[Scan]
initial_time=2016-01-15T22:48:58
final_time=2016-01-15T22:49:18
ip_count=19
run=1023
dataset=3
scan=222
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08777E-4
ql1_vset=
ql1_vmon=-8.18062E-1
ql1_imon=7.08544E-10
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=3.30079E-10
ql3_vset=
ql3_vmon=-9.13191E0
ql3_imon=4.61769E-10
ql4_vset=
ql4_vmon=-9.14283E0
ql4_imon=6.21474E-10
mult1=-1.06449E-8
mult2=-3.76528E-9
rf_tmon=-1.16414E-3
rf_agc=3.53165E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.10352E-3
ql5_imon=4.4024E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70519E0
bslens_imon=2.5702E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19911E1
lens5a_imon=2.0202E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12529E2
lens4a_imon=2.04981E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53852E1
cs_ef1b_imon=2.83934E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04655E2
lens23_imon=1.02251E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04616E1
cs_ea1_imon=2.5404E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36054E0
lens1_imon=2.73963E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64782E1
os_ef1alow_imon=2.99295E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03786E1
cs_ea2_imon=1.5494E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.95263E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=4.6562E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11488E1
os_restr1_imon=2.86089E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14993E1
os_ea1_imon=1.91205E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63815E1
os_ef1bup_imon=3.07531E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2557E0
cs_ionrep_imon=1.20656E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91951E2
cs_nozzle_imon=1.93571E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01589E1
cs_anode1_imon=3.01658E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=7.89106E-10
tplens_vset=1.4E-1
tplens_vmon=1.64984E0
tplens_imon=-2.34457E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25838E1
iondef3_imon=1.51623E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.28414E1
iondef2_imon=1.56454E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03014E2
lens6_imon=2.98079E-4
ql6_vset=1.0E-1
ql6_vmon=9.41753E-2
ql6_imon=4.78899E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28875E0
ionrepsh_imon=1.81075E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33796E1
lens5b_imon=2.18062E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7438E1
cs_ef2b_imon=3.12466E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.99452E-1
os_ea2_imon=-7.86015E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.0067E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71177E1
cs_ef2a_imon=3.1462E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62624E0
os_ef2alow_imon=-2.32784E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.74642E-1
os_ef2bup_imon=-5.25053E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10863E1
os_restr2_imon=2.85672E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.31298E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.2482E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74822E1
iondef1_imon=1.10599E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68296E1
iondef4_imon=1.12465E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.27318E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81259E-1
olens1_imon=3.3201E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15736E0
cs_ionaccel_imon=-1.78918E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47591E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56909E1
einzel_imon=7.85118E-6
window_vset=0.0E0
window_vmon=2.70973E-1
window_imon=-7.18797E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82689E2
mask1_imon=2.39188E-4
mask2_vset=0.0E0
mask2_vmon=-1.86124E1
mask2_imon=-5.90213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.35397E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93745E3
defgrida_imon=6.43831E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.50538E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.57901E0
defgridb_imon=5.9913E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33971E1
os_fil1_imon=5.7583E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.76816E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66988E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30787E1
cs_fil1_imon=9.9774E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62447E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68052E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.91204E-2
