[Scan]
initial_time=2016-01-15T22:51:38
final_time=2016-01-15T22:51:57
ip_count=19
run=1023
dataset=3
scan=228
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08838E-4
ql1_vset=
ql1_vmon=-8.17871E-1
ql1_imon=6.90472E-10
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=3.36051E-10
ql3_vset=
ql3_vmon=-9.13186E0
ql3_imon=4.25065E-10
ql4_vset=
ql4_vmon=-9.14309E0
ql4_imon=6.58441E-10
mult1=-9.10224E-9
mult2=-2.76652E-9
rf_tmon=-4.80082E-3
rf_agc=3.26667E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.1512E-3
ql5_imon=4.57466E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70024E0
bslens_imon=2.32909E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19573E1
lens5a_imon=2.0082E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12544E2
lens4a_imon=2.05199E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=2.87762E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0466E2
lens23_imon=1.02205E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05096E1
cs_ea1_imon=2.5193E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33566E0
lens1_imon=2.57338E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65264E1
os_ef1alow_imon=3.00685E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03627E1
cs_ea2_imon=1.55512E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84615E1
cs_ef1a_imon=2.9508E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=4.20582E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11474E1
os_restr1_imon=2.85855E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14873E1
os_ea1_imon=1.86163E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63369E1
os_ef1bup_imon=3.07302E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21838E0
cs_ionrep_imon=1.20472E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.93622E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02354E1
cs_anode1_imon=2.99128E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20403E0
olens4_imon=7.82239E-10
tplens_vset=1.4E-1
tplens_vmon=1.59754E0
tplens_imon=-5.10766E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2614E1
iondef3_imon=1.51428E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26428E1
iondef2_imon=1.53947E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02901E2
lens6_imon=2.98476E-4
ql6_vset=1.0E-1
ql6_vmon=9.43899E-2
ql6_imon=4.62425E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30935E0
ionrepsh_imon=1.78567E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33792E1
lens5b_imon=2.17806E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74586E1
cs_ef2b_imon=3.11427E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.45044E-1
os_ea2_imon=-4.76413E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00951E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71323E1
cs_ef2a_imon=3.15125E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62737E0
os_ef2alow_imon=-2.3309E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3558E-1
os_ef2bup_imon=-4.9543E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11104E1
os_restr2_imon=2.8605E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.30005E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01835E1
cs_anode2_imon=2.26731E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73003E1
iondef1_imon=1.10815E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68328E1
iondef4_imon=1.08406E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.16722E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=3.73781E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13663E0
cs_ionaccel_imon=-1.90664E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0211E2
cs_ionfocb_imon=1.47456E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56159E1
einzel_imon=7.75012E-6
window_vset=0.0E0
window_vmon=2.95068E-1
window_imon=-8.0123E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82692E2
mask1_imon=2.39216E-4
mask2_vset=0.0E0
mask2_vmon=-1.86519E1
mask2_imon=-4.9374E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92673E3
multa_neg_imon=7.00493E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.43237E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50159E3
multb_neg_imon=7.4935E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47463E0
defgridb_imon=6.32932E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33996E1
os_fil1_imon=4.76901E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.68823E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67027E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30841E1
