[Scan]
initial_time=2016-01-15T22:52:05
final_time=2016-01-15T22:52:25
ip_count=19
run=1023
dataset=3
scan=229
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08789E-4
ql1_vset=
ql1_vmon=-8.18253E-1
ql1_imon=7.11346E-10
ql2_vset=
ql2_vmon=-7.98368E-1
ql2_imon=3.34978E-10
ql3_vset=
ql3_vmon=-9.132E0
ql3_imon=5.07164E-10
ql4_vset=
ql4_vmon=-9.14328E0
ql4_imon=5.85473E-10
mult1=-9.71215E-9
mult2=-2.87612E-9
rf_tmon=-5.45332E-3
rf_agc=3.22709E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.17504E-3
ql5_imon=4.58884E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67455E0
bslens_imon=2.2818E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19791E1
lens5a_imon=2.022E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.05125E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53598E1
cs_ef1b_imon=2.83378E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02168E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04622E1
cs_ea1_imon=2.53283E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37016E0
lens1_imon=2.59543E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.9926E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03732E1
cs_ea2_imon=1.53389E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84736E1
cs_ef1a_imon=2.9641E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=4.56047E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.111E1
os_restr1_imon=2.83864E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14843E1
os_ea1_imon=1.88934E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63404E1
os_ef1bup_imon=3.10415E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23167E0
cs_ionrep_imon=1.2145E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91946E2
cs_nozzle_imon=1.93579E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02267E1
cs_anode1_imon=3.00024E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=7.47263E-10
tplens_vset=1.4E-1
tplens_vmon=1.62401E0
tplens_imon=-2.84926E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26714E1
iondef3_imon=1.51118E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26472E1
iondef2_imon=1.57066E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02982E2
lens6_imon=2.98068E-4
ql6_vset=1.0E-1
ql6_vmon=9.4223E-2
ql6_imon=5.16796E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25931E0
ionrepsh_imon=1.80643E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33844E1
lens5b_imon=2.15791E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74472E1
cs_ef2b_imon=3.12223E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.43913E-1
os_ea2_imon=-2.09222E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00724E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71547E1
cs_ef2a_imon=3.17192E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63551E0
os_ef2alow_imon=-2.30699E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69429E-1
os_ef2bup_imon=-5.21577E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11413E1
os_restr2_imon=2.88382E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.33461E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02122E1
cs_anode2_imon=2.25689E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73806E1
iondef1_imon=1.10238E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68346E1
iondef4_imon=1.11005E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.30944E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81236E-1
olens1_imon=3.23403E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11914E0
cs_ionaccel_imon=-2.01159E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47556E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57077E1
einzel_imon=7.75734E-6
window_vset=0.0E0
window_vmon=3.01092E-1
window_imon=-7.5355E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82689E2
mask1_imon=2.39626E-4
mask2_vset=0.0E0
mask2_vmon=-1.86796E1
mask2_imon=-5.97163E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=6.56809E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93656E3
defgrida_imon=6.91777E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5027E3
multb_neg_imon=5.8507E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34743E0
defgridb_imon=6.33016E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33962E1
os_fil1_imon=4.2929E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.0036E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67271E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30785E1
cs_fil1_imon=9.97016E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62771E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68041E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.82176E-2
