[Scan]
initial_time=2016-01-15T22:42:45
final_time=2016-01-15T22:43:04
ip_count=19
run=1023
dataset=3
scan=208
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09302E0
qbias_imon=-1.08795E-4
ql1_vset=
ql1_vmon=-8.18443E-1
ql1_imon=7.25234E-10
ql2_vset=
ql2_vmon=-7.99322E-1
ql2_imon=3.55887E-10
ql3_vset=
ql3_vmon=-9.13191E0
ql3_imon=5.16427E-10
ql4_vset=
ql4_vmon=-9.14333E0
ql4_imon=6.58143E-10
mult1=-9.42733E-9
mult2=-2.8244E-9
rf_tmon=-4.89695E-3
rf_agc=3.35018E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.84126E-3
ql5_imon=4.3689E-10
bslens_vset=-6.2E0
bslens_vmon=-6.79694E0
bslens_imon=2.41688E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18244E1
lens5a_imon=1.92194E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.05615E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53898E1
cs_ef1b_imon=2.82002E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04824E2
lens23_imon=1.02652E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04167E1
cs_ea1_imon=2.4567E-5
lens1_vset=-5.0E0
lens1_vmon=-5.22751E0
lens1_imon=2.89019E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64855E1
os_ef1alow_imon=2.99984E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04912E1
cs_ea2_imon=1.61123E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84693E1
cs_ef1a_imon=2.97104E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=4.81653E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11136E1
os_restr1_imon=2.81223E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15891E1
os_ea1_imon=1.8246E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6381E1
os_ef1bup_imon=3.07535E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.13441E0
cs_ionrep_imon=1.15281E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91935E2
cs_nozzle_imon=1.9421E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01945E1
cs_anode1_imon=2.98155E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=8.44073E-10
tplens_vset=1.4E-1
tplens_vmon=1.77248E0
tplens_imon=-4.12737E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.25791E1
iondef3_imon=1.4345E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27059E1
iondef2_imon=1.61352E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03131E2
lens6_imon=2.98899E-4
ql6_vset=1.0E-1
ql6_vmon=9.42707E-2
ql6_imon=4.82607E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25719E0
ionrepsh_imon=1.7307E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.32774E1
lens5b_imon=2.16203E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74878E1
cs_ef2b_imon=3.14347E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.36773E-1
os_ea2_imon=4.62572E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06217E2
lens4b_imon=2.00356E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71647E1
cs_ef2a_imon=3.13257E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.56769E0
os_ef2alow_imon=-2.23748E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4077E-1
os_ef2bup_imon=-5.28903E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11253E1
os_restr2_imon=2.85544E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22936E2
cs_ionfoca_imon=6.22103E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02191E1
cs_anode2_imon=2.2498E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73802E1
iondef1_imon=1.17189E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6798E1
iondef4_imon=1.10196E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.31689E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=2.94018E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15544E0
cs_ionaccel_imon=-1.39286E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02041E2
cs_ionfocb_imon=1.47E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56872E1
einzel_imon=7.83575E-6
window_vset=0.0E0
window_vmon=2.5874E-1
window_imon=-6.92246E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82679E2
mask1_imon=2.39364E-4
mask2_vset=0.0E0
mask2_vmon=-1.86772E1
mask2_imon=-9.60814E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92689E3
multa_neg_imon=7.79886E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93632E3
defgrida_imon=6.66903E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.502E3
multb_neg_imon=7.10035E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58927E0
defgridb_imon=6.87896E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33891E1
os_fil1_imon=4.70414E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.53902E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65885E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30781E1
