[Scan]
initial_time=2016-01-15T22:46:18
final_time=2016-01-15T22:46:38
ip_count=19
run=1023
dataset=3
scan=216
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-8.18253E-1
ql1_imon=7.04789E-10
ql2_vset=
ql2_vmon=-7.98273E-1
ql2_imon=3.86202E-10
ql3_vset=
ql3_vmon=-9.13181E0
ql3_imon=4.64487E-10
ql4_vset=
ql4_vmon=-9.14299E0
ql4_imon=6.4044E-10
mult1=-9.01795E-9
mult2=-2.55493E-9
rf_tmon=-4.93901E-3
rf_agc=3.55867E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.07967E-3
ql5_imon=4.34017E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70098E0
bslens_imon=2.42239E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19526E1
lens5a_imon=2.01407E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12565E2
lens4a_imon=2.05143E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53947E1
cs_ef1b_imon=2.85043E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04649E2
lens23_imon=1.01977E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04525E1
cs_ea1_imon=2.55085E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37556E0
lens1_imon=2.84778E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64903E1
os_ef1alow_imon=2.98522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03991E1
cs_ea2_imon=1.51335E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84466E1
cs_ef1a_imon=2.94774E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=4.77231E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=2.84431E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15047E1
os_ea1_imon=1.88394E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20163E0
cs_ionrep_imon=1.2145E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91961E2
cs_nozzle_imon=1.93492E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=2.99784E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=8.35443E-10
tplens_vset=1.4E-1
tplens_vmon=1.65105E0
tplens_imon=-4.50754E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.5119E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26603E1
iondef2_imon=1.55661E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03007E2
lens6_imon=2.98274E-4
ql6_vset=1.0E-1
ql6_vmon=9.41038E-2
ql6_imon=5.07152E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27132E0
ionrepsh_imon=1.79706E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33874E1
lens5b_imon=2.17522E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.13515E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.55929E-1
os_ea2_imon=-2.45272E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00771E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71498E1
cs_ef2a_imon=3.16326E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60356E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.64388E-1
os_ef2bup_imon=-5.18553E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11328E1
os_restr2_imon=2.85908E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23081E2
cs_ionfoca_imon=6.30685E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.24209E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72787E1
iondef1_imon=1.12401E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68298E1
iondef4_imon=1.10828E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.28952E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81283E-1
olens1_imon=3.07453E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16978E0
cs_ionaccel_imon=-1.8014E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47493E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56489E1
einzel_imon=7.81037E-6
window_vset=0.0E0
window_vmon=2.07732E-1
window_imon=-7.67065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82666E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.86158E1
mask2_imon=-5.86866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92682E3
multa_neg_imon=7.82622E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9375E3
defgrida_imon=6.41308E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.23861E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41059E0
defgridb_imon=6.36261E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33909E1
os_fil1_imon=5.34685E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.82758E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65996E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30847E1
cs_fil1_imon=9.97831E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62996E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67096E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.84756E-2
