[Scan]
initial_time=2016-01-15T22:49:25
final_time=2016-01-15T22:49:44
ip_count=19
run=1023
dataset=3
scan=223
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.0876E-4
ql1_vset=
ql1_vmon=-8.18229E-1
ql1_imon=6.67608E-10
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=3.4771E-10
ql3_vset=
ql3_vmon=-9.132E0
ql3_imon=4.56643E-10
ql4_vset=
ql4_vmon=-9.14288E0
ql4_imon=6.4131E-10
mult1=-9.8065E-9
mult2=-2.62024E-9
rf_tmon=-6.43155E-3
rf_agc=3.10389E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.17504E-3
ql5_imon=4.37927E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67635E0
bslens_imon=2.54496E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19418E1
lens5a_imon=2.01732E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.04909E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54247E1
cs_ef1b_imon=2.85872E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04681E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04874E1
cs_ea1_imon=2.53859E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33831E0
lens1_imon=2.58822E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.98234E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03937E1
cs_ea2_imon=1.53029E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84574E1
cs_ef1a_imon=2.93693E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=4.70197E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11232E1
os_restr1_imon=2.85872E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14753E1
os_ea1_imon=1.89259E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.08217E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2503E0
cs_ionrep_imon=1.20404E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91936E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=3.01297E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=7.92015E-10
tplens_vset=1.4E-1
tplens_vmon=1.64324E0
tplens_imon=-2.59691E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26474E1
iondef3_imon=1.51767E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25997E1
iondef2_imon=1.59446E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.98122E-4
ql6_vset=1.0E-1
ql6_vmon=9.43899E-2
ql6_imon=4.74489E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27072E0
ionrepsh_imon=1.79057E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34132E1
lens5b_imon=2.1471E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74105E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.1267E-1
os_ea2_imon=-5.08433E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00958E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71486E1
cs_ef2a_imon=3.15317E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59335E0
os_ef2alow_imon=-2.3456E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40361E-1
os_ef2bup_imon=-5.17111E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11292E1
os_restr2_imon=2.84791E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.29784E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02007E1
cs_anode2_imon=2.25758E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72935E1
iondef1_imon=1.1442E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68214E1
iondef4_imon=1.09819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.29303E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81212E-1
olens1_imon=3.36838E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13134E0
cs_ionaccel_imon=-1.68608E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56675E1
einzel_imon=7.96895E-6
window_vset=0.0E0
window_vmon=2.56386E-1
window_imon=-8.64372E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82672E2
mask1_imon=2.39127E-4
mask2_vset=0.0E0
mask2_vmon=-1.86116E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92761E3
multa_neg_imon=6.97545E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=5.96967E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50176E3
multb_neg_imon=7.73249E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.22412E0
defgridb_imon=6.38063E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33977E1
os_fil1_imon=4.9384E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.3891E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67115E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30833E1
cs_fil1_imon=9.96564E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62876E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68085E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.89915E-2
