[Scan]
initial_time=2016-01-15T22:42:18
final_time=2016-01-15T22:42:37
ip_count=19
run=1023
dataset=3
scan=207
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08767E-4
ql1_vset=
ql1_vmon=-8.18777E-1
ql1_imon=7.02846E-10
ql2_vset=
ql2_vmon=-7.9906E-1
ql2_imon=3.15249E-10
ql3_vset=
ql3_vmon=-9.13162E0
ql3_imon=5.45955E-10
ql4_vset=
ql4_vmon=-9.14311E0
ql4_imon=6.69253E-10
mult1=-9.93304E-9
mult2=-2.95415E-9
rf_tmon=-5.28148E-3
rf_agc=3.28229E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.84126E-3
ql5_imon=4.39763E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64203E0
bslens_imon=2.23179E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19866E1
lens5a_imon=2.02792E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12571E2
lens4a_imon=2.05043E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54169E1
cs_ef1b_imon=2.85836E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.01817E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04321E1
cs_ea1_imon=2.54078E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37669E0
lens1_imon=2.86534E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64801E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03678E1
cs_ea2_imon=1.53134E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=2.95279E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=4.72832E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=2.84034E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14574E1
os_ea1_imon=1.87891E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63419E1
os_ef1bup_imon=3.09262E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26567E0
cs_ionrep_imon=1.23049E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91944E2
cs_nozzle_imon=1.93484E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02097E1
cs_anode1_imon=2.98919E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=8.24606E-10
tplens_vset=1.4E-1
tplens_vmon=1.56593E0
tplens_imon=-6.24513E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25767E1
iondef3_imon=1.50798E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26795E1
iondef2_imon=1.58019E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02988E2
lens6_imon=2.98165E-4
ql6_vset=1.0E-1
ql6_vmon=9.43661E-2
ql6_imon=4.76062E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26921E0
ionrepsh_imon=1.78831E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34513E1
lens5b_imon=2.20171E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74766E1
cs_ef2b_imon=3.12398E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.55165E-1
os_ea2_imon=-5.25409E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06049E2
lens4b_imon=2.00414E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71894E1
cs_ef2a_imon=3.15713E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6372E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.74599E-1
os_ef2bup_imon=-5.15309E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11454E1
os_restr2_imon=2.8699E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.29468E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.24641E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73952E1
iondef1_imon=1.1275E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.09026E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=2.31735E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=2.59995E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-1.48786E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47471E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56381E1
einzel_imon=7.74911E-6
window_vset=0.0E0
window_vmon=2.44973E-1
window_imon=-6.66154E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82695E2
mask1_imon=2.39196E-4
mask2_vset=0.0E0
mask2_vmon=-1.8638E1
mask2_imon=-4.82351E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.02415E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.99229E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50065E3
multb_neg_imon=6.70914E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.68903E0
defgridb_imon=6.34812E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33887E1
os_fil1_imon=4.90837E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.74949E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65883E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30786E1
cs_fil1_imon=9.96275E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61477E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66687E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.02836E-2
