[Scan]
initial_time=2016-01-15T22:43:11
final_time=2016-01-15T22:43:31
ip_count=19
run=1023
dataset=3
scan=209
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08778E-4
ql1_vset=
ql1_vmon=-8.18133E-1
ql1_imon=7.64263E-10
ql2_vset=
ql2_vmon=-7.99203E-1
ql2_imon=3.51095E-10
ql3_vset=
ql3_vmon=-9.13179E0
ql3_imon=5.41198E-10
ql4_vset=
ql4_vmon=-9.14323E0
ql4_imon=6.40213E-10
mult1=-8.56426E-9
mult2=-2.765E-9
rf_tmon=-5.51172E-3
rf_agc=3.28183E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.81741E-3
ql5_imon=4.372E-10
bslens_vset=-6.2E0
bslens_vmon=-6.74624E0
bslens_imon=3.87995E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.21601E1
lens5a_imon=2.01277E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1233E2
lens4a_imon=2.03557E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53962E1
cs_ef1b_imon=2.83795E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04546E2
lens23_imon=1.03143E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.07334E1
cs_ea1_imon=2.67082E-5
lens1_vset=-5.0E0
lens1_vmon=-5.29898E0
lens1_imon=1.17199E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65002E1
os_ef1alow_imon=2.97453E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.01518E1
cs_ea2_imon=1.4983E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84273E1
cs_ef1a_imon=2.94742E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=4.71282E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=2.84629E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.17409E1
os_ea1_imon=2.05205E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6349E1
os_ef1bup_imon=3.0913E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.35696E0
cs_ionrep_imon=1.16667E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91703E2
cs_nozzle_imon=1.92287E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02029E1
cs_anode1_imon=2.99295E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=8.35907E-10
tplens_vset=1.4E-1
tplens_vmon=1.59798E0
tplens_imon=7.61798E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25786E1
iondef3_imon=1.55426E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26889E1
iondef2_imon=1.40374E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02838E2
lens6_imon=2.98544E-4
ql6_vset=1.0E-1
ql6_vmon=9.43899E-2
ql6_imon=4.93431E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.53888E0
ionrepsh_imon=1.8998E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3419E1
lens5b_imon=2.08925E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74078E1
cs_ef2b_imon=3.13439E-5
os_ea2_vset=0.0E0
os_ea2_vmon=2.88836E-2
os_ea2_imon=-1.10145E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06236E2
lens4b_imon=2.01912E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71356E1
cs_ef2a_imon=3.15941E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61581E0
os_ef2alow_imon=-2.48075E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69429E-1
os_ef2bup_imon=-5.08371E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11274E1
os_restr2_imon=2.86957E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23262E2
cs_ionfoca_imon=6.27008E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.26419E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73674E1
iondef1_imon=9.85207E-6
iondef4_vset=2.691E1
iondef4_vmon=2.6835E1
iondef4_imon=1.1038E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.27895E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=3.1209E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15273E0
cs_ionaccel_imon=-1.8552E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47292E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5655E1
einzel_imon=7.77472E-6
window_vset=0.0E0
window_vmon=2.47225E-1
window_imon=-7.04896E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82672E2
mask1_imon=2.39161E-4
mask2_vset=0.0E0
mask2_vmon=-1.86043E1
mask2_imon=-6.1454E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.925E3
multa_neg_imon=6.8973E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93794E3
defgrida_imon=5.93787E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50255E3
multb_neg_imon=8.60064E-5
defgridb_vset=0.0E0
defgridb_vmon=-5.21343E-2
defgridb_imon=4.81158E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33875E1
os_fil1_imon=4.96479E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.884E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65691E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30781E1
cs_fil1_imon=9.95395E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62644E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66715E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.32707E-2
os_fil2_imon=-2.5128E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.75572E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.2382E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30651E-1
