[Scan]
initial_time=2016-01-15T22:44:05
final_time=2016-01-15T22:44:24
ip_count=19
run=1023
dataset=3
scan=211
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08704E-4
ql1_vset=
ql1_vmon=-8.18038E-1
ql1_imon=7.24912E-10
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=3.18396E-10
ql3_vset=
ql3_vmon=-9.13196E0
ql3_imon=5.08654E-10
ql4_vset=
ql4_vmon=-9.14316E0
ql4_imon=7.09009E-10
mult1=-9.00285E-9
mult2=-2.75265E-9
rf_tmon=-5.23505E-3
rf_agc=3.32855E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=4.54485E-10
bslens_vset=-6.2E0
bslens_vmon=-6.77535E0
bslens_imon=1.5593E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.16904E1
lens5a_imon=1.92316E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12614E2
lens4a_imon=2.06452E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53551E1
cs_ef1b_imon=2.84977E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04814E2
lens23_imon=1.02025E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.02428E1
cs_ea1_imon=2.40098E-5
lens1_vset=-5.0E0
lens1_vmon=-5.26166E0
lens1_imon=3.91301E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64973E1
os_ef1alow_imon=2.99156E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.06539E1
cs_ea2_imon=1.62018E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83919E1
cs_ef1a_imon=2.9363E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=4.50909E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11598E1
os_restr1_imon=2.8383E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14338E1
os_ea1_imon=1.75291E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63473E1
os_ef1bup_imon=3.10415E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.04622E0
cs_ionrep_imon=1.17422E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92086E2
cs_nozzle_imon=1.94967E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=2.97661E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20427E0
olens4_imon=8.15356E-10
tplens_vset=1.4E-1
tplens_vmon=1.77062E0
tplens_imon=-1.01031E-6
iondef3_vset=-3.249E1
iondef3_vmon=-3.25765E1
iondef3_imon=1.3926E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27086E1
iondef2_imon=1.67292E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03156E2
lens6_imon=2.98615E-4
ql6_vset=1.0E-1
ql6_vmon=9.43661E-2
ql6_imon=4.86374E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.18839E0
ionrepsh_imon=1.67257E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.32737E1
lens5b_imon=2.22294E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73528E1
cs_ef2b_imon=3.14481E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.83173E-1
os_ea2_imon=6.24899E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06115E2
lens4b_imon=1.99359E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71628E1
cs_ef2a_imon=3.16045E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59033E0
os_ef2alow_imon=-2.30351E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.25409E-1
os_ef2bup_imon=-5.2262E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11112E1
os_restr2_imon=2.87166E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22817E2
cs_ionfoca_imon=6.23557E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.26801E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73122E1
iondef1_imon=1.26235E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68563E1
iondef4_imon=1.09998E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.34629E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=3.12018E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11798E0
cs_ionaccel_imon=-2.06024E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47772E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5633E1
einzel_imon=7.61138E-6
window_vset=0.0E0
window_vmon=2.72711E-1
window_imon=-7.29223E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82707E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86176E1
mask2_imon=-5.69361E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92792E3
multa_neg_imon=8.48946E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93613E3
defgrida_imon=6.45784E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50091E3
multb_neg_imon=6.21362E-5
defgridb_vset=0.0E0
defgridb_vmon=-2.39182E0
defgridb_imon=7.60461E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33886E1
os_fil1_imon=4.23498E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.45162E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65659E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30811E1
cs_fil1_imon=9.96958E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62899E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66517E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.96504E-2
