[Scan]
initial_time=2016-01-15T22:48:31
final_time=2016-01-15T22:48:51
ip_count=19
run=1023
dataset=3
scan=221
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09364E0
qbias_imon=-1.08747E-4
ql1_vset=
ql1_vmon=-8.18062E-1
ql1_imon=6.88469E-10
ql2_vset=
ql2_vmon=-7.98774E-1
ql2_imon=3.41749E-10
ql3_vset=
ql3_vmon=-9.13198E0
ql3_imon=4.54307E-10
ql4_vset=
ql4_vmon=-9.14328E0
ql4_imon=6.46579E-10
mult1=-6.658E-9
mult2=-2.8803E-9
rf_tmon=-9.53533E-3
rf_agc=2.59134E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=4.37629E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69158E0
bslens_imon=2.39814E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19872E1
lens5a_imon=1.99642E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12541E2
lens4a_imon=2.0515E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54085E1
cs_ef1b_imon=2.86269E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02146E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04734E1
cs_ea1_imon=2.54255E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35073E0
lens1_imon=2.80871E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64512E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03944E1
cs_ea2_imon=1.5455E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84148E1
cs_ef1a_imon=2.96828E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=4.79186E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11736E1
os_restr1_imon=2.83674E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15258E1
os_ea1_imon=1.88599E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.08109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24738E0
cs_ionrep_imon=1.22271E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9195E2
cs_nozzle_imon=1.93788E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01635E1
cs_anode1_imon=3.01153E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=8.1377E-10
tplens_vset=1.4E-1
tplens_vmon=1.63494E0
tplens_imon=-1.89165E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.24398E1
iondef3_imon=1.49843E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27233E1
iondef2_imon=1.55718E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03015E2
lens6_imon=2.98194E-4
ql6_vset=1.0E-1
ql6_vmon=9.44138E-2
ql6_imon=4.98271E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26685E0
ionrepsh_imon=1.79892E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33858E1
lens5b_imon=2.19711E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74045E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.50445E-1
os_ea2_imon=-6.4221E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00832E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71534E1
cs_ef2a_imon=3.14668E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60837E0
os_ef2alow_imon=-2.51499E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.54777E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.114E1
os_restr2_imon=2.86845E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.30955E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.26011E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74727E1
iondef1_imon=1.09352E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68178E1
iondef4_imon=1.10575E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=2.27133E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8114E-1
olens1_imon=2.95711E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16558E0
cs_ionaccel_imon=-1.96719E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47482E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.87164E-6
window_vset=0.0E0
window_vmon=2.4197E-1
window_imon=-8.67976E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.39066E-4
mask2_vset=0.0E0
mask2_vmon=-1.8629E1
mask2_imon=-5.32807E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.77804E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=7.04893E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=6.79409E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.63293E0
defgridb_imon=6.1216E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33977E1
os_fil1_imon=4.58401E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.43114E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66617E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30808E1
cs_fil1_imon=9.96522E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63483E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67918E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.8764E-2
