[Scan]
initial_time=2016-01-15T22:50:45
final_time=2016-01-15T22:51:04
ip_count=19
run=1023
dataset=3
scan=226
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-8.18229E-1
ql1_imon=6.63579E-10
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=3.31676E-10
ql3_vset=
ql3_vmon=-9.13203E0
ql3_imon=5.00548E-10
ql4_vset=
ql4_vmon=-9.14295E0
ql4_imon=6.49405E-10
mult1=-9.4262E-9
mult2=-2.84598E-9
rf_tmon=-3.68907E-3
rf_agc=3.36589E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.1512E-3
ql5_imon=4.06671E-10
bslens_vset=-6.2E0
bslens_vmon=-6.71872E0
bslens_imon=2.35921E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19305E1
lens5a_imon=2.01483E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.04976E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54313E1
cs_ef1b_imon=2.84647E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0466E2
lens23_imon=1.0222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04905E1
cs_ea1_imon=2.54008E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36312E0
lens1_imon=2.65652E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65221E1
os_ef1alow_imon=2.99027E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03855E1
cs_ea2_imon=1.55187E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=2.96108E-5
olens2_vset=9.7E-1
olens2_vmon=9.70769E-1
olens2_imon=4.5265E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=2.86161E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15188E1
os_ea1_imon=1.90263E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63719E1
os_ef1bup_imon=3.08649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24266E0
cs_ionrep_imon=1.18731E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91912E2
cs_nozzle_imon=1.93498E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02019E1
cs_anode1_imon=3.01369E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20439E0
olens4_imon=8.19385E-10
tplens_vset=1.4E-1
tplens_vmon=1.64261E0
tplens_imon=-2.63493E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26946E1
iondef3_imon=1.52816E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2667E1
iondef2_imon=1.55966E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03078E2
lens6_imon=2.9836E-4
ql6_vset=1.0E-1
ql6_vmon=9.42469E-2
ql6_imon=4.80032E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30224E0
ionrepsh_imon=1.80034E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33976E1
lens5b_imon=2.18507E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74321E1
cs_ef2b_imon=3.14992E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.87916E-1
os_ea2_imon=-6.35131E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7136E1
cs_ef2a_imon=3.16903E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6366E0
os_ef2alow_imon=-2.29875E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0343E-1
os_ef2bup_imon=-4.95487E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11099E1
os_restr2_imon=2.858E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23099E2
cs_ionfoca_imon=6.28371E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.24605E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7329E1
iondef1_imon=1.12042E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68462E1
iondef4_imon=1.10251E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.20146E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81212E-1
olens1_imon=2.47371E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0953E0
cs_ionaccel_imon=-1.74014E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47374E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56555E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=2.6059E-1
window_imon=-8.31936E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82689E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86752E1
mask2_imon=-5.68847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.37809E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.06851E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.63647E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30811E0
defgridb_imon=6.05789E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33993E1
os_fil1_imon=5.20269E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.86963E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67083E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30825E1
cs_fil1_imon=9.97435E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62486E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68188E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92705E-2