os_fil2_imon=-2.44909E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.17651E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.36147E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29902E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.12463E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22663E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32273E-3
inlet_lpb_pmon=2.98696E-1
chamber_ion_pmon=1.20113E-7
chamber_cvt_pmon=2.5165E-3
foreline_cvt_pmon=2.5165E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.7137E-1
res40_imon=-2.31741E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=218
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.18396E-1	-7.98726E-1	-9.13186E0	-9.14321E0	6.22272E-3	9.41277E-2	2.73538E1	-3.26633E1	-3.26885E1	2.68232E1	1.19953E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.03804E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.18467E-1	-7.98678E-1	-9.13193E0	-9.14307E0	6.19888E-3	9.43899E-2	2.73093E1	-3.26122E1	-3.26657E1	2.6837E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.03185E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.18133E-1	-7.98249E-1	-9.13203E0	-9.14299E0	5.88894E-3	9.41753E-2	2.73335E1	-3.26984E1	-3.26347E1	2.68268E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.02396E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.17943E-1	-7.98488E-1	-9.13184E0	-9.14276E0	5.84126E-3	9.408E-2	2.73261E1	-3.26861E1	-3.26392E1	2.68325E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.18372E-1	-7.98607E-1	-9.13179E0	-9.14295E0	5.91278E-3	9.41753E-2	2.73653E1	-3.2675E1	-3.26496E1	2.68328E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.17847E-1	-7.98917E-1	-9.13219E0	-9.14299E0	6.07967E-3	9.42707E-2	2.738E1	-3.26195E1	-3.26508E1	2.68556E1	1.2026E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.01738E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.17823E-1	-7.9906E-1	-9.13198E0	-9.14285E0	5.74589E-3	9.44853E-2	2.73201E1	-3.26476E1	-3.26308E1	2.68348E1	1.19809E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09619E0	-8.18062E-1	-7.99155E-1	-9.13188E0	-9.1429E0	5.91278E-3	9.44138E-2	2.73198E1	-3.26946E1	-3.26266E1	2.68319E1	1.19991E-7	2.5199E-3	2.5199E-3	6.31563E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.17776E-1	-7.98607E-1	-9.13222E0	-9.14304E0	5.74589E-3	9.44853E-2	2.7337E1	-3.26242E1	-3.26431E1	2.69013E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.17919E-1	-7.98774E-1	-9.13205E0	-9.14264E0	5.57899E-3	9.44138E-2	2.73257E1	-3.26738E1	-3.26638E1	2.69101E1	1.20166E-7	2.51214E-3	2.51214E-3	6.31012E-3	2.99861E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.18229E-1	-7.9875E-1	-9.13215E0	-9.14311E0	6.03199E-3	9.46522E-2	2.73892E1	-3.26536E1	-3.2617E1	2.68472E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.17609E-1	-7.98607E-1	-9.13198E0	-9.14299E0	5.6982E-3	9.43899E-2	2.73538E1	-3.26344E1	-3.26176E1	2.68196E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.18443E-1	-7.98965E-1	-9.13193E0	-9.14292E0	5.96046E-3	9.4223E-2	2.72907E1	-3.27041E1	-3.26699E1	2.68208E1	1.19851E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.00197E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09696E0	-8.18372E-1	-7.98583E-1	-9.1316E0	-9.14314E0	5.74589E-3	9.42469E-2	2.73261E1	-3.26549E1	-3.26242E1	2.66881E1	1.19861E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9926E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.18396E-1	-7.98774E-1	-9.13186E0	-9.14311E0	5.8651E-3	9.44614E-2	2.73399E1	-3.26726E1	-3.26396E1	2.68534E1	1.19861E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.18515E-1	-7.98726E-1	-9.13169E0	-9.14295E0	5.84126E-3	9.39608E-2	2.731E1	-3.2645E1	-3.26432E1	2.68007E1	1.20106E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.0071E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.18181E-1	-7.98845E-1	-9.13188E0	-9.14288E0	5.53131E-3	9.40323E-2	2.7275E1	-3.2662E1	-3.26408E1	2.68767E1	1.20297E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.02545E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.18229E-1	-7.98535E-1	-9.13179E0	-9.14307E0	5.79357E-3	9.43899E-2	2.7298E1	-3.26779E1	-3.26349E1	2.6854E1	1.19902E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.17919E-1	-7.98225E-1	-9.13162E0	-9.14288E0	5.76973E-3	9.43661E-2	2.72794E1	-3.26752E1	-3.25896E1	2.68445E1	1.20004E-7	2.51203E-3	2.51203E-3	6.33436E-3	2.98156E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.18062E-1	-7.98583E-1	-9.13191E0	-9.14283E0	6.10352E-3	9.41753E-2	2.74822E1	-3.28414E1	-3.25838E1	2.68296E1	1.20113E-7	2.5165E-3	2.5165E-3	6.32273E-3	2.98696E-1