[Scan]
initial_time=2016-01-15T22:43:38
final_time=2016-01-15T22:43:58
ip_count=19
run=1023
dataset=3
scan=210
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09364E0
qbias_imon=-1.08788E-4
ql1_vset=
ql1_vmon=-8.18276E-1
ql1_imon=7.04265E-10
ql2_vset=
ql2_vmon=-7.98917E-1
ql2_imon=3.49712E-10
ql3_vset=
ql3_vmon=-9.13196E0
ql3_imon=4.89891E-10
ql4_vset=
ql4_vmon=-9.14376E0
ql4_imon=6.44445E-10
mult1=-9.66486E-9
mult2=-2.96627E-9
rf_tmon=-3.59513E-3
rf_agc=3.46541E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.88894E-3
ql5_imon=4.93324E-10
bslens_vset=-6.2E0
bslens_vmon=-6.57421E0
bslens_imon=2.58101E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2068E1
lens5a_imon=2.07175E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12581E2
lens4a_imon=2.0404E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54247E1
cs_ef1b_imon=2.86017E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04482E2
lens23_imon=1.0184E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0506E1
cs_ea1_imon=2.63016E-5
lens1_vset=-5.0E0
lens1_vmon=-5.50654E0
lens1_imon=2.5738E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65071E1
os_ef1alow_imon=2.95387E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.02008E1
cs_ea2_imon=1.44774E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8455E1
cs_ef1a_imon=2.91531E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=5.11229E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11171E1
os_restr1_imon=2.8335E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14777E1
os_ea1_imon=1.93837E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63401E1
os_ef1bup_imon=3.08649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.41192E0
cs_ionrep_imon=1.2592E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.92868E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0235E1
cs_anode1_imon=2.97693E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=8.93867E-10
tplens_vset=1.4E-1
tplens_vmon=1.51947E0
tplens_imon=-5.76927E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26042E1
iondef3_imon=1.62546E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26726E1
iondef2_imon=1.53245E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02861E2
lens6_imon=2.97506E-4
ql6_vset=1.0E-1
ql6_vmon=9.43422E-2
ql6_imon=4.74238E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28274E0
ionrepsh_imon=1.8587E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.35124E1
lens5b_imon=2.18279E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7521E1
cs_ef2b_imon=3.1474E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45978E-1
os_ea2_imon=-1.11407E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06036E2
lens4b_imon=2.00868E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71198E1
cs_ef2a_imon=3.1611E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6372E0
os_ef2alow_imon=-2.57986E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.22341E-1
os_ef2bup_imon=-5.16751E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11706E1
os_restr2_imon=2.88756E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23206E2
cs_ionfoca_imon=6.33065E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.25073E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73517E1
iondef1_imon=1.04867E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68316E1
iondef4_imon=1.07548E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.37128E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=3.4101E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14936E0
cs_ionaccel_imon=-2.14378E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47316E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56471E1
einzel_imon=7.87525E-6
window_vset=0.0E0
window_vmon=1.80702E-1
window_imon=-6.6255E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39279E-4
mask2_vset=0.0E0
mask2_vmon=-1.85755E1
mask2_imon=-7.20213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92578E3
multa_neg_imon=7.34315E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93809E3
defgrida_imon=7.36118E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50094E3
multb_neg_imon=7.87308E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.06472E0
defgridb_imon=5.18018E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33891E1
os_fil1_imon=5.485E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.39821E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65666E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30772E1
cs_fil1_imon=9.94828E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6215E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66406E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.02812E-2
