[Scan]
initial_time=2016-01-15T22:47:38
final_time=2016-01-15T22:47:58
ip_count=19
run=1023
dataset=3
scan=219
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08761E-4
ql1_vset=
ql1_vmon=-8.18229E-1
ql1_imon=6.93035E-10
ql2_vset=
ql2_vmon=-7.99179E-1
ql2_imon=3.40748E-10
ql3_vset=
ql3_vmon=-9.13193E0
ql3_imon=4.64463E-10
ql4_vset=
ql4_vmon=-9.14285E0
ql4_imon=6.47116E-10
mult1=-1.01141E-8
mult2=-2.69974E-9
rf_tmon=-5.96063E-3
rf_agc=3.09908E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.19888E-3
ql5_imon=4.4781E-10
bslens_vset=-6.2E0
bslens_vmon=-6.73228E0
bslens_imon=2.33797E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19482E1
lens5a_imon=2.01306E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12542E2
lens4a_imon=2.05125E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54073E1
cs_ef1b_imon=2.84971E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02093E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0477E1
cs_ea1_imon=2.51778E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33009E0
lens1_imon=2.745E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65275E1
os_ef1alow_imon=2.99423E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.5271E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=2.93981E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=4.61602E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11568E1
os_restr1_imon=2.8389E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=1.87821E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63437E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22732E0
cs_ionrep_imon=1.19793E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.9359E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01743E1
cs_anode1_imon=3.01009E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=8.06606E-10
tplens_vset=1.4E-1
tplens_vmon=1.63081E0
tplens_imon=-2.8119E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26644E1
iondef3_imon=1.48852E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2629E1
iondef2_imon=1.57205E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03045E2
lens6_imon=2.98328E-4
ql6_vset=1.0E-1
ql6_vmon=9.41753E-2
ql6_imon=4.76873E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30932E0
ionrepsh_imon=1.79928E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33752E1
lens5b_imon=2.16596E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74796E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.26259E-1
os_ea2_imon=-5.53725E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00655E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71198E1
cs_ef2a_imon=3.16758E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64441E0
os_ef2alow_imon=-2.24469E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69193E-1
os_ef2bup_imon=-5.20355E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1131E1
os_restr2_imon=2.8598E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.27911E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01737E1
cs_anode2_imon=2.24425E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73765E1
iondef1_imon=1.11546E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68511E1
iondef4_imon=1.09747E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.26717E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=3.46136E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12834E0
cs_ionaccel_imon=-1.92033E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02132E2
cs_ionfocb_imon=1.47572E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5679E1
einzel_imon=7.71307E-6
window_vset=0.0E0
window_vmon=2.75607E-1
window_imon=-8.85996E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82705E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.862E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.51967E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.71622E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50161E3
multb_neg_imon=7.43472E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32878E0
defgridb_imon=6.05435E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33944E1
os_fil1_imon=5.41292E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.85161E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66716E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.308E1
cs_fil1_imon=9.96359E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62336E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67367E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.9777E-2
