[Scan]
initial_time=2016-01-15T22:53:52
final_time=2016-01-15T22:54:12
ip_count=19
run=1023
dataset=3
scan=233
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.0881E-4
ql1_vset=
ql1_vmon=-8.17895E-1
ql1_imon=6.61802E-10
ql2_vset=
ql2_vmon=-7.98774E-1
ql2_imon=3.22557E-10
ql3_vset=
ql3_vmon=-9.13191E0
ql3_imon=4.52459E-10
ql4_vset=
ql4_vmon=-9.14352E0
ql4_imon=6.32572E-10
mult1=-9.35259E-9
mult2=-2.7809E-9
rf_tmon=-3.70743E-3
rf_agc=3.4516E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.05583E-3
ql5_imon=4.34756E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63616E0
bslens_imon=2.32609E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19509E1
lens5a_imon=2.01382E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12559E2
lens4a_imon=2.05034E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54345E1
cs_ef1b_imon=2.86506E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02118E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04832E1
cs_ea1_imon=2.52099E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35286E0
lens1_imon=2.86838E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64301E1
os_ef1alow_imon=2.97835E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03812E1
cs_ea2_imon=1.52715E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84574E1
cs_ef1a_imon=2.93734E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=4.35138E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.115E1
os_restr1_imon=2.87166E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14662E1
os_ea1_imon=1.89145E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.076E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20227E0
cs_ionrep_imon=1.19795E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91962E2
cs_nozzle_imon=1.93601E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02047E1
cs_anode1_imon=3.01554E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20439E0
olens4_imon=7.89046E-10
tplens_vset=1.4E-1
tplens_vmon=1.66577E0
tplens_imon=-1.90682E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26027E1
iondef3_imon=1.50177E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.56504E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98252E-4
ql6_vset=1.0E-1
ql6_vmon=9.41277E-2
ql6_imon=4.63951E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30482E0
ionrepsh_imon=1.80629E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33959E1
lens5b_imon=2.17789E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.742E1
cs_ef2b_imon=3.15107E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.08657E-1
os_ea2_imon=-5.20922E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00678E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71426E1
cs_ef2a_imon=3.14412E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61118E0
os_ef2alow_imon=-2.31394E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.72325E-1
os_ef2bup_imon=-5.26443E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11257E1
os_restr2_imon=2.84942E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.29303E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01624E1
cs_anode2_imon=2.26002E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7351E1
iondef1_imon=1.10966E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68294E1
iondef4_imon=1.10936E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.22065E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=3.48711E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09655E0
cs_ionaccel_imon=-1.76832E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02137E2
cs_ionfocb_imon=1.47344E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56556E1
einzel_imon=7.99714E-6
window_vset=0.0E0
window_vmon=2.61706E-1
window_imon=-9.48164E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82692E2
mask1_imon=2.38959E-4
mask2_vset=0.0E0
mask2_vmon=-1.86002E1
mask2_imon=-4.85955E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=7.47783E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.52882E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50075E3
multb_neg_imon=7.78721E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50801E0
defgridb_imon=6.20901E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33975E1
os_fil1_imon=4.69835E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.49014E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67417E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30836E1
cs_fil1_imon=9.96634E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62934E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68316E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.70522E-2
