[Scan]
initial_time=2016-01-15T22:44:58
final_time=2016-01-15T22:45:18
ip_count=19
run=1023
dataset=3
scan=213
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08726E-4
ql1_vset=
ql1_vmon=-8.18372E-1
ql1_imon=7.0461E-10
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=3.45337E-10
ql3_vset=
ql3_vmon=-9.13165E0
ql3_imon=4.61161E-10
ql4_vset=
ql4_vmon=-9.14307E0
ql4_imon=6.58345E-10
mult1=-8.00654E-9
mult2=-2.79047E-9
rf_tmon=-5.53383E-3
rf_agc=3.31053E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.91278E-3
ql5_imon=4.55558E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68236E0
bslens_imon=2.19168E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18841E1
lens5a_imon=2.01011E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12575E2
lens4a_imon=2.05129E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54187E1
cs_ef1b_imon=2.83602E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02179E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04363E1
cs_ea1_imon=2.5166E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38878E0
lens1_imon=3.12536E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03852E1
cs_ea2_imon=1.50073E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84514E1
cs_ef1a_imon=2.94342E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=4.34554E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1149E1
os_restr1_imon=2.82629E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15005E1
os_ea1_imon=1.86231E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63761E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.18721E0
cs_ionrep_imon=1.21341E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91979E2
cs_nozzle_imon=1.93604E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=2.98594E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20442E0
olens4_imon=7.81584E-10
tplens_vset=1.4E-1
tplens_vmon=1.65525E0
tplens_imon=-4.07495E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25882E1
iondef3_imon=1.51443E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25978E1
iondef2_imon=1.56706E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03053E2
lens6_imon=2.98396E-4
ql6_vset=1.0E-1
ql6_vmon=9.45568E-2
ql6_imon=5.2731E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21665E0
ionrepsh_imon=1.77615E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.19396E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74796E1
cs_ef2b_imon=3.11136E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.01254E-1
os_ea2_imon=-9.19398E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06182E2
lens4b_imon=2.00237E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7136E1
cs_ef2a_imon=3.14776E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62038E0
os_ef2alow_imon=-2.32398E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.12731E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11394E1
os_restr2_imon=2.858E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.31154E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01665E1
cs_anode2_imon=2.23704E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73393E1
iondef1_imon=1.1031E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68106E1
iondef4_imon=1.09278E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.34822E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=2.72346E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-1.73653E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47641E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56207E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=2.43772E-1
window_imon=-7.49045E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82684E2
mask1_imon=2.39315E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-5.54431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=7.32874E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.77357E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50168E3
multb_neg_imon=6.58251E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55194E0
defgridb_imon=6.05979E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33912E1
os_fil1_imon=4.87233E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.61134E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65952E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30826E1
cs_fil1_imon=9.96522E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63147E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66742E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.01522E-2