cs_fil2_imon=-2.13631E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2926E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22421E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32978E-3
inlet_lpb_pmon=3.03081E-1
chamber_ion_pmon=1.20031E-7
chamber_cvt_pmon=2.51693E-3
foreline_cvt_pmon=2.51693E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.33142E-1
res40_imon=-2.63366E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=791
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.18014E-1	-7.98845E-1	-9.13184E0	-9.14314E0	5.72205E-3	9.43899E-2	2.72123E1	-3.25702E1	-3.27032E1	2.68737E1	1.20192E-7	2.52131E-3	2.52131E-3	6.30212E-3	3.03891E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.183E-1	-7.98965E-1	-9.13203E0	-9.14307E0	5.98431E-3	9.47237E-2	2.73321E1	-3.26846E1	-3.26792E1	2.68379E1	1.19851E-7	2.51793E-3	2.51793E-3	6.32518E-3	3.02743E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.18586E-1	-7.9844E-1	-9.13191E0	-9.14285E0	6.03199E-3	9.42945E-2	2.73659E1	-3.26396E1	-3.26201E1	2.68178E1	1.20069E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.02002E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.183E-1	-7.98702E-1	-9.13167E0	-9.14307E0	5.62668E-3	9.42707E-2	2.72786E1	-3.26166E1	-3.2652E1	2.68331E1	1.20344E-7	2.51393E-3	2.51393E-3	6.30212E-3	2.98592E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.18634E-1	-7.98798E-1	-9.13172E0	-9.14314E0	5.34058E-3	9.44853E-2	2.73502E1	-3.26945E1	-3.26218E1	2.6825E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9874E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0934E0	-8.18515E-1	-7.98345E-1	-9.13174E0	-9.14314E0	5.79357E-3	9.42707E-2	2.73181E1	-3.26655E1	-3.26278E1	2.68623E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.18467E-1	-7.99108E-1	-9.13191E0	-9.14321E0	5.76973E-3	9.41515E-2	2.7361E1	-3.26873E1	-3.25966E1	2.68677E1	1.20004E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.01995E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.18324E-1	-7.98488E-1	-9.132E0	-9.14299E0	5.74589E-3	9.40561E-2	2.73123E1	-3.26603E1	-3.25858E1	2.68487E1	1.20777E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.00942E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.18419E-1	-7.98774E-1	-9.13229E0	-9.14302E0	5.57899E-3	9.42469E-2	2.73523E1	-3.27174E1	-3.2639E1	2.6828E1	1.20114E-7	2.5143E-3	2.5143E-3	6.31827E-3	2.97419E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.18181E-1	-7.98893E-1	-9.13212E0	-9.14299E0	5.74589E-3	9.45807E-2	2.73568E1	-3.27047E1	-3.26488E1	2.68358E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.18062E-1	-7.98893E-1	-9.13196E0	-9.14321E0	5.45979E-3	9.43899E-2	2.73171E1	-3.26939E1	-3.26236E1	2.68424E1	1.20069E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.97704E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.18157E-1	-7.9875E-1	-9.13165E0	-9.1429E0	6.10352E-3	9.43184E-2	2.73544E1	-3.26945E1	-3.2629E1	2.68635E1	1.19809E-7	2.51771E-3	2.51771E-3	6.28006E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.18682E-1	-7.99084E-1	-9.13177E0	-9.14304E0	5.72205E-3	9.41992E-2	2.73309E1	-3.26344E1	-3.26663E1	2.68478E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99941E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.18372E-1	-7.99203E-1	-9.13174E0	-9.14326E0	5.67436E-3	9.42469E-2	2.72883E1	-3.26308E1	-3.26188E1	2.6834E1	1.20137E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.00676E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09657E0	-8.18086E-1	-7.99036E-1	-9.13181E0	-9.14319E0	5.96046E-3	9.44138E-2	2.72868E1	-3.26236E1	-3.26077E1	2.68412E1	1.20158E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.0148E-1
1.9E1	0.0E0	1.0E0	7.68E2	5.29E2	-2.09487E0	-8.18467E-1	-7.99155E-1	-9.13215E0	-9.14319E0	5.60284E-3	9.44376E-2	2.73434E1	-3.26696E1	-3.26701E1	2.6865E1	1.20122E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.98481E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.17847E-1	-7.98774E-1	-9.13219E0	-9.14323E0	5.6982E-3	9.43184E-2	2.74012E1	-3.27062E1	-3.26125E1	2.68406E1	1.19991E-7	2.51671E-3	2.51671E-3	6.31611E-3	3.01193E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.1811E-1	-7.9906E-1	-9.13196E0	-9.14304E0	5.67436E-3	9.41277E-2	2.73117E1	-3.26476E1	-3.26711E1	2.6846E1	1.19819E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.00942E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.18372E-1	-7.98273E-1	-9.13205E0	-9.1433E0	5.67436E-3	9.40084E-2	2.7312E1	-3.26778E1	-3.26628E1	2.68325E1	1.19872E-7	2.51581E-3	2.51581E-3	6.32978E-3	3.0201E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.18133E-1	-7.99203E-1	-9.13179E0	-9.14323E0	5.81741E-3	9.43899E-2	2.73674E1	-3.26889E1	-3.25786E1	2.6835E1	1.20031E-7	2.51693E-3	2.51693E-3	6.32978E-3	3.03081E-1