os_fil2_imon=-2.49778E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.93839E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.62177E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.46775E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0281E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22724E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.65299E-1
res40_imon=-2.36723E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.18014E-1	-7.98535E-1	-9.13203E0	-9.14311E0	5.6982E-3	9.44138E-2	2.73342E1	-3.26398E1	-3.26447E1	2.68227E1	1.19601E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.00302E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.18181E-1	-7.98702E-1	-9.13198E0	-9.14309E0	5.84126E-3	9.46522E-2	2.72931E1	-3.26969E1	-3.26296E1	2.68406E1	1.20028E-7	2.51627E-3	2.51627E-3	6.32039E-3	3.00865E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.18372E-1	-7.98345E-1	-9.13188E0	-9.14311E0	5.84126E-3	9.4676E-2	2.73543E1	-3.26509E1	-3.26318E1	2.68364E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.18586E-1	-7.98535E-1	-9.13184E0	-9.14321E0	6.17504E-3	9.44614E-2	2.73204E1	-3.2648E1	-3.2667E1	2.68376E1	1.20158E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.17966E-1	-7.98869E-1	-9.13184E0	-9.14304E0	6.05583E-3	9.44853E-2	2.7334E1	-3.26921E1	-3.26065E1	2.68233E1	1.19757E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.1811E-1	-7.98845E-1	-9.13184E0	-9.14285E0	6.34193E-3	9.44376E-2	2.73234E1	-3.26968E1	-3.26113E1	2.6834E1	1.20311E-7	2.52169E-3	2.52169E-3	6.33436E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.18396E-1	-7.99131E-1	-9.13212E0	-9.14323E0	6.1512E-3	9.41753E-2	2.73375E1	-3.26645E1	-3.26182E1	2.68394E1	1.20174E-7	2.5188E-3	2.5188E-3	6.28006E-3	2.98222E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.17752E-1	-7.98345E-1	-9.13215E0	-9.14285E0	6.1512E-3	9.42469E-2	2.73712E1	-3.26494E1	-3.26248E1	2.68629E1	1.20192E-7	2.51972E-3	2.51972E-3	6.30197E-3	3.01025E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.178E-1	-7.98392E-1	-9.13193E0	-9.1429E0	6.10352E-3	9.43422E-2	2.73199E1	-3.26693E1	-3.26687E1	2.68655E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.17847E-1	-7.98917E-1	-9.13219E0	-9.14323E0	5.8651E-3	9.43422E-2	2.7362E1	-3.27123E1	-3.2577E1	2.68472E1	1.20293E-7	2.52342E-3	2.52342E-3	6.29684E-3	3.02875E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.17943E-1	-7.98702E-1	-9.132E0	-9.14304E0	5.93662E-3	9.43661E-2	2.73003E1	-3.26567E1	-3.26224E1	2.68737E1	1.20487E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.17657E-1	-7.98655E-1	-9.13188E0	-9.14314E0	5.74589E-3	9.4533E-2	2.73255E1	-3.2635E1	-3.26302E1	2.6846E1	1.20226E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.1799E-1	-7.98488E-1	-9.13177E0	-9.14278E0	5.76973E-3	9.42469E-2	2.73285E1	-3.26741E1	-3.26446E1	2.68881E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.17752E-1	-7.99036E-1	-9.13224E0	-9.14285E0	5.8651E-3	9.40323E-2	2.73423E1	-3.26567E1	-3.26555E1	2.67601E1	1.19819E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.02545E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.1799E-1	-7.98941E-1	-9.13219E0	-9.14302E0	5.91278E-3	9.4223E-2	2.73207E1	-3.26807E1	-3.26747E1	2.68184E1	1.19902E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.0148E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.17966E-1	-7.9844E-1	-9.13217E0	-9.1433E0	6.36578E-3	9.41515E-2	2.73293E1	-3.26514E1	-3.26537E1	2.68592E1	1.2026E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00453E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.1811E-1	-7.98655E-1	-9.13198E0	-9.14316E0	6.10352E-3	9.41992E-2	2.73231E1	-3.27239E1	-3.25665E1	2.68166E1	1.20174E-7	2.52428E-3	2.52428E-3	6.31837E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.18467E-1	-7.98678E-1	-9.13191E0	-9.1433E0	5.93662E-3	9.41515E-2	2.73281E1	-3.26596E1	-3.26455E1	2.68184E1	1.20036E-7	2.5143E-3	2.5143E-3	6.31012E-3	3.01544E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.18038E-1	-7.98655E-1	-9.13208E0	-9.14342E0	5.91278E-3	9.4533E-2	2.72937E1	-3.265E1	-3.2584E1	2.6807E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09364E0	-8.18062E-1	-7.98774E-1	-9.13198E0	-9.14328E0	5.8651E-3	9.44138E-2	2.74727E1	-3.27233E1	-3.24398E1	2.68178E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.0071E-1