os_fil2_imon=-2.3356E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.29879E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.03818E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32759E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.09417E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2243E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.9892E-1
chamber_ion_pmon=1.20311E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.68302E-1
res40_imon=-2.51499E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.18467E-1	-7.9875E-1	-9.13165E0	-9.14307E0	5.65052E-3	9.43899E-2	2.73063E1	-3.26307E1	-3.26207E1	2.68256E1	1.19965E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.9926E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.18443E-1	-7.98941E-1	-9.13186E0	-9.14316E0	5.96046E-3	9.43661E-2	2.73504E1	-3.2654E1	-3.26232E1	2.6835E1	1.20311E-7	2.51739E-3	2.51739E-3	6.29128E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.18253E-1	-7.98941E-1	-9.13177E0	-9.14295E0	5.76973E-3	9.45807E-2	2.73313E1	-3.26852E1	-3.25958E1	2.68647E1	1.20087E-7	2.51917E-3	2.51917E-3	6.31837E-3	3.00128E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.183E-1	-7.99155E-1	-9.13162E0	-9.14276E0	5.50747E-3	9.44138E-2	2.73412E1	-3.2697E1	-3.26395E1	2.68363E1	1.20078E-7	2.51162E-3	2.51162E-3	6.33341E-3	3.01237E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09371E0	-8.18276E-1	-7.98965E-1	-9.13167E0	-9.14311E0	5.53131E-3	9.48429E-2	2.73271E1	-3.26515E1	-3.26214E1	2.68638E1	1.19978E-7	2.51359E-3	2.51359E-3	6.31299E-3	3.01742E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.1811E-1	-7.98988E-1	-9.13167E0	-9.14288E0	5.62668E-3	9.44614E-2	2.73641E1	-3.27115E1	-3.26301E1	2.6829E1	1.19891E-7	2.51603E-3	2.51603E-3	6.3074E-3	2.99594E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.17871E-1	-7.99251E-1	-9.13184E0	-9.1429E0	5.65052E-3	9.43899E-2	2.73806E1	-3.26641E1	-3.2616E1	2.68519E1	1.19902E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99686E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.18324E-1	-7.99108E-1	-9.13198E0	-9.14309E0	5.98431E-3	9.46045E-2	2.72859E1	-3.26723E1	-3.26338E1	2.68286E1	1.19991E-7	2.52066E-3	2.52066E-3	6.3131E-3	3.00794E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-8.18348E-1	-7.99108E-1	-9.13188E0	-9.14292E0	5.6982E-3	9.43422E-2	2.73328E1	-3.2639E1	-3.26178E1	2.68472E1	1.20017E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.17966E-1	-7.99012E-1	-9.132E0	-9.14323E0	5.8651E-3	9.44853E-2	2.73411E1	-3.26302E1	-3.2641E1	2.68875E1	1.20055E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.00197E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.18157E-1	-7.98941E-1	-9.13191E0	-9.14297E0	5.67436E-3	9.44614E-2	2.73177E1	-3.26681E1	-3.26302E1	2.68611E1	1.20174E-7	2.52209E-3	2.52209E-3	6.28552E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.18133E-1	-7.98893E-1	-9.13174E0	-9.14302E0	5.81741E-3	9.4223E-2	2.73291E1	-3.26476E1	-3.25942E1	2.6825E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02133E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.18443E-1	-7.9844E-1	-9.13169E0	-9.14309E0	5.6982E-3	9.41515E-2	2.73586E1	-3.26693E1	-3.26176E1	2.67914E1	1.2033E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.02133E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.18181E-1	-7.9875E-1	-9.13179E0	-9.14304E0	5.88894E-3	9.43184E-2	2.73387E1	-3.26771E1	-3.26266E1	2.68328E1	1.19913E-7	2.5199E-3	2.5199E-3	6.3514E-3	3.01085E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.18467E-1	-7.99179E-1	-9.13186E0	-9.14307E0	6.00815E-3	9.42707E-2	2.73153E1	-3.26825E1	-3.26434E1	2.68675E1	1.20017E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.18396E-1	-7.98535E-1	-9.13172E0	-9.1429E0	6.00815E-3	9.44614E-2	2.73357E1	-3.26801E1	-3.26416E1	2.68148E1	1.19653E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.03185E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.17919E-1	-7.98631E-1	-9.13177E0	-9.14283E0	6.07967E-3	9.41515E-2	2.73147E1	-3.26711E1	-3.2623E1	2.6846E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.17847E-1	-7.98965E-1	-9.13217E0	-9.14323E0	5.79357E-3	9.43184E-2	2.7334E1	-3.26579E1	-3.26767E1	2.68777E1	1.20017E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9926E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.17609E-1	-7.98512E-1	-9.13179E0	-9.14326E0	6.10352E-3	9.4676E-2	2.72915E1	-3.26467E1	-3.26608E1	2.68522E1	1.2026E-7	2.50989E-3	2.50989E-3	6.30202E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.18372E-1	-7.98416E-1	-9.13165E0	-9.14307E0	5.91278E-3	9.45568E-2	2.73393E1	-3.25978E1	-3.25882E1	2.68106E1	1.20311E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.9892E-1