os_fil2_imon=-2.61706E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.35028E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.24695E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31774E-1
cs_fil2_imon=-2.24636E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20572E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2241E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=3.00097E-1
chamber_ion_pmon=1.1969E-7
chamber_cvt_pmon=2.52659E-3
foreline_cvt_pmon=2.52659E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.20023E-1
res40_imon=-2.07415E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=186
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09302E0	-8.17895E-1	-7.98512E-1	-9.13224E0	-9.14288E0	5.53131E-3	9.46045E-2	2.7537E1	-3.28621E1	-3.26567E1	2.68487E1	1.20158E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00197E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.17633E-1	-7.98726E-1	-9.1321E0	-9.14304E0	5.6982E-3	9.43184E-2	2.73388E1	-3.27013E1	-3.26542E1	2.68797E1	1.20122E-7	2.50898E-3	2.50898E-3	6.30192E-3	2.99E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.1768E-1	-7.9844E-1	-9.13222E0	-9.14302E0	6.00815E-3	9.42707E-2	2.73125E1	-3.26795E1	-3.2622E1	2.68487E1	1.19872E-7	2.5147E-3	2.5147E-3	6.33538E-3	2.9829E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.17943E-1	-7.98321E-1	-9.13219E0	-9.14302E0	6.1512E-3	9.43184E-2	2.73207E1	-3.26975E1	-3.2626E1	2.68466E1	1.20142E-7	2.52236E-3	2.52236E-3	6.32328E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.17347E-1	-7.98631E-1	-9.13196E0	-9.1434E0	6.12736E-3	9.43899E-2	2.73117E1	-3.26446E1	-3.2629E1	2.6825E1	1.19902E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.03027E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.17871E-1	-7.98917E-1	-9.1325E0	-9.14323E0	5.53131E-3	9.41753E-2	2.73231E1	-3.26314E1	-3.26302E1	2.68675E1	1.20069E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.17895E-1	-7.98774E-1	-9.13203E0	-9.14316E0	5.67436E-3	9.43422E-2	2.72886E1	-3.2695E1	-3.25977E1	2.68424E1	1.19887E-7	2.51826E-3	2.51826E-3	6.31837E-3	2.9939E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.17919E-1	-7.98988E-1	-9.13222E0	-9.1429E0	5.72205E-3	9.41992E-2	2.7288E1	-3.26555E1	-3.26166E1	2.68501E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.18086E-1	-7.98631E-1	-9.1321E0	-9.14323E0	5.6982E-3	9.40561E-2	2.73159E1	-3.2653E1	-3.26242E1	2.6848E1	1.20293E-7	2.51919E-3	2.51919E-3	6.33388E-3	2.99594E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09665E0	-8.18181E-1	-7.9844E-1	-9.13203E0	-9.14311E0	5.48363E-3	9.42707E-2	2.73267E1	-3.26615E1	-3.2623E1	2.68267E1	1.19965E-7	2.5199E-3	2.5199E-3	6.34588E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.18086E-1	-7.9844E-1	-9.13193E0	-9.14302E0	5.81741E-3	9.40561E-2	2.73163E1	-3.26484E1	-3.26024E1	2.68448E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.18014E-1	-7.9906E-1	-9.13165E0	-9.14292E0	5.84126E-3	9.42469E-2	2.73411E1	-3.26512E1	-3.26038E1	2.68611E1	1.19861E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.18229E-1	-7.98464E-1	-9.13157E0	-9.14302E0	5.65052E-3	9.4533E-2	2.73141E1	-3.26873E1	-3.25966E1	2.68124E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.18276E-1	-7.98655E-1	-9.13177E0	-9.1429E0	5.48363E-3	9.42707E-2	2.73117E1	-3.26759E1	-3.2608E1	2.68184E1	1.198E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.01995E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.17585E-1	-7.98678E-1	-9.13148E0	-9.14323E0	5.60284E-3	9.42707E-2	2.73099E1	-3.27233E1	-3.26338E1	2.68334E1	1.20069E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.17776E-1	-7.98297E-1	-9.13203E0	-9.14299E0	5.72205E-3	9.42945E-2	2.73502E1	-3.26795E1	-3.2638E1	2.68094E1	1.19965E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9874E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.1768E-1	-7.98726E-1	-9.13198E0	-9.14323E0	5.79357E-3	9.46522E-2	2.73429E1	-3.26855E1	-3.2653E1	2.68082E1	1.20278E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.18014E-1	-7.98798E-1	-9.13208E0	-9.1434E0	5.60284E-3	9.45091E-2	2.73213E1	-3.27245E1	-3.26603E1	2.68274E1	1.19757E-7	2.52209E-3	2.52209E-3	6.29098E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.18157E-1	-7.98893E-1	-9.13205E0	-9.1433E0	5.67436E-3	9.46283E-2	2.73584E1	-3.26978E1	-3.26677E1	2.68574E1	1.20226E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01347E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.18038E-1	-7.98535E-1	-9.13196E0	-9.14316E0	5.65052E-3	9.43661E-2	2.73122E1	-3.27086E1	-3.25765E1	2.68563E1	1.1969E-7	2.52659E-3	2.52659E-3	6.31269E-3	3.00097E-1