[Scan]
initial_time=2016-01-15T22:45:51
final_time=2016-01-15T22:46:11
ip_count=19
run=1023
dataset=3
scan=215
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08792E-4
ql1_vset=
ql1_vmon=-8.17776E-1
ql1_imon=6.95789E-10
ql2_vset=
ql2_vmon=-7.98893E-1
ql2_imon=3.38626E-10
ql3_vset=
ql3_vmon=-9.13177E0
ql3_imon=5.20504E-10
ql4_vset=
ql4_vmon=-9.14295E0
ql4_imon=6.03259E-10
mult1=-9.77651E-9
mult2=-2.66472E-9
rf_tmon=-3.91761E-3
rf_agc=3.361E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=4.30942E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68922E0
bslens_imon=2.21763E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20196E1
lens5a_imon=1.99855E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12528E2
lens4a_imon=2.04838E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53881E1
cs_ef1b_imon=2.85672E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04659E2
lens23_imon=1.01926E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04882E1
cs_ea1_imon=2.55919E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34896E0
lens1_imon=2.49017E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64371E1
os_ef1alow_imon=2.99086E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03956E1
cs_ea2_imon=1.55612E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84568E1
cs_ef1a_imon=2.95368E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=4.55391E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=2.84247E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15512E1
os_ea1_imon=1.89803E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63745E1
os_ef1bup_imon=3.06593E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24974E0
cs_ionrep_imon=1.22554E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91933E2
cs_nozzle_imon=1.93505E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02012E1
cs_anode1_imon=2.98773E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20401E0
olens4_imon=7.254E-10
tplens_vset=1.4E-1
tplens_vmon=1.64615E0
tplens_imon=-2.91808E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26554E1
iondef3_imon=1.49241E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26122E1
iondef2_imon=1.54763E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03027E2
lens6_imon=2.98275E-4
ql6_vset=1.0E-1
ql6_vmon=9.45807E-2
ql6_imon=5.15807E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30047E0
ionrepsh_imon=1.78441E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33899E1
lens5b_imon=2.18649E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74634E1
cs_ef2b_imon=3.11597E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.41007E-1
os_ea2_imon=-3.4136E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71049E1
cs_ef2a_imon=3.16879E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.58627E0
os_ef2alow_imon=-2.4738E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.42785E-1
os_ef2bup_imon=-5.32003E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11019E1
os_restr2_imon=2.8654E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.231E2
cs_ionfoca_imon=6.28229E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01537E1
cs_anode2_imon=2.27357E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72727E1
iondef1_imon=1.09741E-5
iondef4_vset=2.691E1
iondef4_vmon=2.684E1
iondef4_imon=1.10658E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.29096E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81236E-1
olens1_imon=2.98262E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17532E0
cs_ionaccel_imon=-1.66407E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02106E2
cs_ionfocb_imon=1.47424E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56689E1
einzel_imon=7.93458E-6
window_vset=0.0E0
window_vmon=2.62864E-1
window_imon=-7.22272E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82681E2
mask1_imon=2.39216E-4
mask2_vset=0.0E0
mask2_vmon=-1.86558E1
mask2_imon=-8.02203E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.66832E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.53925E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=6.95336E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58273E0
defgridb_imon=6.23486E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33916E1
os_fil1_imon=4.5883E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.30479E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66203E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30783E1
cs_fil1_imon=9.96032E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6265E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67178E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.47805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.29236E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8483E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31025E-1
