[Scan]
initial_time=2016-01-15T22:54:19
final_time=2016-01-15T22:54:38
ip_count=19
run=1023
dataset=3
scan=234
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08768E-4
ql1_vset=
ql1_vmon=-8.17728E-1
ql1_imon=6.79374E-10
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=3.34847E-10
ql3_vset=
ql3_vmon=-9.13184E0
ql3_imon=4.37689E-10
ql4_vset=
ql4_vmon=-9.1433E0
ql4_imon=6.41048E-10
mult1=-9.68259E-9
mult2=-2.58391E-9
rf_tmon=-5.4663E-3
rf_agc=3.30065E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=4.29714E-10
bslens_vset=-6.2E0
bslens_vmon=-6.73103E0
bslens_imon=2.38274E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19719E1
lens5a_imon=2.02741E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12514E2
lens4a_imon=2.05021E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=2.85224E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04679E2
lens23_imon=1.02089E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04579E1
cs_ea1_imon=2.53427E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41702E0
lens1_imon=2.58101E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64915E1
os_ef1alow_imon=2.98703E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.52308E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84046E1
cs_ef1a_imon=2.96252E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=4.29928E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=2.8353E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14753E1
os_ea1_imon=1.89475E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63545E1
os_ef1bup_imon=3.09082E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27313E0
cs_ionrep_imon=1.20332E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9193E2
cs_nozzle_imon=1.93651E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02097E1
cs_anode1_imon=3.00721E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=7.71153E-10
tplens_vset=1.4E-1
tplens_vmon=1.66186E0
tplens_imon=-2.99346E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25786E1
iondef3_imon=1.52128E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2687E1
iondef2_imon=1.55733E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02997E2
lens6_imon=2.97971E-4
ql6_vset=1.0E-1
ql6_vmon=9.4223E-2
ql6_imon=4.69971E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29656E0
ionrepsh_imon=1.81075E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33526E1
lens5b_imon=2.19216E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74838E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.26489E-1
os_ea2_imon=-4.68779E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00828E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.14236E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64621E0
os_ef2alow_imon=-2.20505E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.25345E-1
os_ef2bup_imon=-5.20715E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1122E1
os_restr2_imon=2.85908E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.27981E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01581E1
cs_anode2_imon=2.25902E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73544E1
iondef1_imon=1.12077E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68731E1
iondef4_imon=1.10359E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.19241E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=2.86853E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13134E0
cs_ionaccel_imon=-1.92033E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02117E2
cs_ionfocb_imon=1.47525E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.86804E-6
window_vset=0.0E0
window_vmon=2.71402E-1
window_imon=-6.58946E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82653E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86326E1
mask2_imon=-6.91381E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92691E3
multa_neg_imon=7.51619E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93678E3
defgrida_imon=6.89614E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=6.89614E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.25119E0
defgridb_imon=6.2869E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33997E1
os_fil1_imon=5.65319E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.73147E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6737E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30831E1
cs_fil1_imon=9.97116E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62774E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68593E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.55092E-2
