[Scan]
initial_time=2016-01-15T22:46:45
final_time=2016-01-15T22:47:04
ip_count=19
run=1023
dataset=3
scan=217
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08802E-4
ql1_vset=
ql1_vmon=-8.18205E-1
ql1_imon=7.23219E-10
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=3.37315E-10
ql3_vset=
ql3_vmon=-9.13177E0
ql3_imon=4.05741E-10
ql4_vset=
ql4_vmon=-9.14309E0
ql4_imon=6.68776E-10
mult1=-9.05407E-9
mult2=-2.84836E-9
rf_tmon=-3.73135E-3
rf_agc=3.34537E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=4.35805E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69276E0
bslens_imon=2.38398E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.196E1
lens5a_imon=2.00527E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12532E2
lens4a_imon=2.05008E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53499E1
cs_ef1b_imon=2.84594E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02199E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04469E1
cs_ea1_imon=2.52592E-5
lens1_vset=-5.0E0
lens1_vmon=-5.30826E0
lens1_imon=2.58219E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64794E1
os_ef1alow_imon=2.98565E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04026E1
cs_ea2_imon=1.55329E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=2.93456E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=4.60351E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11633E1
os_restr1_imon=2.83969E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15176E1
os_ea1_imon=1.88847E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63734E1
os_ef1bup_imon=3.09025E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22791E0
cs_ionrep_imon=1.21457E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91943E2
cs_nozzle_imon=1.93781E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01636E1
cs_anode1_imon=3.00441E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20439E0
olens4_imon=8.03709E-10
tplens_vset=1.4E-1
tplens_vmon=1.65028E0
tplens_imon=-3.97991E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26164E1
iondef3_imon=1.49878E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27065E1
iondef2_imon=1.57806E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02988E2
lens6_imon=2.98151E-4
ql6_vset=1.0E-1
ql6_vmon=9.4223E-2
ql6_imon=4.84157E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.281E0
ionrepsh_imon=1.806E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34E1
lens5b_imon=2.19428E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74553E1
cs_ef2b_imon=3.11458E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.25669E-1
os_ea2_imon=-5.11252E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06153E2
lens4b_imon=2.00793E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71414E1
cs_ef2a_imon=3.16115E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60423E0
os_ef2alow_imon=-2.40082E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.38152E-1
os_ef2bup_imon=-5.12542E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11094E1
os_restr2_imon=2.86436E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.28088E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.24542E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73015E1
iondef1_imon=1.11369E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68881E1
iondef4_imon=1.08712E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.27026E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81236E-1
olens1_imon=3.58117E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-1.67797E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02109E2
cs_ionfocb_imon=1.47574E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56695E1
einzel_imon=7.69479E-6
window_vset=0.0E0
window_vmon=2.36221E-1
window_imon=-6.8752E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82667E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.86153E1
mask2_imon=-7.11847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92615E3
multa_neg_imon=7.30022E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.40829E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.11971E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43804E0
defgridb_imon=6.19239E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33927E1
os_fil1_imon=4.57092E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.78553E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66502E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30783E1
cs_fil1_imon=9.96333E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62459E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67492E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.96504E-2
