[Scan]
initial_time=2016-01-15T22:48:05
final_time=2016-01-15T22:48:24
ip_count=19
run=1023
dataset=3
scan=220
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08775E-4
ql1_vset=
ql1_vmon=-8.1811E-1
ql1_imon=6.87623E-10
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=3.48818E-10
ql3_vset=
ql3_vmon=-9.13179E0
ql3_imon=4.19974E-10
ql4_vset=
ql4_vmon=-9.14309E0
ql4_imon=6.28281E-10
mult1=-9.45141E-9
mult2=-2.63677E-9
rf_tmon=-5.82823E-3
rf_agc=3.22401E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.98431E-3
ql5_imon=4.53365E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67208E0
bslens_imon=2.486E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20019E1
lens5a_imon=2.002E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12523E2
lens4a_imon=2.04923E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53754E1
cs_ef1b_imon=2.85845E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04657E2
lens23_imon=1.02302E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04629E1
cs_ea1_imon=2.52169E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3575E0
lens1_imon=2.76409E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65002E1
os_ef1alow_imon=2.96688E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03812E1
cs_ea2_imon=1.5275E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84458E1
cs_ef1a_imon=2.96132E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=4.87697E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11222E1
os_restr1_imon=2.85741E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15068E1
os_ea1_imon=1.91683E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6367E1
os_ef1bup_imon=3.08017E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24341E0
cs_ionrep_imon=1.20456E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91917E2
cs_nozzle_imon=1.93497E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02012E1
cs_anode1_imon=3.01206E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20446E0
olens4_imon=8.77666E-10
tplens_vset=1.4E-1
tplens_vmon=1.66982E0
tplens_imon=-3.61016E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26464E1
iondef3_imon=1.47918E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26134E1
iondef2_imon=1.5633E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.98033E-4
ql6_vset=1.0E-1
ql6_vmon=9.44614E-2
ql6_imon=4.83656E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27064E0
ionrepsh_imon=1.8042E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33657E1
lens5b_imon=2.17824E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74102E1
cs_ef2b_imon=3.12605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.12713E-1
os_ea2_imon=-6.42589E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00911E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71565E1
cs_ef2a_imon=3.15072E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64709E0
os_ef2alow_imon=-2.39734E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.56107E-1
os_ef2bup_imon=-5.46252E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11164E1
os_restr2_imon=2.85672E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.27425E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0178E1
cs_anode2_imon=2.23673E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73574E1
iondef1_imon=1.13538E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68532E1
iondef4_imon=1.0753E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.23837E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81331E-1
olens1_imon=3.24416E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13477E0
cs_ionaccel_imon=-1.58066E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47508E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56498E1
einzel_imon=7.60443E-6
window_vset=0.0E0
window_vmon=2.368E-1
window_imon=-6.80569E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39244E-4
mask2_vset=0.0E0
mask2_vmon=-1.86442E1
mask2_imon=-8.40431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.56473E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.75477E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=6.84516E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.247E0
defgridb_imon=5.85444E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33962E1
os_fil1_imon=5.10959E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.46118E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66946E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30812E1
cs_fil1_imon=9.96657E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62905E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67695E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.8669E-2
