[Scan]
initial_time=2016-01-15T22:47:11
final_time=2016-01-15T22:47:31
ip_count=19
run=1023
dataset=3
scan=218
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.0881E-4
ql1_vset=
ql1_vmon=-8.18229E-1
ql1_imon=6.55973E-10
ql2_vset=
ql2_vmon=-7.99084E-1
ql2_imon=3.232E-10
ql3_vset=
ql3_vmon=-9.13203E0
ql3_imon=4.2156E-10
ql4_vset=
ql4_vmon=-9.14261E0
ql4_imon=6.42812E-10
mult1=-1.10125E-8
mult2=-2.82713E-9
rf_tmon=-4.60386E-3
rf_agc=3.4017E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.93662E-3
ql5_imon=4.36175E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66433E0
bslens_imon=2.4296E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19646E1
lens5a_imon=2.00326E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12544E2
lens4a_imon=2.05071E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53983E1
cs_ef1b_imon=2.85872E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04639E2
lens23_imon=1.01955E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04712E1
cs_ea1_imon=2.56347E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34072E0
lens1_imon=2.55938E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64734E1
os_ef1alow_imon=2.99784E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04057E1
cs_ea2_imon=1.53209E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=2.94882E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=4.75049E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11742E1
os_restr1_imon=2.8371E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14711E1
os_ea1_imon=1.92503E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.07857E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24068E0
cs_ionrep_imon=1.19755E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.93557E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01749E1
cs_anode1_imon=3.01081E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=8.20673E-10
tplens_vset=1.4E-1
tplens_vmon=1.62461E0
tplens_imon=-2.52482E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26767E1
iondef3_imon=1.51911E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26697E1
iondef2_imon=1.56958E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03005E2
lens6_imon=2.98108E-4
ql6_vset=1.0E-1
ql6_vmon=9.40561E-2
ql6_imon=4.77672E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28154E0
ionrepsh_imon=1.79453E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34096E1
lens5b_imon=2.18351E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.42711E-1
os_ea2_imon=-7.49965E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06059E2
lens4b_imon=2.00882E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.14992E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62338E0
os_ef2alow_imon=-2.32758E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.54176E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11364E1
os_restr2_imon=2.86701E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.2708E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01515E1
cs_anode2_imon=2.24353E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7324E1
iondef1_imon=1.13843E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68124E1
iondef4_imon=1.09927E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.28617E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=2.72787E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13435E0
cs_ionaccel_imon=-1.82663E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47543E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.90768E-6
window_vset=0.0E0
window_vmon=2.27554E-1
window_imon=-7.995E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82692E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.8641E1
mask2_imon=-5.14787E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92669E3
multa_neg_imon=7.49456E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.61135E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.48014E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38653E0
defgridb_imon=6.18236E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33935E1
os_fil1_imon=5.04051E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.99576E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66904E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30771E1
cs_fil1_imon=9.97158E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6266E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67351E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.84756E-2