cs_fil2_imon=-2.38537E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24627E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22457E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.98156E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40018E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.80058E-1
res40_imon=-2.27571E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=229
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.18086E-1	-7.99084E-1	-9.13157E0	-9.14307E0	5.84126E-3	9.43184E-2	2.73508E1	-3.26651E1	-3.26621E1	2.68418E1	1.20106E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00197E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.17847E-1	-7.98917E-1	-9.13172E0	-9.14338E0	5.45979E-3	9.41038E-2	2.7318E1	-3.2678E1	-3.26291E1	2.68475E1	1.19653E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9874E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.17966E-1	-7.98702E-1	-9.13184E0	-9.14276E0	5.50747E-3	9.42945E-2	2.73273E1	-3.26881E1	-3.26089E1	2.68227E1	1.19978E-7	2.5147E-3	2.5147E-3	6.31858E-3	2.99348E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.18372E-1	-7.98583E-1	-9.13169E0	-9.14307E0	5.57899E-3	9.43899E-2	2.73273E1	-3.26711E1	-3.26813E1	2.68617E1	1.1988E-7	2.51679E-3	2.51679E-3	6.323E-3	2.99753E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.17871E-1	-7.98845E-1	-9.13188E0	-9.14321E0	5.76973E-3	9.41277E-2	2.73664E1	-3.26753E1	-3.26266E1	2.68701E1	1.20209E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.17823E-1	-7.98798E-1	-9.13184E0	-9.14319E0	6.03199E-3	9.41038E-2	2.72827E1	-3.26933E1	-3.26502E1	2.67836E1	1.20278E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.17943E-1	-7.98774E-1	-9.13193E0	-9.14307E0	5.72205E-3	9.41753E-2	2.73538E1	-3.26753E1	-3.26278E1	2.6825E1	1.19887E-7	2.52045E-3	2.52045E-3	6.31837E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09611E0	-8.18205E-1	-7.98774E-1	-9.13177E0	-9.14319E0	5.57899E-3	9.46045E-2	2.73021E1	-3.26603E1	-3.26164E1	2.68099E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.17847E-1	-7.9906E-1	-9.13193E0	-9.14328E0	5.74589E-3	9.4533E-2	2.73658E1	-3.26561E1	-3.26242E1	2.68508E1	1.20278E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.17943E-1	-7.99274E-1	-9.13143E0	-9.14314E0	5.43594E-3	9.41753E-2	2.72705E1	-3.26018E1	-3.2681E1	2.683E1	1.20209E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.0148E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.17823E-1	-7.98631E-1	-9.1316E0	-9.14302E0	5.65052E-3	9.42469E-2	2.73069E1	-3.26627E1	-3.25966E1	2.68631E1	1.19822E-7	2.52058E-3	2.52058E-3	6.31251E-3	2.99906E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.18253E-1	-7.98512E-1	-9.13186E0	-9.14307E0	5.91278E-3	9.41753E-2	2.73261E1	-3.26416E1	-3.26597E1	2.68377E1	1.20137E-7	2.51136E-3	2.51136E-3	6.32418E-3	2.98026E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.1811E-1	-7.98798E-1	-9.1315E0	-9.1429E0	5.74589E-3	9.40323E-2	2.73297E1	-3.26434E1	-3.26915E1	2.6792E1	1.2026E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99686E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.1811E-1	-7.98774E-1	-9.13184E0	-9.14276E0	5.8651E-3	9.408E-2	2.73594E1	-3.26567E1	-3.26301E1	2.68352E1	1.20031E-7	2.51915E-3	2.51915E-3	6.31858E-3	2.99879E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.18229E-1	-7.98535E-1	-9.13191E0	-9.14271E0	6.19888E-3	9.40323E-2	2.73147E1	-3.26488E1	-3.2623E1	2.68052E1	1.20004E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.00453E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.183E-1	-7.98678E-1	-9.13198E0	-9.14299E0	5.76973E-3	9.40084E-2	2.73261E1	-3.26512E1	-3.26488E1	2.68154E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.02659E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.18181E-1	-7.98893E-1	-9.13186E0	-9.14278E0	6.10352E-3	9.43184E-2	2.73165E1	-3.26735E1	-3.26362E1	2.68412E1	1.2033E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.17943E-1	-7.98941E-1	-9.13177E0	-9.14264E0	5.74589E-3	9.4223E-2	2.73538E1	-3.26538E1	-3.25994E1	2.68592E1	1.20174E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09348E0	-8.1799E-1	-7.99155E-1	-9.13186E0	-9.14271E0	5.8651E-3	9.46522E-2	2.73322E1	-3.2639E1	-3.26514E1	2.68484E1	1.19941E-7	2.51077E-3	2.51077E-3	6.29157E-3	3.006E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.17776E-1	-7.98893E-1	-9.13177E0	-9.14295E0	5.6982E-3	9.45807E-2	2.72727E1	-3.26122E1	-3.26554E1	2.684E1	1.19902E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.98156E-1