os_fil2_imon=-2.50122E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.04533E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.49243E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32149E-1
cs_fil2_imon=-2.33324E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33894E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22642E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.20363E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.62681E-1
res40_imon=-2.42167E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.18014E-1	-7.99203E-1	-9.1321E0	-9.14295E0	5.55515E-3	9.45807E-2	2.73473E1	-3.26536E1	-3.26505E1	2.68481E1	1.20142E-7	2.51287E-3	2.51287E-3	6.29157E-3	3.03637E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.1811E-1	-7.98583E-1	-9.13186E0	-9.14316E0	5.72205E-3	9.42469E-2	2.73002E1	-3.26664E1	-3.26621E1	2.68313E1	1.20191E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.0041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.18205E-1	-7.98988E-1	-9.13219E0	-9.1433E0	5.72205E-3	9.44614E-2	2.73063E1	-3.26683E1	-3.26434E1	2.6847E1	1.20244E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.00942E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.18181E-1	-7.98845E-1	-9.13186E0	-9.14307E0	5.67436E-3	9.43422E-2	2.72949E1	-3.26591E1	-3.26368E1	2.68635E1	1.20158E-7	2.52384E-3	2.52384E-3	6.32896E-3	2.98156E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.17966E-1	-7.98655E-1	-9.13177E0	-9.14314E0	5.81741E-3	9.43899E-2	2.73682E1	-3.26747E1	-3.26296E1	2.68376E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.97963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.18324E-1	-7.98655E-1	-9.13198E0	-9.14333E0	5.96046E-3	9.44614E-2	2.73478E1	-3.26627E1	-3.26308E1	2.6829E1	1.20209E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.9943E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.17943E-1	-7.99108E-1	-9.13217E0	-9.14295E0	5.65052E-3	9.41992E-2	2.73299E1	-3.2652E1	-3.26349E1	2.68268E1	1.19809E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.18396E-1	-7.9937E-1	-9.13208E0	-9.14335E0	5.65052E-3	9.43184E-2	2.73478E1	-3.26717E1	-3.26266E1	2.67776E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.18086E-1	-7.98655E-1	-9.13179E0	-9.1433E0	5.98431E-3	9.40323E-2	2.73112E1	-3.2648E1	-3.26285E1	2.67932E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.18324E-1	-7.99179E-1	-9.13179E0	-9.14302E0	5.81741E-3	9.43661E-2	2.73772E1	-3.26518E1	-3.25694E1	2.68171E1	1.20122E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.00563E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.18372E-1	-7.98583E-1	-9.13203E0	-9.14299E0	5.65052E-3	9.43422E-2	2.73171E1	-3.27059E1	-3.26194E1	2.68262E1	1.19512E-7	2.51709E-3	2.51709E-3	6.32622E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.18586E-1	-7.99131E-1	-9.13179E0	-9.14297E0	5.53131E-3	9.41515E-2	2.73694E1	-3.27104E1	-3.26437E1	2.68308E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.18276E-1	-7.98535E-1	-9.13184E0	-9.14304E0	5.60284E-3	9.42945E-2	2.73069E1	-3.27143E1	-3.26176E1	2.6855E1	1.19953E-7	2.51739E-3	2.51739E-3	6.26985E-3	3.0148E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.18276E-1	-7.98392E-1	-9.13174E0	-9.14319E0	5.67436E-3	9.4223E-2	2.73063E1	-3.2675E1	-3.25965E1	2.68454E1	1.19965E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9952E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.18086E-1	-7.98106E-1	-9.13148E0	-9.14326E0	5.79357E-3	9.42707E-2	2.73093E1	-3.26368E1	-3.26933E1	2.68256E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.99941E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.17943E-1	-7.98416E-1	-9.13146E0	-9.14319E0	6.00815E-3	9.44376E-2	2.73658E1	-3.27318E1	-3.25641E1	2.68412E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9952E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.17895E-1	-7.98535E-1	-9.13157E0	-9.14323E0	5.67436E-3	9.42469E-2	2.73081E1	-3.26591E1	-3.25954E1	2.68851E1	1.20297E-7	2.5147E-3	2.5147E-3	6.33538E-3	2.99613E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.18014E-1	-7.98559E-1	-9.1315E0	-9.14333E0	5.84126E-3	9.40323E-2	2.73352E1	-3.26666E1	-3.26075E1	2.68377E1	1.19653E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02133E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.18014E-1	-7.98655E-1	-9.13179E0	-9.14297E0	5.60284E-3	9.408E-2	2.73526E1	-3.26717E1	-3.2605E1	2.6813E1	1.20092E-7	2.51603E-3	2.51603E-3	6.32858E-3	3.02368E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.1811E-1	-7.98321E-1	-9.13179E0	-9.14309E0	5.98431E-3	9.44614E-2	2.73574E1	-3.26134E1	-3.26464E1	2.68532E1	1.20363E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.01995E-1