[Scan]
initial_time=2016-01-15T22:54:45
final_time=2016-01-15T22:55:05
ip_count=19
run=1023
dataset=3
scan=235
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08816E-4
ql1_vset=
ql1_vmon=-8.17537E-1
ql1_imon=6.71673E-10
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=3.14975E-10
ql3_vset=
ql3_vmon=-9.13172E0
ql3_imon=4.4651E-10
ql4_vset=
ql4_vmon=-9.14326E0
ql4_imon=6.14393E-10
mult1=-9.80059E-9
mult2=-2.76452E-9
rf_tmon=-4.09185E-3
rf_agc=3.367E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=4.49955E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67034E0
bslens_imon=2.3575E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20073E1
lens5a_imon=1.99677E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.0492E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53989E1
cs_ef1b_imon=2.86773E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04589E2
lens23_imon=1.02251E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04634E1
cs_ea1_imon=2.52706E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38578E0
lens1_imon=2.70719E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64855E1
os_ef1alow_imon=2.98847E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04051E1
cs_ea2_imon=1.54399E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8455E1
cs_ef1a_imon=2.96288E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=4.74799E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1131E1
os_restr1_imon=2.82989E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15185E1
os_ea1_imon=1.86735E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2551E0
cs_ionrep_imon=1.18421E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91932E2
cs_nozzle_imon=1.9368E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=3.02343E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=8.78143E-10
tplens_vset=1.4E-1
tplens_vmon=1.58075E0
tplens_imon=-3.13766E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26404E1
iondef3_imon=1.50686E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26621E1
iondef2_imon=1.56345E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0305E2
lens6_imon=2.98285E-4
ql6_vset=1.0E-1
ql6_vmon=9.41753E-2
ql6_imon=4.55916E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3284E0
ionrepsh_imon=1.79561E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34072E1
lens5b_imon=2.1626E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.13803E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85032E-1
os_ea2_imon=-3.8226E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00561E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.13911E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6348E0
os_ef2alow_imon=-2.32037E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.37958E-1
os_ef2bup_imon=-5.01254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1125E1
os_restr2_imon=2.8699E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.30649E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.26551E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73532E1
iondef1_imon=1.0995E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68545E1
iondef4_imon=1.10864E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=2.24248E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=2.70247E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15177E0
cs_ionaccel_imon=-1.79419E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47522E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56784E1
einzel_imon=7.70946E-6
window_vset=0.0E0
window_vmon=2.70201E-1
window_imon=-7.05797E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82698E2
mask1_imon=2.39196E-4
mask2_vset=0.0E0
mask2_vmon=-1.8608E1
mask2_imon=-7.67065E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92684E3
multa_neg_imon=7.56666E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.74834E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=6.97185E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42562E0
defgridb_imon=6.20759E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.34019E1
os_fil1_imon=4.17556E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.88164E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67628E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30857E1
cs_fil1_imon=9.97861E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62714E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68703E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6412E-2
os_fil2_imon=-2.39567E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.31991E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.13074E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3263E-1