os_fil2_imon=-2.33324E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.17651E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.78502E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32898E-1
cs_fil2_imon=-2.11315E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.10325E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22618E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.52538E-3
foreline_cvt_pmon=2.52538E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.95696E-1
res40_imon=-2.20273E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=182
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09379E0	-8.18253E-1	-7.98202E-1	-9.13198E0	-9.14297E0	5.72205E-3	9.4223E-2	2.73328E1	-3.26478E1	-3.26443E1	2.6831E1	1.19991E-7	2.51814E-3	2.51814E-3	6.29684E-3	3.01356E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.18038E-1	-7.98726E-1	-9.13224E0	-9.14302E0	5.67436E-3	9.4223E-2	2.73313E1	-3.26903E1	-3.25973E1	2.685E1	1.20122E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09379E0	-8.17919E-1	-7.99131E-1	-9.13165E0	-9.14316E0	5.24521E-3	9.43661E-2	2.73417E1	-3.26614E1	-3.26313E1	2.68389E1	1.19883E-7	2.52179E-3	2.52179E-3	6.31879E-3	3.00522E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.18276E-1	-7.98559E-1	-9.13169E0	-9.14314E0	5.74589E-3	9.42469E-2	2.73889E1	-3.26419E1	-3.26514E1	2.6816E1	1.20042E-7	2.51287E-3	2.51287E-3	6.31798E-3	2.98842E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09379E0	-8.18086E-1	-7.9875E-1	-9.13179E0	-9.14319E0	5.88894E-3	9.44853E-2	2.73778E1	-3.26765E1	-3.25918E1	2.68172E1	1.20122E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.97963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.18133E-1	-7.98774E-1	-9.13172E0	-9.14283E0	5.62668E-3	9.44376E-2	2.73647E1	-3.26708E1	-3.26508E1	2.68334E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.98481E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.18467E-1	-7.98535E-1	-9.13191E0	-9.14314E0	5.50747E-3	9.42707E-2	2.73129E1	-3.26567E1	-3.26188E1	2.68175E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.0148E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-8.1861E-1	-7.98607E-1	-9.13205E0	-9.14307E0	5.60284E-3	9.43422E-2	2.73472E1	-3.265E1	-3.26164E1	2.68334E1	1.19965E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.02396E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-8.18276E-1	-7.98774E-1	-9.13184E0	-9.14295E0	5.96046E-3	9.4223E-2	2.72961E1	-3.26657E1	-3.26188E1	2.67739E1	1.20055E-7	2.52169E-3	2.52169E-3	6.34518E-3	2.99941E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.18348E-1	-7.98821E-1	-9.1316E0	-9.14304E0	5.55515E-3	9.42707E-2	2.73075E1	-3.26048E1	-3.25818E1	2.6814E1	1.19819E-7	2.5147E-3	2.5147E-3	6.32978E-3	3.03081E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.18372E-1	-7.9875E-1	-9.13167E0	-9.14297E0	5.81741E-3	9.4533E-2	2.73492E1	-3.26627E1	-3.26064E1	2.68136E1	1.20055E-7	2.51417E-3	2.51417E-3	6.33977E-3	3.01223E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.18062E-1	-7.98917E-1	-9.13157E0	-9.14297E0	5.4121E-3	9.44853E-2	2.73158E1	-3.26035E1	-3.26394E1	2.68588E1	1.19653E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02922E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.17847E-1	-7.98678E-1	-9.13172E0	-9.1433E0	5.48363E-3	9.4533E-2	2.73363E1	-3.26452E1	-3.26597E1	2.68004E1	1.1994E-7	2.51819E-3	2.51819E-3	6.32888E-3	3.00687E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.1811E-1	-7.98893E-1	-9.13184E0	-9.14321E0	5.57899E-3	9.41992E-2	2.74084E1	-3.2641E1	-3.26428E1	2.68394E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.18253E-1	-7.98345E-1	-9.13169E0	-9.14316E0	5.45979E-3	9.43422E-2	2.73207E1	-3.26741E1	-3.26482E1	2.68034E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.1811E-1	-7.98798E-1	-9.13177E0	-9.14333E0	5.62668E-3	9.45568E-2	2.71411E1	-3.24932E1	-3.27402E1	2.6795E1	1.19953E-7	2.52492E-3	2.52492E-3	6.30202E-3	2.9943E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.18086E-1	-7.98535E-1	-9.13141E0	-9.14288E0	5.79357E-3	9.44138E-2	2.73181E1	-3.26791E1	-3.26549E1	2.68334E1	1.19965E-7	2.52428E-3	2.52428E-3	6.31837E-3	2.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.18157E-1	-7.98583E-1	-9.13162E0	-9.14323E0	5.57899E-3	9.44138E-2	2.72997E1	-3.27095E1	-3.2614E1	2.6975E1	1.19809E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9926E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.18062E-1	-7.99227E-1	-9.13157E0	-9.14321E0	5.60284E-3	9.42945E-2	2.73063E1	-3.26767E1	-3.26248E1	2.67878E1	1.198E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.18205E-1	-7.98678E-1	-9.13177E0	-9.14309E0	5.8651E-3	9.4223E-2	2.73015E1	-3.27065E1	-3.26164E1	2.68881E1	1.20017E-7	2.52538E-3	2.52538E-3	6.34037E-3	3.00302E-1