[Scan]
initial_time=2016-01-15T22:52:59
final_time=2016-01-15T22:53:18
ip_count=19
run=1023
dataset=3
scan=231
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.088E-4
ql1_vset=
ql1_vmon=-8.17895E-1
ql1_imon=6.90627E-10
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=3.36432E-10
ql3_vset=
ql3_vmon=-9.13174E0
ql3_imon=4.44961E-10
ql4_vset=
ql4_vmon=-9.14323E0
ql4_imon=6.40893E-10
mult1=-8.59199E-9
mult2=-2.78904E-9
rf_tmon=-4.39305E-3
rf_agc=3.35243E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.84126E-3
ql5_imon=4.05836E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70043E0
bslens_imon=2.35921E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19612E1
lens5a_imon=2.00209E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12566E2
lens4a_imon=2.04913E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=2.84179E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02174E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04734E1
cs_ea1_imon=2.53831E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36312E0
lens1_imon=2.86181E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64801E1
os_ef1alow_imon=2.98811E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04062E1
cs_ea2_imon=1.50586E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8425E1
cs_ef1a_imon=2.94378E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=4.14932E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11796E1
os_restr1_imon=2.8735E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15028E1
os_ea1_imon=1.90298E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63978E1
os_ef1bup_imon=3.08253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26626E0
cs_ionrep_imon=1.22483E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91928E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01707E1
cs_anode1_imon=2.99351E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20432E0
olens4_imon=7.35712E-10
tplens_vset=1.4E-1
tplens_vmon=1.59778E0
tplens_imon=-4.44003E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26474E1
iondef3_imon=1.50515E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26866E1
iondef2_imon=1.56391E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03057E2
lens6_imon=2.9824E-4
ql6_vset=1.0E-1
ql6_vmon=9.43899E-2
ql6_imon=4.71914E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32879E0
ionrepsh_imon=1.79892E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34012E1
lens5b_imon=2.20065E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74489E1
cs_ef2b_imon=3.13443E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.83197E-1
os_ea2_imon=-8.2272E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00502E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7115E1
cs_ef2a_imon=3.14632E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62879E0
os_ef2alow_imon=-2.33839E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14843E-1
os_ef2bup_imon=-5.21075E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11514E1
os_restr2_imon=2.85908E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.30459E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01617E1
cs_anode2_imon=2.22731E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73394E1
iondef1_imon=1.11157E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68226E1
iondef4_imon=1.12197E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.13652E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=2.76387E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1842E0
cs_ionaccel_imon=-1.88069E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47302E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56597E1
einzel_imon=7.89687E-6
window_vset=0.0E0
window_vmon=2.78009E-1
window_imon=-8.21124E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39102E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-3.05757E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.17988E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.47908E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50175E3
multb_neg_imon=7.40641E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3967E0
defgridb_imon=6.01542E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33988E1
os_fil1_imon=5.98355E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.94771E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67396E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.308E1
cs_fil1_imon=9.96576E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62546E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6854E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.67379E-2
