[Scan]
initial_time=2016-01-15T22:53:26
final_time=2016-01-15T22:53:45
ip_count=19
run=1023
dataset=3
scan=232
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09634E0
qbias_imon=-1.08839E-4
ql1_vset=
ql1_vmon=-8.18062E-1
ql1_imon=7.01618E-10
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=3.21996E-10
ql3_vset=
ql3_vmon=-9.13203E0
ql3_imon=3.96347E-10
ql4_vset=
ql4_vmon=-9.14316E0
ql4_imon=6.17945E-10
mult1=-9.94508E-9
mult2=-2.71861E-9
rf_tmon=-6.48914E-3
rf_agc=3.17895E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.24657E-3
ql5_imon=4.45139E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66013E0
bslens_imon=2.44402E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19695E1
lens5a_imon=1.99641E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.05187E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52295E1
cs_ef1b_imon=2.787E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.01883E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04591E1
cs_ea1_imon=2.52309E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37797E0
lens1_imon=2.91627E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64326E1
os_ef1alow_imon=3.04253E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03738E1
cs_ea2_imon=1.54651E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85842E1
cs_ef1a_imon=3.01333E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=4.68135E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10547E1
os_restr1_imon=2.74232E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=1.87096E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.62638E1
os_ef1bup_imon=3.08505E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26712E0
cs_ionrep_imon=1.19972E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93582E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.03004E1
cs_anode1_imon=3.08397E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=7.882E-10
tplens_vset=1.4E-1
tplens_vmon=1.64384E0
tplens_imon=-5.84137E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26573E1
iondef3_imon=1.48739E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27017E1
iondef2_imon=1.57175E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0299E2
lens6_imon=2.98263E-4
ql6_vset=1.0E-1
ql6_vmon=9.42945E-2
ql6_imon=4.7431E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31879E0
ionrepsh_imon=1.80174E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3367E1
lens5b_imon=2.17017E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7539E1
cs_ef2b_imon=3.08037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.22884E-1
os_ea2_imon=-6.16582E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00691E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.69828E1
cs_ef2a_imon=3.10343E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62218E0
os_ef2alow_imon=-1.4374E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.73087E-1
os_ef2bup_imon=-4.43951E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11472E1
os_restr2_imon=2.87602E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.28486E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01689E1
cs_anode2_imon=2.32209E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73093E1
iondef1_imon=1.13086E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68034E1
iondef4_imon=1.00268E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.29732E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=2.70772E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12053E0
cs_ionaccel_imon=-1.11305E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02252E2
cs_ionfocb_imon=1.47951E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56099E1
einzel_imon=6.71116E-6
window_vset=0.0E0
window_vmon=3.69911E-1
window_imon=-8.67976E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82843E2
mask1_imon=2.40302E-4
mask2_vset=0.0E0
mask2_vmon=-1.87053E1
mask2_imon=-1.39055E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.63876E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.62577E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.18814E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43465E0
defgridb_imon=6.10305E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.34023E1
os_fil1_imon=3.72507E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.99266E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67509E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3084E1
cs_fil1_imon=9.97585E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63033E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68494E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.83466E-2
os_fil2_imon=-1.76498E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.41853E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.15652E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33666E-1
