[Scan]
initial_time=2016-01-15T22:44:31
final_time=2016-01-15T22:44:51
ip_count=19
run=1023
dataset=3
scan=212
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08792E-4
ql1_vset=
ql1_vmon=-8.18324E-1
ql1_imon=7.28381E-10
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=3.23892E-10
ql3_vset=
ql3_vmon=-9.13193E0
ql3_imon=4.96995E-10
ql4_vset=
ql4_vmon=-9.14319E0
ql4_imon=6.65939E-10
mult1=-9.91266E-9
mult2=-2.7689E-9
rf_tmon=-4.39388E-3
rf_agc=3.40654E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=4.53424E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65678E0
bslens_imon=2.25657E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19883E1
lens5a_imon=2.02722E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12567E2
lens4a_imon=2.05061E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53814E1
cs_ef1b_imon=2.85007E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04584E2
lens23_imon=1.01891E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04658E1
cs_ea1_imon=2.56273E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40736E0
lens1_imon=2.85119E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65113E1
os_ef1alow_imon=2.98666E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03649E1
cs_ea2_imon=1.49453E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84514E1
cs_ef1a_imon=2.95964E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=4.68648E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=2.84683E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.13966E1
os_ea1_imon=1.8952E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63828E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28808E0
cs_ionrep_imon=1.25704E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91964E2
cs_nozzle_imon=1.93473E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=2.9827E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=8.53539E-10
tplens_vset=1.4E-1
tplens_vmon=1.58598E0
tplens_imon=-7.05919E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26759E1
iondef3_imon=1.53418E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26946E1
iondef2_imon=1.57276E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.97981E-4
ql6_vset=1.0E-1
ql6_vmon=9.44376E-2
ql6_imon=4.73249E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23086E0
ionrepsh_imon=1.78477E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33935E1
lens5b_imon=2.19994E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.38057E-1
os_ea2_imon=-9.60757E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.0058E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71077E1
cs_ef2a_imon=3.1611E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6372E0
os_ef2alow_imon=-2.44291E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.24744E-1
os_ef2bup_imon=-5.14588E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11183E1
os_restr2_imon=2.86017E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.2961E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.25254E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73194E1
iondef1_imon=1.09954E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68406E1
iondef4_imon=1.10035E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.29853E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81283E-1
olens1_imon=3.69024E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14456E0
cs_ionaccel_imon=-1.75455E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0212E2
cs_ionfocb_imon=1.47446E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.80677E-6
window_vset=0.0E0
window_vmon=2.61792E-1
window_imon=-7.92292E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82678E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.8647E1
mask2_imon=-8.06708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.23651E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.87549E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50081E3
multb_neg_imon=7.36039E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45576E0
defgridb_imon=5.79597E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33888E1
os_fil1_imon=4.16355E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.79755E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65824E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30789E1