os_fil2_imon=-2.46174E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.578E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.26742E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32112E-1
cs_fil2_imon=-2.84617E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.09416E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22631E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.06144E-1
res40_imon=-2.53661E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.18086E-1	-7.98392E-1	-9.13184E0	-9.14314E0	6.31809E-3	9.4223E-2	2.73375E1	-3.26242E1	-3.26644E1	2.6869E1	1.20055E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00453E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.17919E-1	-7.98702E-1	-9.13186E0	-9.14319E0	6.03199E-3	9.4223E-2	2.73033E1	-3.27087E1	-3.26309E1	2.68007E1	1.19965E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.17776E-1	-7.98702E-1	-9.13172E0	-9.14311E0	5.6982E-3	9.41277E-2	2.73497E1	-3.26834E1	-3.26098E1	2.68331E1	1.19861E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.03185E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.18181E-1	-7.98416E-1	-9.13157E0	-9.14328E0	6.07967E-3	9.43422E-2	2.73259E1	-3.27276E1	-3.25991E1	2.68419E1	1.19941E-7	2.51603E-3	2.51603E-3	6.31269E-3	3.01356E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.17823E-1	-7.9906E-1	-9.13196E0	-9.14338E0	5.88894E-3	9.41992E-2	2.73102E1	-3.26397E1	-3.25771E1	2.68344E1	1.19667E-7	2.52066E-3	2.52066E-3	6.3245E-3	3.01065E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.1811E-1	-7.98869E-1	-9.132E0	-9.14316E0	6.17504E-3	9.43184E-2	2.73843E1	-3.26703E1	-3.26329E1	2.68494E1	1.19979E-7	2.5199E-3	2.5199E-3	6.323E-3	3.01237E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.18396E-1	-7.9844E-1	-9.13162E0	-9.14321E0	6.07967E-3	9.42945E-2	2.72672E1	-3.26254E1	-3.26392E1	2.68082E1	1.20084E-7	2.51693E-3	2.51693E-3	6.34099E-3	2.99879E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.18157E-1	-7.98464E-1	-9.13174E0	-9.14335E0	6.07967E-3	9.43422E-2	2.72925E1	-3.26266E1	-3.26194E1	2.68947E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.1768E-1	-7.98631E-1	-9.13167E0	-9.14338E0	5.76973E-3	9.42469E-2	2.73228E1	-3.2695E1	-3.26207E1	2.68298E1	1.20069E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.17895E-1	-7.98845E-1	-9.13222E0	-9.14299E0	6.10352E-3	9.44614E-2	2.73516E1	-3.26701E1	-3.26468E1	2.68352E1	1.20103E-7	2.51567E-3	2.51567E-3	6.33234E-3	2.9996E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.17442E-1	-7.98273E-1	-9.13219E0	-9.14328E0	5.96046E-3	9.46283E-2	2.74543E1	-3.26868E1	-3.25487E1	2.68214E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.17561E-1	-7.98631E-1	-9.13191E0	-9.14328E0	5.93662E-3	9.43422E-2	2.73069E1	-3.26386E1	-3.26482E1	2.68526E1	1.20106E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99941E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.18086E-1	-7.98512E-1	-9.13193E0	-9.14323E0	5.98431E-3	9.41277E-2	2.73399E1	-3.26554E1	-3.26392E1	2.68262E1	1.20122E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.1768E-1	-7.98464E-1	-9.132E0	-9.14333E0	5.96046E-3	9.40323E-2	2.7349E1	-3.27089E1	-3.26002E1	2.68322E1	1.20383E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.18014E-1	-7.98368E-1	-9.13186E0	-9.14345E0	6.17504E-3	9.44614E-2	2.73213E1	-3.2629E1	-3.26939E1	2.68425E1	1.198E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99686E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.17943E-1	-7.98941E-1	-9.13208E0	-9.14323E0	6.24657E-3	9.43899E-2	2.73502E1	-3.26807E1	-3.26561E1	2.68172E1	1.19978E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.01209E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.1811E-1	-7.98798E-1	-9.13162E0	-9.14333E0	6.07967E-3	9.42469E-2	2.73177E1	-3.26795E1	-3.26951E1	2.68499E1	1.20069E-7	2.52538E-3	2.52538E-3	6.33486E-3	3.02922E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.17895E-1	-7.98106E-1	-9.13179E0	-9.14326E0	6.19888E-3	9.408E-2	2.72993E1	-3.27007E1	-3.26086E1	2.68172E1	1.19902E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.03286E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.17943E-1	-7.98392E-1	-9.13169E0	-9.14299E0	6.34193E-3	9.42707E-2	2.73287E1	-3.26962E1	-3.26307E1	2.68273E1	1.2026E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.17895E-1	-7.98082E-1	-9.13174E0	-9.14323E0	5.84126E-3	9.43899E-2	2.73394E1	-3.26866E1	-3.26474E1	2.68226E1	1.2026E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.01995E-1