cs_fil2_imon=-3.21858E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.86051E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22785E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.36349E-3
inlet_lpb_pmon=3.01209E-1
chamber_ion_pmon=1.20403E-7
chamber_cvt_pmon=2.5225E-3
foreline_cvt_pmon=2.5225E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.34375E-1
res40_imon=-1.75095E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09627E0	-8.17776E-1	-7.98273E-1	-9.1316E0	-9.14316E0	5.91278E-3	9.46283E-2	2.73658E1	-3.26506E1	-3.26308E1	2.67031E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.03185E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09627E0	-8.1799E-1	-7.98726E-1	-9.13143E0	-9.14333E0	6.19888E-3	9.43422E-2	2.731E1	-3.26548E1	-3.26119E1	2.68268E1	1.20106E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.03804E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.17704E-1	-7.98345E-1	-9.13141E0	-9.14304E0	6.03199E-3	9.42707E-2	2.7359E1	-3.26776E1	-3.26335E1	2.6837E1	1.19883E-7	2.51952E-3	2.51952E-3	6.28468E-3	3.0352E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.18157E-1	-7.98535E-1	-9.13153E0	-9.14323E0	5.79357E-3	9.4223E-2	2.73546E1	-3.26626E1	-3.26207E1	2.68557E1	1.19891E-7	2.51182E-3	2.51182E-3	6.29684E-3	3.02115E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.18324E-1	-7.98345E-1	-9.13167E0	-9.14326E0	5.84126E-3	9.47714E-2	2.73309E1	-3.26741E1	-3.26573E1	2.68563E1	1.20311E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.17919E-1	-7.9844E-1	-9.13153E0	-9.14314E0	6.03199E-3	9.45091E-2	2.73353E1	-3.26674E1	-3.26445E1	2.68048E1	1.19861E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09642E0	-8.17704E-1	-7.9813E-1	-9.1315E0	-9.14326E0	6.10352E-3	9.41753E-2	2.73211E1	-3.26662E1	-3.26086E1	2.68564E1	1.20003E-7	2.51823E-3	2.51823E-3	6.35776E-3	3.01489E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.18467E-1	-7.98297E-1	-9.13177E0	-9.1433E0	6.1512E-3	9.43899E-2	2.73146E1	-3.2622E1	-3.26253E1	2.68251E1	1.1997E-7	2.51453E-3	2.51453E-3	6.28056E-3	3.00112E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09627E0	-8.1811E-1	-7.99036E-1	-9.13146E0	-9.14326E0	5.76973E-3	9.46045E-2	2.73031E1	-3.26868E1	-3.26024E1	2.68582E1	1.19862E-7	2.51227E-3	2.51227E-3	6.31949E-3	2.99451E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09657E0	-8.17943E-1	-7.98726E-1	-9.13196E0	-9.14316E0	5.6982E-3	9.42469E-2	2.72803E1	-3.26779E1	-3.26231E1	2.68587E1	1.20167E-7	2.52113E-3	2.52113E-3	6.41936E-3	3.0102E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.17871E-1	-7.98893E-1	-9.1316E0	-9.14299E0	5.8651E-3	9.39608E-2	2.73228E1	-3.27105E1	-3.27001E1	2.68124E1	1.20209E-7	2.52169E-3	2.52169E-3	6.35601E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09634E0	-8.18157E-1	-7.98774E-1	-9.13148E0	-9.14326E0	5.88894E-3	9.41515E-2	2.73369E1	-3.26476E1	-3.26717E1	2.68731E1	1.19713E-7	2.51581E-3	2.51581E-3	6.27399E-3	3.01742E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.18157E-1	-7.99012E-1	-9.13153E0	-9.14316E0	6.03199E-3	9.41515E-2	2.73297E1	-3.26813E1	-3.26188E1	2.68508E1	1.19809E-7	2.51552E-3	2.51552E-3	6.27461E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.18038E-1	-7.99251E-1	-9.13148E0	-9.14319E0	5.93662E-3	9.40561E-2	2.73311E1	-3.26685E1	-3.26349E1	2.68454E1	1.20069E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00824E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.18086E-1	-7.9875E-1	-9.13155E0	-9.14307E0	5.62668E-3	9.41992E-2	2.73794E1	-3.27009E1	-3.26402E1	2.68312E1	1.19851E-7	2.51525E-3	2.51525E-3	6.41047E-3	2.99175E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.18014E-1	-7.9875E-1	-9.13186E0	-9.1434E0	5.6982E-3	9.41515E-2	2.73285E1	-3.26873E1	-3.2617E1	2.68412E1	1.19757E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.02659E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.17823E-1	-7.98678E-1	-9.13174E0	-9.14307E0	6.07967E-3	9.40323E-2	2.73257E1	-3.26537E1	-3.26638E1	2.68394E1	1.20055E-7	2.51739E-3	2.51739E-3	6.29128E-3	2.99686E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.18157E-1	-7.98321E-1	-9.13191E0	-9.14295E0	5.93662E-3	9.41515E-2	2.73462E1	-3.267E1	-3.26115E1	2.68377E1	1.20226E-7	2.52209E-3	2.52209E-3	6.26371E-3	2.9874E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.18157E-1	-7.98702E-1	-9.13191E0	-9.14326E0	6.03199E-3	9.43422E-2	2.73194E1	-3.26709E1	-3.26803E1	2.68438E1	1.19991E-7	2.51814E-3	2.51814E-3	6.36047E-3	3.00097E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09634E0	-8.18062E-1	-7.98512E-1	-9.13203E0	-9.14316E0	6.24657E-3	9.42945E-2	2.73093E1	-3.27017E1	-3.26573E1	2.68034E1	1.20403E-7	2.5225E-3	2.5225E-3	6.36349E-3	3.01209E-1