cs_fil2_imon=-2.22148E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19028E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22775E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.02659E-1
chamber_ion_pmon=1.20278E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.73107E-1
res40_imon=-2.29154E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=237
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.18062E-1	-7.99036E-1	-9.13174E0	-9.14321E0	5.93662E-3	9.41515E-2	2.72937E1	-3.26822E1	-3.26011E1	2.68758E1	1.19757E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00824E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.17537E-1	-7.99012E-1	-9.1316E0	-9.1429E0	6.03199E-3	9.43899E-2	2.73558E1	-3.26868E1	-3.26483E1	2.68528E1	1.20038E-7	2.51793E-3	2.51793E-3	6.33706E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09619E0	-8.17585E-1	-7.99084E-1	-9.13186E0	-9.14314E0	6.05583E-3	9.43184E-2	2.73523E1	-3.26824E1	-3.26317E1	2.68306E1	1.19991E-7	2.52483E-3	2.52483E-3	6.31974E-3	3.0102E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.17776E-1	-7.98845E-1	-9.13193E0	-9.14314E0	6.17504E-3	9.44376E-2	2.73614E1	-3.26774E1	-3.26389E1	2.68569E1	1.20276E-7	2.51679E-3	2.51679E-3	6.3126E-3	3.0E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.17609E-1	-7.98893E-1	-9.13181E0	-9.14307E0	6.00815E-3	9.41753E-2	2.73322E1	-3.26437E1	-3.25989E1	2.68331E1	1.20031E-7	2.51581E-3	2.51581E-3	6.33538E-3	3.0041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.178E-1	-7.98893E-1	-9.13188E0	-9.14295E0	6.27041E-3	9.40323E-2	2.73411E1	-3.26561E1	-3.262E1	2.68442E1	1.20311E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.17394E-1	-7.99179E-1	-9.13191E0	-9.14316E0	5.79357E-3	9.43899E-2	2.73351E1	-3.26723E1	-3.26266E1	2.68346E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.1749E-1	-7.98464E-1	-9.13196E0	-9.14319E0	6.12736E-3	9.42469E-2	2.73022E1	-3.26498E1	-3.25912E1	2.68088E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-8.1737E-1	-7.98702E-1	-9.1321E0	-9.14328E0	5.81741E-3	9.42707E-2	2.73135E1	-3.26807E1	-3.26176E1	2.68551E1	1.20209E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.99941E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.17418E-1	-7.98798E-1	-9.13196E0	-9.14328E0	6.29425E-3	9.41753E-2	2.72931E1	-3.26855E1	-3.26807E1	2.68623E1	1.20004E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.02769E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.17537E-1	-7.98631E-1	-9.13172E0	-9.14328E0	6.50883E-3	9.41515E-2	2.73393E1	-3.26585E1	-3.26687E1	2.68316E1	1.20174E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.02133E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.17227E-1	-7.98702E-1	-9.13188E0	-9.14316E0	5.88894E-3	9.41992E-2	2.72961E1	-3.26651E1	-3.26374E1	2.68208E1	1.20017E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.02659E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.17704E-1	-7.99084E-1	-9.13162E0	-9.14304E0	6.12736E-3	9.40323E-2	2.73706E1	-3.26735E1	-3.26332E1	2.68767E1	1.19861E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.02396E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-8.17871E-1	-7.9844E-1	-9.13169E0	-9.14297E0	5.98431E-3	9.44614E-2	2.73177E1	-3.26669E1	-3.26717E1	2.68406E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.17657E-1	-7.98941E-1	-9.13215E0	-9.14273E0	5.98431E-3	9.45807E-2	2.73027E1	-3.26248E1	-3.26933E1	2.68069E1	1.19809E-7	2.51007E-3	2.51007E-3	6.32386E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.17537E-1	-7.98512E-1	-9.13186E0	-9.14283E0	6.07967E-3	9.408E-2	2.73435E1	-3.26651E1	-3.26134E1	2.68302E1	1.19872E-7	2.51804E-3	2.51804E-3	6.34099E-3	3.00676E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.17299E-1	-7.99131E-1	-9.13181E0	-9.14288E0	5.72205E-3	9.42707E-2	2.73333E1	-3.26658E1	-3.26303E1	2.68724E1	1.20055E-7	2.52492E-3	2.52492E-3	6.30202E-3	2.9943E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.17728E-1	-7.99036E-1	-9.13198E0	-9.1434E0	5.57899E-3	9.43422E-2	2.73543E1	-3.26967E1	-3.25797E1	2.68273E1	1.19713E-7	2.51136E-3	2.51136E-3	6.30182E-3	3.0041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.17609E-1	-7.98178E-1	-9.13172E0	-9.1433E0	5.72205E-3	9.4533E-2	2.73051E1	-3.26614E1	-3.26325E1	2.68106E1	1.19941E-7	2.51814E-3	2.51814E-3	6.31798E-3	3.01104E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.17537E-1	-7.98535E-1	-9.13172E0	-9.14326E0	5.55515E-3	9.41753E-2	2.73532E1	-3.26621E1	-3.26404E1	2.68545E1	1.20278E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02659E-1