os_fil2_imon=-2.27554E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.99846E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.03173E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.24551E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.23872E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22431E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19646E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.79714E-1
res40_imon=-2.49336E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.18062E-1	-7.98798E-1	-9.13196E0	-9.14297E0	5.72205E-3	9.4223E-2	2.73138E1	-3.26729E1	-3.26353E1	2.68226E1	1.20122E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.98481E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.183E-1	-7.98678E-1	-9.13198E0	-9.14285E0	6.19888E-3	9.41277E-2	2.73244E1	-3.26996E1	-3.26316E1	2.68412E1	1.20055E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.02253E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.18491E-1	-7.98154E-1	-9.13193E0	-9.14321E0	5.96046E-3	9.4223E-2	2.73117E1	-3.26469E1	-3.26387E1	2.68278E1	1.20045E-7	2.51384E-3	2.51384E-3	6.33021E-3	2.99981E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.18372E-1	-7.98345E-1	-9.13215E0	-9.14311E0	5.81741E-3	9.41992E-2	2.73494E1	-3.26622E1	-3.26397E1	2.685E1	1.19717E-7	2.51823E-3	2.51823E-3	6.32247E-3	3.0101E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.18038E-1	-7.98345E-1	-9.13174E0	-9.14319E0	5.67436E-3	9.41277E-2	2.73492E1	-3.26823E1	-3.2615E1	2.68466E1	1.19991E-7	2.52521E-3	2.52521E-3	6.29603E-3	3.00794E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.1811E-1	-7.98368E-1	-9.13169E0	-9.14271E0	5.88894E-3	9.40084E-2	2.73287E1	-3.26443E1	-3.26655E1	2.681E1	1.19861E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.17919E-1	-7.98583E-1	-9.13155E0	-9.14309E0	5.57899E-3	9.408E-2	2.73255E1	-3.26693E1	-3.26068E1	2.68298E1	1.19757E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.17966E-1	-7.98583E-1	-9.13191E0	-9.14333E0	5.96046E-3	9.41038E-2	2.73201E1	-3.26753E1	-3.25797E1	2.68532E1	1.19809E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02396E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.18062E-1	-7.9875E-1	-9.13208E0	-9.1433E0	5.8651E-3	9.38892E-2	2.73532E1	-3.26603E1	-3.26404E1	2.684E1	1.19913E-7	2.51225E-3	2.51225E-3	6.34588E-3	3.00563E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.18014E-1	-7.98583E-1	-9.13172E0	-9.14328E0	5.72205E-3	9.43899E-2	2.73364E1	-3.26585E1	-3.25481E1	2.68328E1	1.198E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.9943E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.18157E-1	-7.98821E-1	-9.13193E0	-9.14309E0	5.57899E-3	9.41515E-2	2.73207E1	-3.26828E1	-3.26463E1	2.67943E1	1.20069E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.18419E-1	-7.98583E-1	-9.1315E0	-9.14321E0	5.45979E-3	9.41277E-2	2.73285E1	-3.26567E1	-3.26014E1	2.68472E1	1.19891E-7	2.52448E-3	2.52448E-3	6.31798E-3	2.99845E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.18515E-1	-7.98678E-1	-9.13167E0	-9.14299E0	5.43594E-3	9.37462E-2	2.73363E1	-3.26867E1	-3.2596E1	2.68352E1	1.20278E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.18372E-1	-7.98893E-1	-9.1316E0	-9.14271E0	5.24521E-3	9.41992E-2	2.73577E1	-3.26401E1	-3.26401E1	2.68851E1	1.19965E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00824E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09348E0	-8.18229E-1	-7.98631E-1	-9.13174E0	-9.14285E0	5.65052E-3	9.43899E-2	2.73327E1	-3.26711E1	-3.26026E1	2.68629E1	1.20191E-7	2.52697E-3	2.52697E-3	6.28511E-3	3.03081E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.18157E-1	-7.98655E-1	-9.13227E0	-9.14271E0	5.55515E-3	9.42945E-2	2.73207E1	-3.26657E1	-3.26494E1	2.68569E1	1.19549E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00824E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.18157E-1	-7.98464E-1	-9.13184E0	-9.14264E0	5.76973E-3	9.4223E-2	2.73369E1	-3.26464E1	-3.26176E1	2.68737E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.18062E-1	-7.98392E-1	-9.13203E0	-9.14295E0	5.98431E-3	9.45807E-2	2.73063E1	-3.27027E1	-3.2603E1	2.68314E1	1.20017E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.18253E-1	-7.9875E-1	-9.13193E0	-9.14292E0	5.60284E-3	9.44376E-2	2.7337E1	-3.27039E1	-3.26697E1	2.68262E1	1.19953E-7	2.51847E-3	2.51847E-3	6.34518E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.18253E-1	-7.98273E-1	-9.13181E0	-9.14299E0	6.07967E-3	9.41038E-2	2.72787E1	-3.26603E1	-3.26236E1	2.68298E1	1.19646E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00966E-1