cs_fil1_imon=9.96468E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62312E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66516E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.99037E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.2176E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.21784E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-2.1494E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28638E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22292E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33341E-3
inlet_lpb_pmon=3.0E-1
chamber_ion_pmon=1.1993E-7
chamber_cvt_pmon=2.51679E-3
foreline_cvt_pmon=2.51679E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.79114E-1
res40_imon=-2.39966E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.18205E-1	-7.98321E-1	-9.13169E0	-9.14326E0	5.84126E-3	9.43661E-2	2.73015E1	-3.26368E1	-3.26524E1	2.68719E1	1.20055E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.03027E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.18014E-1	-7.98225E-1	-9.13177E0	-9.14292E0	5.8651E-3	9.41992E-2	2.73455E1	-3.26927E1	-3.25893E1	2.68593E1	1.20122E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.03449E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.18253E-1	-7.98464E-1	-9.13198E0	-9.14321E0	6.19888E-3	9.44853E-2	2.73569E1	-3.26744E1	-3.26215E1	2.68429E1	1.19978E-7	2.51693E-3	2.51693E-3	6.3074E-3	2.99348E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.18491E-1	-7.98416E-1	-9.13222E0	-9.14316E0	6.29425E-3	9.41992E-2	2.73285E1	-3.26609E1	-3.25948E1	2.6843E1	1.1988E-7	2.51575E-3	2.51575E-3	6.33863E-3	3.0E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.18491E-1	-7.9844E-1	-9.13191E0	-9.14323E0	6.17504E-3	9.41515E-2	2.73357E1	-3.26627E1	-3.26849E1	2.68292E1	1.19861E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-8.18253E-1	-7.98488E-1	-9.13167E0	-9.14302E0	6.31809E-3	9.44138E-2	2.73231E1	-3.26645E1	-3.26116E1	2.68466E1	1.19913E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.18515E-1	-7.98512E-1	-9.13174E0	-9.14314E0	5.98431E-3	9.44853E-2	2.72939E1	-3.26354E1	-3.26048E1	2.68779E1	1.20226E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.17609E-1	-7.98488E-1	-9.13177E0	-9.14299E0	6.03199E-3	9.4223E-2	2.73099E1	-3.26482E1	-3.25641E1	2.68671E1	1.20363E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.0148E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.17847E-1	-7.98702E-1	-9.13167E0	-9.14278E0	5.93662E-3	9.43184E-2	2.73502E1	-3.2653E1	-3.26062E1	2.68244E1	1.20226E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.17943E-1	-7.98535E-1	-9.13184E0	-9.14288E0	5.55515E-3	9.39846E-2	2.73771E1	-3.26962E1	-3.26301E1	2.684E1	1.20017E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.01871E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.18157E-1	-7.98965E-1	-9.13193E0	-9.14311E0	5.88894E-3	9.41753E-2	2.73411E1	-3.26963E1	-3.26567E1	2.68605E1	1.19697E-7	2.51096E-3	2.51096E-3	6.3074E-3	3.02769E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.17847E-1	-7.9906E-1	-9.13177E0	-9.14285E0	5.88894E-3	9.43661E-2	2.73339E1	-3.26813E1	-3.26567E1	2.68322E1	1.19861E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.17561E-1	-7.98726E-1	-9.13196E0	-9.14299E0	5.72205E-3	9.44853E-2	2.73592E1	-3.26615E1	-3.26284E1	2.67968E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.17728E-1	-7.98798E-1	-9.13184E0	-9.14309E0	5.62668E-3	9.41515E-2	2.73299E1	-3.2682E1	-3.26496E1	2.68088E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01871E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.17966E-1	-7.99012E-1	-9.13205E0	-9.14295E0	5.60284E-3	9.46045E-2	2.73467E1	-3.26585E1	-3.26174E1	2.68358E1	1.19953E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.02253E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.18396E-1	-7.9844E-1	-9.13167E0	-9.14285E0	5.43594E-3	9.45568E-2	2.73169E1	-3.2649E1	-3.26602E1	2.68346E1	1.1966E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.02277E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.18181E-1	-7.98655E-1	-9.13177E0	-9.1428E0	5.60284E-3	9.40084E-2	2.73339E1	-3.27136E1	-3.25642E1	2.68214E1	1.20004E-7	2.51847E-3	2.51847E-3	6.33977E-3	3.01223E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.18253E-1	-7.98726E-1	-9.13162E0	-9.14314E0	5.79357E-3	9.41753E-2	2.73216E1	-3.2629E1	-3.26526E1	2.68548E1	1.19872E-7	2.52585E-3	2.52585E-3	6.31858E-3	2.99613E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.18086E-1	-7.98368E-1	-9.13191E0	-9.14302E0	5.55515E-3	9.43661E-2	2.73165E1	-3.26334E1	-3.26687E1	2.68372E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.18324E-1	-7.98559E-1	-9.13193E0	-9.14319E0	5.74589E-3	9.44376E-2	2.73194E1	-3.26946E1	-3.26759E1	2.68406E1	1.1993E-7	2.51679E-3	2.51679E-3	6.33341E-3	3.0E-1