os_fil2_imon=-2.44372E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.29879E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.34342E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.1494E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34044E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22675E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.03286E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.18447E-1
res40_imon=-2.44651E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.17966E-1	-7.99084E-1	-9.13179E0	-9.14292E0	5.74589E-3	9.38416E-2	2.73446E1	-3.26773E1	-3.26413E1	2.68036E1	1.20226E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.02133E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.18086E-1	-7.98988E-1	-9.13188E0	-9.14285E0	5.98431E-3	9.40084E-2	2.72174E1	-3.26416E1	-3.26458E1	2.68163E1	1.19851E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.02511E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.178E-1	-7.98488E-1	-9.13196E0	-9.14297E0	5.76973E-3	9.41992E-2	2.73771E1	-3.26649E1	-3.26396E1	2.68574E1	1.19925E-7	2.51359E-3	2.51359E-3	6.29624E-3	3.01209E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.18014E-1	-7.99227E-1	-9.13208E0	-9.1433E0	5.43594E-3	9.43661E-2	2.74265E1	-3.27065E1	-3.26086E1	2.68484E1	1.19941E-7	2.51814E-3	2.51814E-3	6.32858E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.17919E-1	-7.99012E-1	-9.13212E0	-9.14335E0	5.48363E-3	9.40323E-2	2.73552E1	-3.2672E1	-3.26526E1	2.68135E1	1.19965E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.17823E-1	-7.99036E-1	-9.13229E0	-9.14311E0	5.29289E-3	9.41753E-2	2.73387E1	-3.2682E1	-3.26225E1	2.68094E1	1.19902E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.18086E-1	-7.99227E-1	-9.13208E0	-9.14333E0	5.60284E-3	9.45091E-2	2.73039E1	-3.2697E1	-3.26303E1	2.68226E1	1.202E-7	2.5199E-3	2.5199E-3	6.30466E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.17776E-1	-7.98678E-1	-9.1321E0	-9.14302E0	5.22137E-3	9.42469E-2	2.74243E1	-3.27115E1	-3.25717E1	2.68605E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.18086E-1	-7.98655E-1	-9.132E0	-9.14307E0	5.36442E-3	9.42707E-2	2.72985E1	-3.26272E1	-3.26074E1	2.6831E1	1.20106E-7	2.52061E-3	2.52061E-3	6.30202E-3	2.99941E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.17823E-1	-7.98559E-1	-9.13177E0	-9.1428E0	5.76973E-3	9.41992E-2	2.73511E1	-3.26449E1	-3.2672E1	2.68334E1	1.19861E-7	2.51225E-3	2.51225E-3	6.28006E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.18253E-1	-7.98845E-1	-9.13157E0	-9.14299E0	5.53131E-3	9.40323E-2	2.73009E1	-3.26609E1	-3.26909E1	2.68659E1	1.19861E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.02396E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.18396E-1	-7.98702E-1	-9.13208E0	-9.14319E0	5.88894E-3	9.43899E-2	2.72745E1	-3.26885E1	-3.26416E1	2.68383E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0965E0	-8.18133E-1	-7.99251E-1	-9.13212E0	-9.14302E0	5.60284E-3	9.43422E-2	2.73393E1	-3.26753E1	-3.26392E1	2.6807E1	1.2026E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.9943E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.17919E-1	-7.99012E-1	-9.13193E0	-9.14302E0	5.81741E-3	9.47714E-2	2.73163E1	-3.26836E1	-3.26221E1	2.67514E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01347E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.18133E-1	-7.98607E-1	-9.1315E0	-9.14319E0	5.34058E-3	9.43661E-2	2.7335E1	-3.26292E1	-3.26031E1	2.67814E1	1.20127E-7	2.51783E-3	2.51783E-3	6.30221E-3	3.02728E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.18133E-1	-7.98702E-1	-9.13177E0	-9.14302E0	5.76973E-3	9.408E-2	2.73119E1	-3.26949E1	-3.26471E1	2.68256E1	1.19991E-7	2.51611E-3	2.51611E-3	6.29603E-3	2.9944E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.18443E-1	-7.9844E-1	-9.13174E0	-9.14326E0	5.57899E-3	9.42707E-2	2.7365E1	-3.27082E1	-3.26025E1	2.67255E1	1.20028E-7	2.51679E-3	2.51679E-3	6.323E-3	2.99753E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.18157E-1	-7.99179E-1	-9.13165E0	-9.1434E0	6.31809E-3	9.42707E-2	2.73113E1	-3.26572E1	-3.26516E1	2.68232E1	1.20016E-7	2.51345E-3	2.51345E-3	6.33809E-3	3.00149E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0965E0	-8.17871E-1	-7.98917E-1	-9.13188E0	-9.14316E0	6.05583E-3	9.4223E-2	2.72622E1	-3.26747E1	-3.26579E1	2.68412E1	1.20154E-7	2.51838E-3	2.51838E-3	6.3131E-3	3.00251E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.18229E-1	-7.98655E-1	-9.132E0	-9.14288E0	6.17504E-3	9.43899E-2	2.72935E1	-3.25997E1	-3.26474E1	2.68214E1	1.20106E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.03286E-1