cs_fil1_imon=9.97081E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62657E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67994E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.79521E-2
os_fil2_imon=-2.56145E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.66449E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.27814E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33008E-1
cs_fil2_imon=-2.42522E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.12973E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22701E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.54845E-1
res40_imon=-2.45545E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=217
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09627E0	-8.17966E-1	-7.98965E-1	-9.13179E0	-9.14328E0	5.65052E-3	9.39608E-2	2.73234E1	-3.26773E1	-3.26455E1	2.6854E1	1.19775E-7	2.52407E-3	2.52407E-3	6.3074E-3	2.989E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.17871E-1	-7.98512E-1	-9.13188E0	-9.1429E0	5.38826E-3	9.39131E-2	2.72965E1	-3.26511E1	-3.2637E1	2.68169E1	1.20069E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09634E0	-8.17728E-1	-7.98845E-1	-9.13169E0	-9.1429E0	6.07967E-3	9.44138E-2	2.73393E1	-3.26503E1	-3.26023E1	2.68574E1	1.19925E-7	2.51693E-3	2.51693E-3	6.34099E-3	3.0041E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.17919E-1	-7.98702E-1	-9.13179E0	-9.14314E0	5.91278E-3	9.41515E-2	2.73424E1	-3.26658E1	-3.2626E1	2.68286E1	1.20142E-7	2.52025E-3	2.52025E-3	6.31798E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.17895E-1	-7.98965E-1	-9.13172E0	-9.1429E0	5.98431E-3	9.43184E-2	2.7288E1	-3.26933E1	-3.26467E1	2.68118E1	1.20069E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.17752E-1	-7.98726E-1	-9.1316E0	-9.14276E0	6.10352E-3	9.43184E-2	2.73535E1	-3.26443E1	-3.26054E1	2.6828E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99175E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.18181E-1	-7.98464E-1	-9.13157E0	-9.14268E0	5.76973E-3	9.43899E-2	2.73461E1	-3.26719E1	-3.26389E1	2.6819E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.18372E-1	-7.98631E-1	-9.13181E0	-9.1428E0	6.17504E-3	9.408E-2	2.73234E1	-3.26773E1	-3.25983E1	2.68118E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.178E-1	-7.98464E-1	-9.13186E0	-9.14292E0	5.91278E-3	9.408E-2	2.72937E1	-3.26128E1	-3.26458E1	2.6825E1	1.19913E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.18014E-1	-7.98392E-1	-9.13157E0	-9.14278E0	6.07967E-3	9.37462E-2	2.73369E1	-3.26554E1	-3.25936E1	2.68395E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01871E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.17513E-1	-7.98917E-1	-9.13177E0	-9.14288E0	5.72205E-3	9.408E-2	2.73169E1	-3.26679E1	-3.26266E1	2.6876E1	1.20017E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.17776E-1	-7.98726E-1	-9.13186E0	-9.14299E0	5.22137E-3	9.40084E-2	2.73273E1	-3.26639E1	-3.26008E1	2.68148E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00966E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.17919E-1	-7.98488E-1	-9.132E0	-9.14302E0	5.8651E-3	9.43422E-2	2.73291E1	-3.26837E1	-3.26356E1	2.68142E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.98481E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.17919E-1	-7.98821E-1	-9.132E0	-9.14304E0	5.81741E-3	9.47475E-2	2.7358E1	-3.26669E1	-3.26068E1	2.67674E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.17823E-1	-7.98535E-1	-9.13193E0	-9.14302E0	6.00815E-3	9.44614E-2	2.73183E1	-3.26398E1	-3.26921E1	2.67944E1	1.20106E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.99941E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.17966E-1	-7.98583E-1	-9.13208E0	-9.14299E0	6.1512E-3	9.43899E-2	2.73517E1	-3.26325E1	-3.26555E1	2.68478E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01085E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.18062E-1	-7.98607E-1	-9.132E0	-9.14326E0	6.17504E-3	9.44614E-2	2.73069E1	-3.2678E1	-3.26144E1	2.6828E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.17609E-1	-7.99012E-1	-9.13181E0	-9.14314E0	5.74589E-3	9.408E-2	2.73261E1	-3.26368E1	-3.26224E1	2.68292E1	1.20191E-7	2.51248E-3	2.51248E-3	6.30182E-3	3.00144E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.178E-1	-7.99155E-1	-9.13177E0	-9.14311E0	6.24657E-3	9.408E-2	2.73399E1	-3.26396E1	-3.26296E1	2.68169E1	1.20158E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.17871E-1	-7.98655E-1	-9.13186E0	-9.14309E0	6.1512E-3	9.43899E-2	2.73003E1	-3.26428E1	-3.2614E1	2.68328E1	1.20209E-7	2.51632E-3	2.51632E-3	6.33977E-3	3.00453E-1