os_fil2_imon=-2.44973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.37998E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.29597E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31594E-1
cs_fil2_imon=-2.32359E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38849E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22589E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.98481E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.15153E-1
res40_imon=-2.38885E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=261
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.18253E-1	-7.98631E-1	-9.13212E0	-9.14338E0	5.76973E-3	9.41992E-2	2.73642E1	-3.26715E1	-3.25297E1	2.68291E1	1.20191E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.97236E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.17919E-1	-7.98678E-1	-9.13231E0	-9.14323E0	6.27041E-3	9.39131E-2	2.73571E1	-3.26483E1	-3.25902E1	2.68494E1	1.19779E-7	2.51802E-3	2.51802E-3	6.33565E-3	2.99706E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.18014E-1	-7.98512E-1	-9.13227E0	-9.14342E0	5.96046E-3	9.41277E-2	2.73454E1	-3.26786E1	-3.26238E1	2.68479E1	1.19946E-7	2.52157E-3	2.52157E-3	6.33264E-3	3.01158E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.1811E-1	-7.98893E-1	-9.1321E0	-9.14319E0	5.62668E-3	9.42469E-2	2.73358E1	-3.26984E1	-3.26521E1	2.68302E1	1.19967E-7	2.51345E-3	2.51345E-3	6.33297E-3	3.02586E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.17943E-1	-7.98607E-1	-9.13198E0	-9.14323E0	6.1512E-3	9.42707E-2	2.73469E1	-3.26716E1	-3.26135E1	2.68438E1	1.19941E-7	2.52131E-3	2.52131E-3	6.29684E-3	3.01104E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.1768E-1	-7.98869E-1	-9.13203E0	-9.14316E0	5.76973E-3	9.41753E-2	2.73446E1	-3.26626E1	-3.26136E1	2.68522E1	1.19766E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.03081E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.18014E-1	-7.98965E-1	-9.13198E0	-9.14319E0	5.74589E-3	9.44853E-2	2.73235E1	-3.26811E1	-3.26762E1	2.68232E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02922E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.18229E-1	-7.98941E-1	-9.13212E0	-9.14321E0	5.62668E-3	9.43899E-2	2.72871E1	-3.26723E1	-3.26332E1	2.68435E1	1.20069E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.01085E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.1811E-1	-7.98512E-1	-9.13215E0	-9.14307E0	5.93662E-3	9.43899E-2	2.73303E1	-3.26446E1	-3.26116E1	2.68419E1	1.20122E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.18133E-1	-7.99108E-1	-9.13212E0	-9.14328E0	5.84126E-3	9.40561E-2	2.73452E1	-3.26868E1	-3.26307E1	2.68441E1	1.20278E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.1799E-1	-7.99179E-1	-9.132E0	-9.14321E0	5.55515E-3	9.42469E-2	2.72907E1	-3.26891E1	-3.26182E1	2.6816E1	1.198E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.99941E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.18205E-1	-7.98249E-1	-9.13208E0	-9.14326E0	5.65052E-3	9.45091E-2	2.73027E1	-3.26242E1	-3.26567E1	2.68388E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.18181E-1	-7.98917E-1	-9.13208E0	-9.14321E0	5.79357E-3	9.4533E-2	2.73484E1	-3.26957E1	-3.26591E1	2.68635E1	1.19925E-7	2.51248E-3	2.51248E-3	6.30182E-3	3.0041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-8.183E-1	-7.98774E-1	-9.13196E0	-9.14345E0	5.8651E-3	9.42469E-2	2.73279E1	-3.26633E1	-3.2602E1	2.6846E1	1.198E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.00966E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.18157E-1	-7.98678E-1	-9.13188E0	-9.14299E0	5.8651E-3	9.45568E-2	2.73387E1	-3.26759E1	-3.26176E1	2.68773E1	1.19809E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.02396E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.18229E-1	-7.99084E-1	-9.13217E0	-9.14326E0	5.74589E-3	9.42707E-2	2.73177E1	-3.26795E1	-3.26344E1	2.6846E1	1.20122E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00824E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.18086E-1	-7.99227E-1	-9.13196E0	-9.14311E0	6.1512E-3	9.45091E-2	2.73605E1	-3.26785E1	-3.25824E1	2.6855E1	1.20017E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.18205E-1	-7.99179E-1	-9.132E0	-9.1429E0	6.07967E-3	9.44376E-2	2.73363E1	-3.26657E1	-3.2632E1	2.68406E1	1.19705E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01347E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09371E0	-8.18038E-1	-7.99346E-1	-9.13196E0	-9.14321E0	5.93662E-3	9.4533E-2	2.73303E1	-3.26801E1	-3.26567E1	2.68204E1	1.19749E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09364E0	-8.18276E-1	-7.98917E-1	-9.13196E0	-9.14376E0	5.88894E-3	9.43422E-2	2.73517E1	-3.26726E1	-3.26042E1	2.68316E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.98481E-1