os_fil2_imon=-2.50122E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.29236E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.14814E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31275E-1
cs_fil2_imon=-2.70973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35632E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22816E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40053E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.10756E-1
res40_imon=-2.49813E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.17871E-1	-7.9844E-1	-9.13181E0	-9.14299E0	5.79357E-3	9.43899E-2	2.73517E1	-3.26384E1	-3.26408E1	2.68169E1	1.20311E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.01223E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.17704E-1	-7.98917E-1	-9.1315E0	-9.14342E0	6.05583E-3	9.41753E-2	2.73526E1	-3.26961E1	-3.26695E1	2.68511E1	1.20192E-7	2.52236E-3	2.52236E-3	6.24954E-3	2.99343E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.17275E-1	-7.98798E-1	-9.13162E0	-9.14373E0	6.69956E-3	9.41753E-2	2.73816E1	-3.26499E1	-3.26627E1	2.6855E1	1.19841E-7	2.52342E-3	2.52342E-3	6.2863E-3	2.98592E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.17323E-1	-7.98702E-1	-9.1316E0	-9.14319E0	6.10352E-3	9.41753E-2	2.73247E1	-3.26774E1	-3.26407E1	2.68647E1	1.19829E-7	2.51045E-3	2.51045E-3	6.29603E-3	2.9917E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.17537E-1	-7.98726E-1	-9.13167E0	-9.14299E0	6.05583E-3	9.39369E-2	2.73369E1	-3.26843E1	-3.2593E1	2.6849E1	1.20174E-7	2.51225E-3	2.51225E-3	6.36244E-3	3.02659E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.17895E-1	-7.98726E-1	-9.13174E0	-9.14295E0	5.91278E-3	9.42469E-2	2.73434E1	-3.27074E1	-3.26266E1	2.68184E1	1.20278E-7	2.51443E-3	2.51443E-3	6.3514E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.17776E-1	-7.98702E-1	-9.13181E0	-9.14283E0	6.07967E-3	9.4223E-2	2.73424E1	-3.26302E1	-3.26801E1	2.67866E1	1.19902E-7	2.5131E-3	2.5131E-3	6.35059E-3	2.9892E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.17776E-1	-7.98607E-1	-9.13196E0	-9.14311E0	5.98431E-3	9.42945E-2	2.73315E1	-3.26669E1	-3.26741E1	2.68569E1	1.19819E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.98819E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.17394E-1	-7.98607E-1	-9.1315E0	-9.1433E0	5.79357E-3	9.4223E-2	2.73856E1	-3.26549E1	-3.26693E1	2.68587E1	1.20158E-7	2.51847E-3	2.51847E-3	6.24849E-3	2.98156E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.17633E-1	-7.98607E-1	-9.13162E0	-9.1434E0	6.17504E-3	9.408E-2	2.73874E1	-3.26915E1	-3.26543E1	2.68268E1	1.20084E-7	2.5147E-3	2.5147E-3	6.26844E-3	3.00144E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.17657E-1	-7.98726E-1	-9.13148E0	-9.14297E0	6.07967E-3	9.42945E-2	2.7412E1	-3.27528E1	-3.26711E1	2.68442E1	1.19851E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99941E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.17704E-1	-7.98631E-1	-9.13167E0	-9.14302E0	5.88894E-3	9.41753E-2	2.73496E1	-3.26765E1	-3.26543E1	2.68256E1	1.20487E-7	2.5188E-3	2.5188E-3	6.37905E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.17919E-1	-7.98821E-1	-9.13165E0	-9.14299E0	5.91278E-3	9.44614E-2	2.73505E1	-3.26585E1	-3.26413E1	2.68653E1	1.19965E-7	2.52318E-3	2.52318E-3	6.27461E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-8.17561E-1	-7.98821E-1	-9.13167E0	-9.14273E0	6.19888E-3	9.42945E-2	2.73269E1	-3.26921E1	-3.25641E1	2.68337E1	1.20243E-7	2.51972E-3	2.51972E-3	6.31283E-3	3.00766E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09356E0	-8.1799E-1	-7.98392E-1	-9.13181E0	-9.14311E0	6.12736E-3	9.43422E-2	2.7324E1	-3.26301E1	-3.26136E1	2.68418E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.18133E-1	-7.98392E-1	-9.13193E0	-9.14319E0	6.27041E-3	9.40323E-2	2.73063E1	-3.26627E1	-3.26176E1	2.68536E1	1.20209E-7	2.51525E-3	2.51525E-3	6.3723E-3	3.01223E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.17871E-1	-7.98988E-1	-9.13186E0	-9.14328E0	6.1512E-3	9.41753E-2	2.73147E1	-3.26759E1	-3.2653E1	2.68418E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.17752E-1	-7.98702E-1	-9.13184E0	-9.14338E0	6.03199E-3	9.38654E-2	2.72951E1	-3.26685E1	-3.26154E1	2.68334E1	1.2026E-7	2.51203E-3	2.51203E-3	6.33977E-3	3.01223E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.17752E-1	-7.98273E-1	-9.13196E0	-9.14335E0	5.65052E-3	9.41753E-2	2.73358E1	-3.27015E1	-3.26325E1	2.68343E1	1.20004E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.17895E-1	-7.98774E-1	-9.13191E0	-9.14352E0	6.05583E-3	9.41277E-2	2.7351E1	-3.26585E1	-3.26027E1	2.68294E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00966E-1