cs_fil1_imon=9.97652E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63273E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66425E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1093E-2
os_fil2_imon=-2.54199E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.15653E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.20484E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3119E-1
cs_fil2_imon=-1.71812E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32434E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22352E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.43168E-1
res40_imon=-2.80186E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.18348E-1	-7.99012E-1	-9.1316E0	-9.14321E0	5.65052E-3	9.45807E-2	2.73535E1	-3.2793E1	-3.2662E1	2.68441E1	1.20132E-7	2.52266E-3	2.52266E-3	6.3074E-3	2.97673E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.18396E-1	-7.98559E-1	-9.13143E0	-9.14307E0	5.62668E-3	9.41038E-2	2.737E1	-3.26641E1	-3.26011E1	2.68182E1	1.20092E-7	2.51393E-3	2.51393E-3	6.31798E-3	2.97095E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.18324E-1	-7.98702E-1	-9.13181E0	-9.14307E0	5.38826E-3	9.44614E-2	2.73091E1	-3.26733E1	-3.2638E1	2.68679E1	1.201E-7	2.52635E-3	2.52635E-3	6.30171E-3	3.01881E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.18276E-1	-7.9875E-1	-9.13157E0	-9.14288E0	5.38826E-3	9.42469E-2	2.73382E1	-3.26523E1	-3.26505E1	2.68647E1	1.19991E-7	2.52342E-3	2.52342E-3	6.31798E-3	3.02621E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.183E-1	-7.99012E-1	-9.13191E0	-9.14285E0	5.6982E-3	9.42469E-2	2.73429E1	-3.26933E1	-3.26134E1	2.6813E1	1.20017E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.02922E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.17895E-1	-7.98702E-1	-9.13222E0	-9.14307E0	5.76973E-3	9.44376E-2	2.73564E1	-3.26573E1	-3.25865E1	2.67998E1	1.20226E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.18253E-1	-7.98512E-1	-9.13208E0	-9.14328E0	5.55515E-3	9.45568E-2	2.73387E1	-3.26591E1	-3.26146E1	2.68448E1	1.20278E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.18038E-1	-7.9875E-1	-9.13191E0	-9.14345E0	5.98431E-3	9.45091E-2	2.73219E1	-3.26855E1	-3.26633E1	2.68186E1	1.20004E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.9892E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.18205E-1	-7.98678E-1	-9.13217E0	-9.14335E0	6.05583E-3	9.44614E-2	2.73187E1	-3.26626E1	-3.25835E1	2.6837E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.18157E-1	-7.99179E-1	-9.13179E0	-9.1433E0	5.74589E-3	9.43661E-2	2.73105E1	-3.26573E1	-3.26332E1	2.68262E1	1.19861E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.01347E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.18086E-1	-7.99084E-1	-9.13174E0	-9.1434E0	5.79357E-3	9.43899E-2	2.73063E1	-3.26506E1	-3.26242E1	2.6837E1	1.20122E-7	2.52209E-3	2.52209E-3	6.29098E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.18038E-1	-7.98512E-1	-9.13177E0	-9.14345E0	5.76973E-3	9.45807E-2	2.7347E1	-3.26537E1	-3.26508E1	2.684E1	1.20106E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.00966E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.18181E-1	-7.98583E-1	-9.13191E0	-9.14314E0	6.03199E-3	9.45568E-2	2.73309E1	-3.26873E1	-3.26206E1	2.68262E1	1.20174E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.18157E-1	-7.99012E-1	-9.13193E0	-9.14302E0	5.67436E-3	9.42469E-2	2.73045E1	-3.26561E1	-3.26476E1	2.68418E1	1.20106E-7	2.51525E-3	2.51525E-3	6.35059E-3	3.01223E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.18372E-1	-7.99036E-1	-9.13205E0	-9.1433E0	5.55515E-3	9.44376E-2	2.73706E1	-3.26771E1	-3.26573E1	2.68406E1	1.20278E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09364E0	-8.18491E-1	-7.98488E-1	-9.13196E0	-9.14323E0	5.45979E-3	9.45091E-2	2.73273E1	-3.26711E1	-3.26633E1	2.68286E1	1.19757E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.00563E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09356E0	-8.18539E-1	-7.99179E-1	-9.13177E0	-9.14304E0	5.74589E-3	9.44376E-2	2.73039E1	-3.26744E1	-3.26517E1	2.68016E1	1.20174E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09333E0	-8.18086E-1	-7.99179E-1	-9.13188E0	-9.14307E0	5.72205E-3	9.44614E-2	2.73317E1	-3.26718E1	-3.26057E1	2.68684E1	1.19978E-7	2.52362E-3	2.52362E-3	6.31299E-3	2.99879E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09309E0	-8.18467E-1	-7.99036E-1	-9.13198E0	-9.14295E0	5.67436E-3	9.408E-2	2.72913E1	-3.26476E1	-3.25972E1	2.68172E1	1.20055E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.9892E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09302E0	-8.18443E-1	-7.99322E-1	-9.13191E0	-9.14333E0	5.84126E-3	9.42707E-2	2.73802E1	-3.27059E1	-3.25791E1	2.6798E1	1.20106E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.00453E-1