os_fil2_imon=-2.34762E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.68031E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.29251E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.22749E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37648E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22363E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.03449E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.54196E-1
res40_imon=-2.46814E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.17871E-1	-7.98345E-1	-9.13184E0	-9.1428E0	5.79357E-3	9.41992E-2	2.7278E1	-3.26461E1	-3.26992E1	2.68412E1	1.20106E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.9943E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09371E0	-8.18157E-1	-7.99036E-1	-9.13193E0	-9.14288E0	5.88894E-3	9.4223E-2	2.73137E1	-3.26554E1	-3.26009E1	2.68519E1	1.19965E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09371E0	-8.17943E-1	-7.98464E-1	-9.1321E0	-9.14288E0	5.76973E-3	9.42469E-2	2.7364E1	-3.26993E1	-3.26362E1	2.68221E1	1.19819E-7	2.51693E-3	2.51693E-3	6.29067E-3	3.03081E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.18181E-1	-7.98988E-1	-9.13186E0	-9.14328E0	6.05583E-3	9.42707E-2	2.7311E1	-3.26455E1	-3.26054E1	2.68478E1	1.2026E-7	2.51632E-3	2.51632E-3	6.34518E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.17943E-1	-7.98488E-1	-9.132E0	-9.1429E0	5.93662E-3	9.41038E-2	2.73198E1	-3.26555E1	-3.2682E1	2.68605E1	1.20311E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.9841E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.17871E-1	-7.98535E-1	-9.13193E0	-9.14302E0	5.84126E-3	9.37939E-2	2.73478E1	-3.26717E1	-3.26254E1	2.684E1	1.20158E-7	2.52061E-3	2.52061E-3	6.30202E-3	2.9943E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09371E0	-8.18038E-1	-7.98583E-1	-9.13186E0	-9.14299E0	5.79357E-3	9.41277E-2	2.73004E1	-3.26661E1	-3.25859E1	2.68418E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-8.18062E-1	-7.98106E-1	-9.13184E0	-9.14316E0	5.88894E-3	9.41277E-2	2.73187E1	-3.26797E1	-3.26496E1	2.68388E1	1.19861E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.18062E-1	-7.98917E-1	-9.13162E0	-9.14309E0	5.55515E-3	9.39369E-2	2.73261E1	-3.2653E1	-3.26687E1	2.6852E1	1.19991E-7	2.51498E-3	2.51498E-3	6.35514E-3	3.02875E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.18038E-1	-7.98631E-1	-9.13191E0	-9.1433E0	5.88894E-3	9.44614E-2	2.73039E1	-3.26573E1	-3.26452E1	2.68112E1	1.20122E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.01871E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.1811E-1	-7.98583E-1	-9.1315E0	-9.14321E0	5.53131E-3	9.42945E-2	2.73448E1	-3.27041E1	-3.2593E1	2.68629E1	1.19872E-7	2.5225E-3	2.5225E-3	6.33538E-3	3.0201E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.18324E-1	-7.98416E-1	-9.1315E0	-9.14319E0	5.93662E-3	9.41515E-2	2.7352E1	-3.26873E1	-3.26464E1	2.68292E1	1.2033E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.18372E-1	-7.98845E-1	-9.13179E0	-9.1433E0	6.29425E-3	9.43184E-2	2.73111E1	-3.26801E1	-3.26362E1	2.6798E1	1.19705E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.18419E-1	-7.98464E-1	-9.13193E0	-9.14323E0	6.00815E-3	9.44376E-2	2.7349E1	-3.26789E1	-3.25966E1	2.68316E1	1.19861E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.183E-1	-7.9844E-1	-9.13208E0	-9.14311E0	5.88894E-3	9.45807E-2	2.73309E1	-3.27059E1	-3.26116E1	2.68268E1	1.20383E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.18157E-1	-7.98249E-1	-9.13188E0	-9.14314E0	5.88894E-3	9.47714E-2	2.73135E1	-3.26633E1	-3.26524E1	2.68577E1	1.198E-7	2.5131E-3	2.5131E-3	6.33436E-3	3.00453E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.18634E-1	-7.98202E-1	-9.13172E0	-9.14304E0	5.91278E-3	9.42707E-2	2.73207E1	-3.26561E1	-3.25996E1	2.68327E1	1.20017E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.18491E-1	-7.98702E-1	-9.13177E0	-9.1433E0	6.24657E-3	9.43422E-2	2.7344E1	-3.26885E1	-3.26254E1	2.68453E1	1.19872E-7	2.51248E-3	2.51248E-3	6.31858E-3	3.03349E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.18968E-1	-7.99131E-1	-9.1316E0	-9.14342E0	5.98431E-3	9.42707E-2	2.73195E1	-3.26344E1	-3.26609E1	2.68346E1	1.19851E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.03286E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.18777E-1	-7.9906E-1	-9.13162E0	-9.14311E0	5.84126E-3	9.43661E-2	2.73952E1	-3.26795E1	-3.25767E1	2.6801E1	1.19809E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.03449E-1