os_fil2_imon=-2.5158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.17866E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.685E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.20947E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04011E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22522E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.02253E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.89635E-1
res40_imon=-2.42129E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.18181E-1	-7.99203E-1	-9.13162E0	-9.14319E0	5.72205E-3	9.4223E-2	2.73155E1	-3.26648E1	-3.26382E1	2.68267E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.99941E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.18443E-1	-7.98464E-1	-9.13167E0	-9.14288E0	5.57899E-3	9.42945E-2	2.73235E1	-3.26774E1	-3.26658E1	2.6825E1	1.19697E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09619E0	-8.18014E-1	-7.98655E-1	-9.13134E0	-9.14311E0	5.43594E-3	9.43184E-2	2.73062E1	-3.26761E1	-3.26021E1	2.68423E1	1.19872E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.02277E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.18133E-1	-7.98702E-1	-9.13141E0	-9.14311E0	5.76973E-3	9.45568E-2	2.73466E1	-3.26729E1	-3.26314E1	2.68364E1	1.19919E-7	2.51549E-3	2.51549E-3	6.34835E-3	3.01853E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.18062E-1	-7.98202E-1	-9.13155E0	-9.1433E0	5.57899E-3	9.41515E-2	2.73207E1	-3.26747E1	-3.26302E1	2.68334E1	1.19925E-7	2.51136E-3	2.51136E-3	6.32978E-3	2.99348E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.183E-1	-7.98893E-1	-9.13146E0	-9.14333E0	5.57899E-3	9.40561E-2	2.73269E1	-3.26697E1	-3.26136E1	2.6843E1	1.20055E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.18157E-1	-7.98464E-1	-9.13153E0	-9.14302E0	5.6982E-3	9.41515E-2	2.73363E1	-3.26512E1	-3.26182E1	2.68797E1	1.19809E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.17966E-1	-7.98512E-1	-9.13198E0	-9.14307E0	5.93662E-3	9.44614E-2	2.73309E1	-3.2647E1	-3.26188E1	2.68286E1	1.19445E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.18014E-1	-7.98321E-1	-9.13184E0	-9.14314E0	5.76973E-3	9.47475E-2	2.73309E1	-3.26915E1	-3.2617E1	2.68493E1	1.19809E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.18038E-1	-7.98488E-1	-9.13205E0	-9.14319E0	5.43594E-3	9.4533E-2	2.73568E1	-3.27137E1	-3.26591E1	2.6792E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01347E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.1749E-1	-7.98726E-1	-9.13181E0	-9.14323E0	5.76973E-3	9.42945E-2	2.73493E1	-3.26567E1	-3.2652E1	2.67794E1	1.19902E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.99175E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09642E0	-8.17728E-1	-7.98655E-1	-9.13198E0	-9.14326E0	5.98431E-3	9.42945E-2	2.73149E1	-3.26897E1	-3.26614E1	2.67763E1	1.20122E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.18205E-1	-7.99251E-1	-9.13186E0	-9.14342E0	6.05583E-3	9.43899E-2	2.73357E1	-3.26697E1	-3.2636E1	2.68537E1	1.19841E-7	2.51393E-3	2.51393E-3	6.31269E-3	2.98842E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.1799E-1	-7.99084E-1	-9.13167E0	-9.14338E0	5.8651E-3	9.44138E-2	2.73051E1	-3.26512E1	-3.26603E1	2.68478E1	1.19883E-7	2.52179E-3	2.52179E-3	6.34737E-3	2.9944E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.17966E-1	-7.99203E-1	-9.13179E0	-9.14309E0	5.57899E-3	9.44138E-2	2.73616E1	-3.26603E1	-3.26044E1	2.68617E1	1.20226E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01871E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09657E0	-8.18038E-1	-7.98845E-1	-9.13181E0	-9.1429E0	5.88894E-3	9.43899E-2	2.74042E1	-3.27694E1	-3.26549E1	2.68209E1	1.19959E-7	2.51593E-3	2.51593E-3	6.32099E-3	2.99861E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09711E0	-8.18133E-1	-7.98798E-1	-9.13198E0	-9.14273E0	5.53131E-3	9.44614E-2	2.73363E1	-3.26567E1	-3.26308E1	2.68282E1	1.20122E-7	2.51007E-3	2.51007E-3	6.31288E-3	2.97704E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.18086E-1	-7.98702E-1	-9.13186E0	-9.14288E0	5.81741E-3	9.44853E-2	2.73204E1	-3.26856E1	-3.26567E1	2.68024E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.18276E-1	-7.98821E-1	-9.1321E0	-9.1429E0	5.91278E-3	9.43661E-2	2.73285E1	-3.26759E1	-3.25996E1	2.68394E1	1.19902E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.18229E-1	-7.99084E-1	-9.13203E0	-9.14261E0	5.93662E-3	9.40561E-2	2.7324E1	-3.26697E1	-3.26767E1	2.68124E1	1.19851E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.02253E-1