E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.36102E-1
os_ea2_imon=-4.68779E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06146E2
lens4b_imon=2.00457E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70632E1
cs_ef2a_imon=3.16462E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60481E0
os_ef2alow_imon=-2.5155E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.30622E-1
os_ef2bup_imon=-5.1845E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11471E1
os_restr2_imon=2.87687E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23023E2
cs_ionfoca_imon=6.2708E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0174E1
cs_anode2_imon=2.27218E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7361E1
iondef1_imon=1.1287E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.11144E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.35587E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=3.50261E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10813E0
cs_ionaccel_imon=-2.1367E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.47209E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56023E1
einzel_imon=7.65656E-6
window_vset=0.0E0
window_vmon=2.44909E-1
window_imon=-7.01421E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82711E2
mask1_imon=2.39081E-4
mask2_vset=0.0E0
mask2_vmon=-1.85678E1
mask2_imon=-5.93688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92697E3
multa_neg_imon=7.58829E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.90335E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50094E3
multb_neg_imon=7.2314E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.64217E0
defgridb_imon=6.067E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33851E1
os_fil1_imon=4.48404E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.06355E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65855E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3083E1
cs_fil1_imon=9.96594E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61856E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66533E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.88625E-2
os_fil2_imon=-2.35641E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.16117E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.0008E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33772E-1
cs_fil2_imon=-2.20003E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11884E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22352E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.89325E-1
res40_imon=-2.30699E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.18586E-1	-7.98368E-1	-9.13217E0	-9.14319E0	5.72205E-3	9.44138E-2	2.73549E1	-3.26677E1	-3.2622E1	2.68779E1	1.19851E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.02511E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.18515E-1	-7.98798E-1	-9.13203E0	-9.14299E0	5.43594E-3	9.43899E-2	2.73163E1	-3.26609E1	-3.2651E1	2.6843E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.18729E-1	-7.98488E-1	-9.13186E0	-9.14319E0	5.55515E-3	9.41515E-2	2.73273E1	-3.26963E1	-3.26379E1	2.68574E1	1.19872E-7	2.51915E-3	2.51915E-3	6.29067E-3	3.02277E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.18372E-1	-7.98965E-1	-9.13203E0	-9.14309E0	5.53131E-3	9.40084E-2	2.73148E1	-3.26753E1	-3.26623E1	2.68356E1	1.19908E-7	2.51523E-3	2.51523E-3	6.33757E-3	3.02931E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.18038E-1	-7.98464E-1	-9.13215E0	-9.14299E0	5.8651E-3	9.4223E-2	2.73564E1	-3.26791E1	-3.25865E1	2.68593E1	1.1973E-7	2.51411E-3	2.51411E-3	6.31321E-3	3.00916E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.183E-1	-7.98273E-1	-9.13188E0	-9.14323E0	5.76973E-3	9.44138E-2	2.73464E1	-3.26455E1	-3.26526E1	2.69043E1	1.19861E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.1811E-1	-7.98726E-1	-9.13169E0	-9.14321E0	5.84126E-3	9.42707E-2	2.73351E1	-3.26524E1	-3.26434E1	2.68214E1	1.19851E-7	2.51417E-3	2.51417E-3	6.29665E-3	2.99686E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.1811E-1	-7.9875E-1	-9.13186E0	-9.14316E0	5.79357E-3	9.46283E-2	2.73279E1	-3.26573E1	-3.25912E1	2.68493E1	1.20069E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-8.18062E-1	-7.98702E-1	-9.13177E0	-9.14288E0	5.93662E-3	9.42945E-2	2.73261E1	-3.26723E1	-3.26416E1	2.68737E1	1.2026E-7	2.52492E-3	2.52492E-3	6.30202E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-8.18443E-1	-7.98655E-1	-9.13212E0	-9.14292E0	5.88894E-3	9.44138E-2	2.73315E1	-3.26536E1	-3.265E1	2.68174E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.18515E-1	-7.98726E-1	-9.13208E0	-9.14299E0	6.05583E-3	9.43899E-2	2.73482E1	-3.26744E1	-3.26254E1	2.68401E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.18205E-1	-7.98368E-1	-9.13191E0	-9.14309E0	6.05583E-3	9.45807E-2	2.73187E1	-3.26531E1	-3.26301E1	2.67986E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.02396E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.18229E-1	-7.98488E-1	-9.13177E0	-9.1434E0	6.17504E-3	9.42707E-2	2.73479E1	-3.26817E1	-3.26499E1	2.68526E1	1.198E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.02511E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.18563E-1	-7.98941E-1	-9.13169E0	-9.14309E0	6.17504E-3	9.45568E-2	2.73093E1	-3.26362E1	-3.26422E1	2.68599E1	1.19913E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.02922E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09364E0	-8.18777E-1	-7.98202E-1	-9.13186E0	-9.1429E0	5.81741E-3	9.4533E-2	2.73236E1	-3.26805E1	-3.26301E1	2.68731E1	1.20017E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.02922E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.18324E-1	-7.98655E-1	-9.13186E0	-9.14319E0	5.96046E-3	9.42469E-2	2.73369E1	-3.26801E1	-3.2629E1	2.68791E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00966E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.18348E-1	-7.98845E-1	-9.13196E0	-9.14314E0	5.65052E-3	9.40561E-2	2.73075E1	-3.26639E1	-3.26446E1	2.6819E1	1.20174E-7	2.5188E-3	2.5188E-3	6.34037E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.18372E-1	-7.99203E-1	-9.13208E0	-9.14297E0	6.10352E-3	9.43422E-2	2.7324E1	-3.2662E1	-3.26526E1	2.68779E1	1.19851E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.18062E-1	-7.98941E-1	-9.13169E0	-9.14309E0	5.84126E-3	9.44376E-2	2.73446E1	-3.26413E1	-3.2636E1	2.68551E1	1.19902E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.02511E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-8.18586E-1	-7.98917E-1	-9.13184E0	-9.14338E0	6.03199E-3	9.44853E-2	2.7361E1	-3.26933E1	-3.2638E1	2.6807E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.99E-1