os_fil2_imon=-2.42592E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.45077E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.36018E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.4375E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.51849E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22603E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.52707E-3
foreline_cvt_pmon=2.52707E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.78899E-1
res40_imon=-2.07762E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.17895E-1	-7.98988E-1	-9.13198E0	-9.14288E0	6.19888E-3	9.41515E-2	2.74113E1	-3.26608E1	-3.26018E1	2.68076E1	1.20226E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00302E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.17728E-1	-7.99012E-1	-9.13191E0	-9.14278E0	5.8651E-3	9.39846E-2	2.73596E1	-3.26707E1	-3.26572E1	2.6777E1	1.20106E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.178E-1	-7.98607E-1	-9.13205E0	-9.1428E0	6.27041E-3	9.41992E-2	2.73509E1	-3.26666E1	-3.26214E1	2.68065E1	1.20031E-7	2.51693E-3	2.51693E-3	6.29624E-3	3.00144E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09627E0	-8.18205E-1	-7.98559E-1	-9.13181E0	-9.14302E0	5.84126E-3	9.41515E-2	2.73228E1	-3.26352E1	-3.26113E1	2.68492E1	1.20092E-7	2.52236E-3	2.52236E-3	6.31798E-3	2.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-8.18324E-1	-7.98225E-1	-9.132E0	-9.14338E0	5.98431E-3	9.43184E-2	2.73169E1	-3.26296E1	-3.26248E1	2.68322E1	1.20244E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.02277E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.18062E-1	-7.98726E-1	-9.13215E0	-9.14319E0	6.10352E-3	9.38654E-2	2.73429E1	-3.26615E1	-3.26338E1	2.68659E1	1.20004E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.0148E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.18038E-1	-7.98345E-1	-9.13198E0	-9.14338E0	6.10352E-3	9.39131E-2	2.73448E1	-3.26591E1	-3.26458E1	2.68534E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.97963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.17823E-1	-7.98821E-1	-9.13208E0	-9.14323E0	5.57899E-3	9.41515E-2	2.73204E1	-3.26938E1	-3.2616E1	2.68689E1	1.19953E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.9841E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.17919E-1	-7.98845E-1	-9.13179E0	-9.14319E0	5.79357E-3	9.41753E-2	2.73321E1	-3.26831E1	-3.26356E1	2.6846E1	1.20069E-7	2.52428E-3	2.52428E-3	6.30192E-3	2.97963E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.17752E-1	-7.98631E-1	-9.13198E0	-9.14321E0	6.07967E-3	9.42469E-2	2.73308E1	-3.2678E1	-3.26181E1	2.68172E1	1.20017E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.17943E-1	-7.9844E-1	-9.13157E0	-9.14297E0	6.07967E-3	9.408E-2	2.73682E1	-3.26885E1	-3.26408E1	2.68112E1	1.19965E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.18181E-1	-7.98392E-1	-9.13181E0	-9.14311E0	6.07967E-3	9.39608E-2	2.73365E1	-3.2669E1	-3.2641E1	2.6845E1	1.20017E-7	2.5199E-3	2.5199E-3	6.28006E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.17966E-1	-7.98225E-1	-9.132E0	-9.14323E0	6.1512E-3	9.41277E-2	2.73341E1	-3.26818E1	-3.26243E1	2.68893E1	1.19969E-7	2.51886E-3	2.51886E-3	6.32612E-3	3.00642E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.17966E-1	-7.98297E-1	-9.132E0	-9.14297E0	5.98431E-3	9.43661E-2	2.73287E1	-3.26651E1	-3.26275E1	2.69011E1	1.20113E-7	2.52305E-3	2.52305E-3	6.33112E-3	3.00949E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.17752E-1	-7.98225E-1	-9.13193E0	-9.14307E0	5.57899E-3	9.42945E-2	2.73345E1	-3.26695E1	-3.25985E1	2.68538E1	1.20055E-7	2.52169E-3	2.52169E-3	6.34112E-3	3.00005E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.18276E-1	-7.98512E-1	-9.13203E0	-9.14326E0	6.05583E-3	9.41515E-2	2.73273E1	-3.27179E1	-3.2623E1	2.68358E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.18205E-1	-7.98368E-1	-9.13148E0	-9.14285E0	5.98431E-3	9.45091E-2	2.73653E1	-3.26632E1	-3.26272E1	2.68274E1	1.20069E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.18038E-1	-7.98225E-1	-9.13203E0	-9.14311E0	5.84126E-3	9.43661E-2	2.73741E1	-3.2682E1	-3.26431E1	2.68707E1	1.20122E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.17704E-1	-7.9844E-1	-9.13188E0	-9.14323E0	5.96046E-3	9.41992E-2	2.73311E1	-3.26874E1	-3.25729E1	2.6836E1	1.19851E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.18253E-1	-7.98368E-1	-9.132E0	-9.14328E0	6.17504E-3	9.4223E-2	2.73806E1	-3.26472E1	-3.26714E1	2.68346E1	1.20004E-7	2.52707E-3	2.52707E-3	6.3074E-3	3.00453E-1