os_fil2_imon=-2.4257E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.77932E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59139E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.325E-1
cs_fil2_imon=-2.24551E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26836E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22549E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.19757E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.89325E-1
res40_imon=-2.3456E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.17943E-1	-7.9875E-1	-9.13172E0	-9.14316E0	5.48363E-3	9.43899E-2	2.73303E1	-3.26585E1	-3.26122E1	2.68208E1	1.2033E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.9952E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.18276E-1	-7.99012E-1	-9.13167E0	-9.14326E0	5.60284E-3	9.45091E-2	2.731E1	-3.26529E1	-3.26046E1	2.68593E1	1.19913E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9874E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.17895E-1	-7.98893E-1	-9.13191E0	-9.14319E0	5.8651E-3	9.42707E-2	2.73434E1	-3.2688E1	-3.26638E1	2.6801E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00824E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.18253E-1	-7.98774E-1	-9.13203E0	-9.14335E0	5.6982E-3	9.4533E-2	2.7346E1	-3.26879E1	-3.2614E1	2.68773E1	1.20004E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.02511E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.18563E-1	-7.98869E-1	-9.13224E0	-9.14345E0	5.74589E-3	9.43661E-2	2.73417E1	-3.26699E1	-3.25852E1	2.68581E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.17585E-1	-7.99108E-1	-9.13193E0	-9.14309E0	5.84126E-3	9.44614E-2	2.73538E1	-3.26086E1	-3.259E1	2.69013E1	1.19998E-7	2.52063E-3	2.52063E-3	6.32125E-3	3.00619E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.18157E-1	-7.98774E-1	-9.13203E0	-9.14299E0	5.93662E-3	9.44614E-2	2.73252E1	-3.26431E1	-3.26408E1	2.68163E1	1.19841E-7	2.52448E-3	2.52448E-3	6.31798E-3	3.02875E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.18038E-1	-7.98726E-1	-9.13191E0	-9.14311E0	5.6982E-3	9.42945E-2	2.73231E1	-3.26567E1	-3.26428E1	2.68369E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.17728E-1	-7.98869E-1	-9.13193E0	-9.14302E0	5.72205E-3	9.43899E-2	2.73596E1	-3.26614E1	-3.26706E1	2.68111E1	1.19985E-7	2.51593E-3	2.51593E-3	6.33461E-3	3.01284E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09325E0	-8.18229E-1	-7.98655E-1	-9.13165E0	-9.14295E0	5.91278E-3	9.42469E-2	2.73732E1	-3.26909E1	-3.25821E1	2.67945E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.17609E-1	-7.98607E-1	-9.13181E0	-9.14297E0	5.72205E-3	9.43661E-2	2.73328E1	-3.2649E1	-3.26242E1	2.68346E1	1.19883E-7	2.52293E-3	2.52293E-3	6.29603E-3	3.01337E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.178E-1	-7.98988E-1	-9.13196E0	-9.14304E0	5.79357E-3	9.4223E-2	2.73748E1	-3.26224E1	-3.26308E1	2.67824E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.02133E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.17704E-1	-7.98845E-1	-9.13162E0	-9.14285E0	5.84126E-3	9.44853E-2	2.73667E1	-3.26475E1	-3.26497E1	2.68341E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02659E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.17537E-1	-7.98798E-1	-9.13184E0	-9.14307E0	6.03199E-3	9.43661E-2	2.73019E1	-3.26903E1	-3.2626E1	2.68108E1	1.19575E-7	2.51523E-3	2.51523E-3	6.33253E-3	2.99816E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.17299E-1	-7.98821E-1	-9.13181E0	-9.14288E0	6.03199E-3	9.43422E-2	2.73464E1	-3.26779E1	-3.26537E1	2.68484E1	1.19931E-7	2.51934E-3	2.51934E-3	6.31586E-3	3.00063E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.17418E-1	-7.98893E-1	-9.13179E0	-9.14285E0	6.10352E-3	9.43184E-2	2.73069E1	-3.26308E1	-3.26482E1	2.6852E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.17609E-1	-7.98512E-1	-9.13167E0	-9.14278E0	5.81741E-3	9.41277E-2	2.73605E1	-3.26738E1	-3.26113E1	2.68534E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.18062E-1	-7.98178E-1	-9.13191E0	-9.14261E0	5.88894E-3	9.40561E-2	2.7334E1	-3.26708E1	-3.26455E1	2.68298E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.99E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09379E0	-8.18014E-1	-7.98821E-1	-9.13177E0	-9.14297E0	6.19888E-3	9.408E-2	2.7352E1	-3.26597E1	-3.2602E1	2.68304E1	1.19851E-7	2.52276E-3	2.52276E-3	6.30202E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.18229E-1	-7.99179E-1	-9.13193E0	-9.14285E0	6.19888E-3	9.41753E-2	2.73765E1	-3.2629E1	-3.26644E1	2.68511E1	1.19757E-7	2.52099E-3	2.52099E-3	6.34037E-3	2.9978E-1