os_fil2_imon=-2.53382E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.29879E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.45978E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30429E-1
cs_fil2_imon=-2.57587E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0341E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22723E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.35059E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.8452E-1
res40_imon=-2.62311E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.17919E-1	-7.98893E-1	-9.13153E0	-9.14309E0	5.79357E-3	9.41277E-2	2.73496E1	-3.26633E1	-3.2641E1	2.6813E1	1.20209E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.00197E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.18324E-1	-7.98488E-1	-9.1316E0	-9.14314E0	5.76973E-3	9.41992E-2	2.73265E1	-3.26646E1	-3.26248E1	2.68322E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.18205E-1	-7.98273E-1	-9.13167E0	-9.1429E0	6.10352E-3	9.39131E-2	2.733E1	-3.26816E1	-3.26179E1	2.68134E1	1.20084E-7	2.51581E-3	2.51581E-3	6.33538E-3	3.04156E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.18157E-1	-7.99203E-1	-9.13172E0	-9.14316E0	5.79357E-3	9.43422E-2	2.73068E1	-3.26881E1	-3.26391E1	2.68771E1	1.20192E-7	2.52236E-3	2.52236E-3	6.3074E-3	2.98092E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.17752E-1	-7.98869E-1	-9.13157E0	-9.14321E0	6.29425E-3	9.43422E-2	2.73394E1	-3.26445E1	-3.26196E1	2.68275E1	1.20127E-7	2.52093E-3	2.52093E-3	6.31779E-3	2.98276E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09634E0	-8.1811E-1	-7.98965E-1	-9.13162E0	-9.14323E0	5.84126E-3	9.42945E-2	2.73544E1	-3.26765E1	-3.26026E1	2.6828E1	1.1995E-7	2.51642E-3	2.51642E-3	6.32483E-3	2.97887E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.1799E-1	-7.98869E-1	-9.13179E0	-9.14314E0	5.98431E-3	9.42469E-2	2.73369E1	-3.2653E1	-3.2623E1	2.68328E1	1.20017E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.18372E-1	-7.98583E-1	-9.13193E0	-9.14314E0	5.76973E-3	9.39608E-2	2.73287E1	-3.26431E1	-3.26496E1	2.68268E1	1.20069E-7	2.52538E-3	2.52538E-3	6.32936E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.17871E-1	-7.98535E-1	-9.13188E0	-9.14316E0	5.74589E-3	9.40323E-2	2.73388E1	-3.27105E1	-3.26327E1	2.68322E1	1.19902E-7	2.52061E-3	2.52061E-3	6.33977E-3	3.01995E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.17776E-1	-7.98512E-1	-9.13188E0	-9.14321E0	6.00815E-3	9.41038E-2	2.73466E1	-3.26993E1	-3.26008E1	2.6834E1	1.19978E-7	2.52473E-3	2.52473E-3	6.31299E-3	3.02277E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.17895E-1	-7.98368E-1	-9.13174E0	-9.14347E0	5.50747E-3	9.40561E-2	2.73273E1	-3.26302E1	-3.26657E1	2.68863E1	1.19705E-7	2.51007E-3	2.51007E-3	6.29645E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.178E-1	-7.98678E-1	-9.132E0	-9.14328E0	5.96046E-3	9.38177E-2	2.7346E1	-3.27065E1	-3.2635E1	2.68184E1	1.20278E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.17823E-1	-7.98321E-1	-9.13188E0	-9.14314E0	5.57899E-3	9.38654E-2	2.74638E1	-3.27133E1	-3.24602E1	2.6795E1	1.20174E-7	2.5199E-3	2.5199E-3	6.28552E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.1799E-1	-7.98845E-1	-9.13172E0	-9.14299E0	6.05583E-3	9.41753E-2	2.72871E1	-3.26603E1	-3.2623E1	2.68166E1	1.19902E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.0148E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.17823E-1	-7.9906E-1	-9.13208E0	-9.14323E0	5.79357E-3	9.42469E-2	2.73369E1	-3.26831E1	-3.2644E1	2.68004E1	1.19965E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.17895E-1	-7.98869E-1	-9.13205E0	-9.14297E0	6.12736E-3	9.44138E-2	2.73122E1	-3.26685E1	-3.26649E1	2.68123E1	1.20106E-7	2.52599E-3	2.52599E-3	6.31817E-3	2.98156E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.17823E-1	-7.98845E-1	-9.13224E0	-9.14307E0	6.00815E-3	9.42469E-2	2.73464E1	-3.2672E1	-3.26573E1	2.68148E1	1.19913E-7	2.51771E-3	2.51771E-3	6.29372E-3	2.9965E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.17728E-1	-7.98774E-1	-9.13179E0	-9.14309E0	5.98431E-3	9.41515E-2	2.73004E1	-3.27027E1	-3.26101E1	2.68383E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.17943E-1	-7.98845E-1	-9.13179E0	-9.14292E0	6.05583E-3	9.42707E-2	2.73452E1	-3.26726E1	-3.26101E1	2.68496E1	1.19891E-7	2.51709E-3	2.51709E-3	6.32328E-3	3.02621E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.18229E-1	-7.98488E-1	-9.13203E0	-9.14295E0	6.1512E-3	9.42469E-2	2.7329E1	-3.2667E1	-3.26946E1	2.68462E1	1.20158E-7	2.51847E-3	2.51847E-3	6.35059E-3	3.01995E-1