[Scan]
initial_time=2016-01-15T22:45:25
final_time=2016-01-15T22:45:44
ip_count=19
run=1023
dataset=3
scan=214
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08797E-4
ql1_vset=
ql1_vmon=-8.17704E-1
ql1_imon=6.42681E-10
ql2_vset=
ql2_vmon=-7.99012E-1
ql2_imon=3.41952E-10
ql3_vset=
ql3_vmon=-9.13193E0
ql3_imon=4.37343E-10
ql4_vset=
ql4_vmon=-9.14278E0
ql4_imon=6.35397E-10
mult1=-9.88947E-9
mult2=-2.75657E-9
rf_tmon=-3.90188E-3
rf_agc=3.38341E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=4.54938E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67388E0
bslens_imon=2.17162E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19394E1
lens5a_imon=2.02155E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12572E2
lens4a_imon=2.05263E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53818E1
cs_ef1b_imon=2.8456E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02011E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04605E1
cs_ea1_imon=2.55034E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34306E0
lens1_imon=2.87596E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64886E1
os_ef1alow_imon=2.97974E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04239E1
cs_ea2_imon=1.5271E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84365E1
cs_ef1a_imon=2.94325E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=4.48763E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11517E1
os_restr1_imon=2.84733E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15005E1
os_ea1_imon=1.89201E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6356E1
os_ef1bup_imon=3.06176E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=1.20501E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91963E2
cs_nozzle_imon=1.93724E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0163E1
cs_anode1_imon=3.00233E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=8.20982E-10
tplens_vset=1.4E-1
tplens_vmon=1.6261E0
tplens_imon=-2.8119E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26997E1
iondef3_imon=1.4963E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26219E1
iondef2_imon=1.5724E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03009E2
lens6_imon=2.98243E-4
ql6_vset=1.0E-1
ql6_vmon=9.44138E-2
ql6_imon=4.82273E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27805E0
ionrepsh_imon=1.78087E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33681E1
lens5b_imon=2.19534E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74548E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.45136E-1
os_ea2_imon=-5.96198E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.00453E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71333E1
cs_ef2a_imon=3.1542E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61755E0
os_ef2alow_imon=-2.34869E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.56686E-1
os_ef2bup_imon=-4.89258E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11407E1
os_restr2_imon=2.87444E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.30247E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0189E1
cs_anode2_imon=2.26175E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72992E1
iondef1_imon=1.13139E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68418E1
iondef4_imon=1.08538E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.28803E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=3.10361E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15041E0
cs_ionaccel_imon=-1.55286E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5626E1
einzel_imon=7.92068E-6
window_vset=0.0E0
window_vmon=2.47805E-1
window_imon=-6.63193E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82682E2
mask1_imon=2.39164E-4
mask2_vset=0.0E0
mask2_vmon=-1.85968E1
mask2_imon=-4.96381E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.65416E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.70914E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50095E3
multb_neg_imon=7.31084E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53548E0
defgridb_imon=6.23486E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33887E1
os_fil1_imon=4.57092E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.884E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65969E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30815E1
cs_fil1_imon=9.96333E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63275E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66885E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.16765E-2