os_fil2_imon=-2.48577E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.83939E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.17585E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31982E-1
cs_fil2_imon=-2.70201E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.13972E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22868E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.323E-3
inlet_lpb_pmon=3.0E-1
chamber_ion_pmon=1.20276E-7
chamber_cvt_pmon=2.51679E-3
foreline_cvt_pmon=2.51679E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.38579E-1
res40_imon=-2.21946E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09387E0	-8.18038E-1	-7.98321E-1	-9.13198E0	-9.14299E0	6.10352E-3	9.45091E-2	2.73428E1	-3.26543E1	-3.26101E1	2.6803E1	1.2033E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.03185E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.18157E-1	-7.98416E-1	-9.13191E0	-9.14311E0	6.03199E-3	9.42707E-2	2.73394E1	-3.26744E1	-3.26609E1	2.685E1	1.20363E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.9892E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.18133E-1	-7.98321E-1	-9.13162E0	-9.14283E0	6.24657E-3	9.42707E-2	2.73293E1	-3.26537E1	-3.26673E1	2.68366E1	1.20084E-7	2.51359E-3	2.51359E-3	6.32978E-3	2.9829E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.18276E-1	-7.98392E-1	-9.13138E0	-9.14314E0	5.96046E-3	9.41515E-2	2.73316E1	-3.26838E1	-3.25894E1	2.68725E1	1.20055E-7	2.52492E-3	2.52492E-3	6.31817E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.17895E-1	-7.98082E-1	-9.13167E0	-9.14309E0	6.07967E-3	9.40561E-2	2.73141E1	-3.27011E1	-3.2635E1	2.68538E1	1.19749E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.17752E-1	-7.9844E-1	-9.13186E0	-9.14323E0	5.96046E-3	9.40084E-2	2.73128E1	-3.2682E1	-3.26685E1	2.68526E1	1.19809E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.17633E-1	-7.98059E-1	-9.13169E0	-9.14319E0	6.17504E-3	9.42707E-2	2.73135E1	-3.27119E1	-3.26224E1	2.68522E1	1.19809E-7	2.52209E-3	2.52209E-3	6.28552E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.17895E-1	-7.98392E-1	-9.13205E0	-9.14283E0	6.05583E-3	9.43661E-2	2.73381E1	-3.26362E1	-3.265E1	2.68724E1	1.20158E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.97901E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.17561E-1	-7.98655E-1	-9.13205E0	-9.14326E0	5.96046E-3	9.43661E-2	2.73257E1	-3.26549E1	-3.26467E1	2.6847E1	1.20137E-7	2.52139E-3	2.52139E-3	6.34099E-3	2.99879E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.17513E-1	-7.9875E-1	-9.13169E0	-9.14314E0	6.07967E-3	9.43184E-2	2.7358E1	-3.27077E1	-3.25864E1	2.6849E1	1.20092E-7	2.52342E-3	2.52342E-3	6.33388E-3	3.00852E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.17394E-1	-7.98774E-1	-9.13169E0	-9.14314E0	5.45979E-3	9.41753E-2	2.74113E1	-3.27086E1	-3.26319E1	2.68304E1	1.19965E-7	2.51443E-3	2.51443E-3	6.27461E-3	3.03976E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09627E0	-8.17227E-1	-7.98512E-1	-9.13179E0	-9.14292E0	5.76973E-3	9.408E-2	2.73399E1	-3.26861E1	-3.2635E1	2.6828E1	1.20278E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.03449E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.17585E-1	-7.98607E-1	-9.13184E0	-9.14311E0	6.12736E-3	9.41038E-2	2.73099E1	-3.26585E1	-3.26543E1	2.68617E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.02659E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.17299E-1	-7.98726E-1	-9.1315E0	-9.14328E0	6.03199E-3	9.44614E-2	2.72943E1	-3.26038E1	-3.26903E1	2.68458E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9978E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.17609E-1	-7.98607E-1	-9.13153E0	-9.14333E0	5.88894E-3	9.4533E-2	2.71735E1	-3.26008E1	-3.28681E1	2.68304E1	1.20106E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.17585E-1	-7.98726E-1	-9.13167E0	-9.14295E0	6.29425E-3	9.41277E-2	2.73128E1	-3.27139E1	-3.26054E1	2.68665E1	1.19809E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9978E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.17442E-1	-7.9875E-1	-9.13174E0	-9.14316E0	6.07967E-3	9.38177E-2	2.73273E1	-3.26482E1	-3.2596E1	2.6837E1	1.19965E-7	2.5188E-3	2.5188E-3	6.27461E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.17919E-1	-7.98297E-1	-9.13167E0	-9.14335E0	6.07967E-3	9.43422E-2	2.73822E1	-3.26295E1	-3.2575E1	2.6818E1	1.20158E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.02769E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.1768E-1	-7.98416E-1	-9.13174E0	-9.14323E0	5.8651E-3	9.42945E-2	2.73448E1	-3.26585E1	-3.26316E1	2.6839E1	1.20142E-7	2.52236E-3	2.52236E-3	6.32328E-3	3.01356E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.17728E-1	-7.9844E-1	-9.13184E0	-9.1433E0	5.74589E-3	9.4223E-2	2.73544E1	-3.2687E1	-3.25786E1	2.68731E1	1.20276E-7	2.51679E-3	2.51679E-3	6.323E-3	3.0E-1