os_fil2_imon=-2.53018E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.23443E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.10394E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.309E-1
cs_fil2_imon=-2.44329E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19414E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22479E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.15969E-1
res40_imon=-2.63714E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=228
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.18014E-1	-7.98535E-1	-9.13193E0	-9.14316E0	5.60284E-3	9.40323E-2	2.73255E1	-3.26621E1	-3.26344E1	2.68581E1	1.19902E-7	2.52061E-3	2.52061E-3	6.34518E-3	3.01223E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09364E0	-8.18372E-1	-7.98965E-1	-9.13179E0	-9.14316E0	5.74589E-3	9.40561E-2	2.7318E1	-3.26444E1	-3.25972E1	2.68419E1	1.20174E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.02133E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09302E0	-8.18062E-1	-7.99131E-1	-9.13184E0	-9.14283E0	5.88894E-3	9.41753E-2	2.73567E1	-3.26521E1	-3.2648E1	2.68655E1	1.20069E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.01347E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.18086E-1	-7.98869E-1	-9.13181E0	-9.14309E0	5.84126E-3	9.4223E-2	2.73147E1	-3.27083E1	-3.26248E1	2.68605E1	1.19646E-7	2.52061E-3	2.52061E-3	6.34518E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-8.1768E-1	-7.98845E-1	-9.13165E0	-9.14326E0	5.84126E-3	9.43422E-2	2.7311E1	-3.26874E1	-3.26083E1	2.68316E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.17728E-1	-7.99036E-1	-9.13167E0	-9.14307E0	5.65052E-3	9.41277E-2	2.73195E1	-3.26843E1	-3.26693E1	2.68532E1	1.19749E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.18396E-1	-7.99084E-1	-9.13165E0	-9.14307E0	5.98431E-3	9.46045E-2	2.7337E1	-3.26698E1	-3.25941E1	2.68227E1	1.2033E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.18253E-1	-7.99108E-1	-9.13186E0	-9.14297E0	5.98431E-3	9.41992E-2	2.73351E1	-3.26903E1	-3.26945E1	2.68484E1	1.1988E-7	2.51369E-3	2.51369E-3	6.29703E-3	3.00989E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-8.18276E-1	-7.98965E-1	-9.13191E0	-9.14268E0	5.79357E-3	9.39131E-2	2.73446E1	-3.26903E1	-3.26679E1	2.68148E1	1.19861E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.02659E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.18038E-1	-7.99298E-1	-9.13191E0	-9.14285E0	5.96046E-3	9.44853E-2	2.73646E1	-3.26681E1	-3.25803E1	2.68166E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00453E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.183E-1	-7.99084E-1	-9.13157E0	-9.14307E0	5.96046E-3	9.44376E-2	2.73324E1	-3.26215E1	-3.26664E1	2.68708E1	1.19913E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.18515E-1	-7.98726E-1	-9.13141E0	-9.14316E0	6.17504E-3	9.38177E-2	2.73496E1	-3.26451E1	-3.26375E1	2.68659E1	1.1988E-7	2.51265E-3	2.51265E-3	6.3126E-3	3.0E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.18491E-1	-7.98535E-1	-9.13165E0	-9.14283E0	5.98431E-3	9.39608E-2	2.73411E1	-3.26825E1	-3.25942E1	2.68581E1	1.19674E-7	2.52106E-3	2.52106E-3	6.32483E-3	3.03139E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.18062E-1	-7.98583E-1	-9.13184E0	-9.14292E0	5.84126E-3	9.41515E-2	2.7349E1	-3.26567E1	-3.26314E1	2.68322E1	1.19705E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01871E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.1799E-1	-7.98893E-1	-9.13181E0	-9.14268E0	5.76973E-3	9.38416E-2	2.73216E1	-3.26921E1	-3.26661E1	2.68285E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.17871E-1	-7.99036E-1	-9.13165E0	-9.1429E0	6.00815E-3	9.39131E-2	2.73189E1	-3.26597E1	-3.26434E1	2.68376E1	1.20055E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00197E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.17657E-1	-7.98774E-1	-9.13205E0	-9.14304E0	6.05583E-3	9.40084E-2	2.73248E1	-3.26741E1	-3.2626E1	2.6854E1	1.19861E-7	2.51771E-3	2.51771E-3	6.28552E-3	3.02396E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.17847E-1	-7.98655E-1	-9.13203E0	-9.14288E0	5.8651E-3	9.42469E-2	2.73051E1	-3.26064E1	-3.26076E1	2.684E1	1.20042E-7	2.52025E-3	2.52025E-3	6.31798E-3	3.00348E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.17657E-1	-7.98798E-1	-9.13188E0	-9.14309E0	5.88894E-3	9.48191E-2	2.73346E1	-3.26726E1	-3.26225E1	2.68346E1	1.19705E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.17704E-1	-7.99012E-1	-9.13193E0	-9.14278E0	5.8651E-3	9.44138E-2	2.72992E1	-3.26219E1	-3.26997E1	2.68418E1	1.19913E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00041E-1