[Scan]
initial_time=2016-01-15T22:55:39
final_time=2016-01-15T22:55:58
ip_count=19
run=1023
dataset=3
scan=237
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.17919E-1
ql1_imon=7.4867E-10
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=3.26037E-10
ql3_vset=
ql3_vmon=-9.13198E0
ql3_imon=4.68099E-10
ql4_vset=
ql4_vmon=-9.14311E0
ql4_imon=6.48606E-10
mult1=-9.6294E-9
mult2=-2.74089E-9
rf_tmon=-4.9696E-3
rf_agc=3.33032E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.24657E-3
ql5_imon=4.29523E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66313E0
bslens_imon=2.27099E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1928E1
lens5a_imon=2.01083E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12524E2
lens4a_imon=2.05028E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53953E1
cs_ef1b_imon=2.86845E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02208E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04802E1
cs_ea1_imon=2.51985E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39179E0
lens1_imon=2.65672E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.96828E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03979E1
cs_ea2_imon=1.55012E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84226E1
cs_ef1a_imon=2.95855E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=4.5985E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1122E1
os_restr1_imon=2.84539E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15113E1
os_ea1_imon=1.90232E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63359E1
os_ef1bup_imon=3.09839E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23768E0
cs_ionrep_imon=1.20296E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.93416E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=3.03388E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=7.2571E-10
tplens_vset=1.4E-1
tplens_vmon=1.6186E0
tplens_imon=-5.73322E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26484E1
iondef3_imon=1.50758E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26927E1
iondef2_imon=1.56742E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03017E2
lens6_imon=2.98101E-4
ql6_vset=1.0E-1
ql6_vmon=9.4223E-2
ql6_imon=4.68552E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28574E0
ionrepsh_imon=1.81292E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3361E1
lens5b_imon=2.17918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74844E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.0546E-1
os_ea2_imon=-6.67051E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00583E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.15785E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63239E0
os_ef2alow_imon=-2.37804E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.36156E-1
os_ef2bup_imon=-5.24679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11358E1
os_restr2_imon=2.86485E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.29171E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.24425E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73204E1
iondef1_imon=1.10274E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68383E1
iondef4_imon=1.09999E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.17086E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81307E-1
olens1_imon=3.56519E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15297E0
cs_ionaccel_imon=-1.75816E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47396E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56555E1
einzel_imon=7.62657E-6
window_vset=0.0E0
window_vmon=2.71402E-1
window_imon=-5.32807E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82674E2
mask1_imon=2.3938E-4
mask2_vset=0.0E0
mask2_vmon=-1.86104E1
mask2_imon=-6.37322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92602E3
multa_neg_imon=7.77214E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.89254E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.43328E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48277E0
defgridb_imon=6.11026E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.34014E1
os_fil1_imon=4.28368E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.72547E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67693E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30873E1
cs_fil1_imon=9.97182E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63417E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68791E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.71858E-2
os_fil2_imon=-2.49778E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.29879E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.05082E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.56386E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01608E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2285E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.01939E-1
res40_imon=-2.4357E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.17466E-1	-7.98512E-1	-9.13181E0	-9.1428E0	5.88894E-3	9.408E-2	2.73387E1	-3.26762E1	-3.26236E1	2.68383E1	1.19861E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00563E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09627E0	-8.18324E-1	-7.98559E-1	-9.13172E0	-9.14302E0	5.88894E-3	9.42945E-2	2.73173E1	-3.26811E1	-3.27087E1	2.68319E1	1.19595E-7	2.51525E-3	2.51525E-3	6.28056E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.17943E-1	-7.98988E-1	-9.13134E0	-9.14307E0	5.84126E-3	9.42707E-2	2.73393E1	-3.26679E1	-3.26661E1	2.68464E1	1.19872E-7	2.52473E-3	2.52473E-3	6.34099E-3	2.9829E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.17609E-1	-7.99084E-1	-9.13138E0	-9.14307E0	5.88894E-3	9.41515E-2	2.73485E1	-3.26674E1	-3.25978E1	2.68487E1	1.20004E-7	2.51739E-3	2.51739E-3	6.35601E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.17418E-1	-7.98965E-1	-9.13153E0	-9.14316E0	6.00815E-3	9.4223E-2	2.73123E1	-3.2629E1	-3.26206E1	2.68118E1	1.19923E-7	2.51831E-3	2.51831E-3	6.30263E-3	3.00016E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.17657E-1	-7.98988E-1	-9.13177E0	-9.14309E0	6.03199E-3	9.43184E-2	2.7263E1	-3.26338E1	-3.26657E1	2.68265E1	1.20244E-7	2.52362E-3	2.52362E-3	6.29624E-3	3.03081E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.17776E-1	-7.98607E-1	-9.13174E0	-9.14302E0	5.76973E-3	9.44376E-2	2.73382E1	-3.26487E1	-3.26156E1	2.68308E1	1.20106E-7	2.51525E-3	2.51525E-3	6.34518E-3	3.02511E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.17728E-1	-7.9875E-1	-9.13184E0	-9.14311E0	5.62668E-3	9.43422E-2	2.73193E1	-3.26549E1	-3.26596E1	2.68563E1	1.19554E-7	2.5147E-3	2.5147E-3	6.34099E-3	3.0201E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.18014E-1	-7.98726E-1	-9.13191E0	-9.14333E0	5.88894E-3	9.43184E-2	2.73124E1	-3.26603E1	-3.26456E1	2.68481E1	1.20158E-7	2.51096E-3	2.51096E-3	6.32356E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.18086E-1	-7.98512E-1	-9.13203E0	-9.14347E0	5.67436E-3	9.42469E-2	2.73664E1	-3.26651E1	-3.26212E1	2.68935E1	1.19978E-7	2.51359E-3	2.51359E-3	6.31858E-3	3.00942E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.17823E-1	-7.98965E-1	-9.13208E0	-9.14309E0	5.93662E-3	9.44614E-2	2.73423E1	-3.26732E1	-3.26555E1	2.68331E1	1.20062E-7	2.52297E-3	2.52297E-3	6.31012E-3	2.98831E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.18181E-1	-7.99084E-1	-9.132E0	-9.14326E0	6.24657E-3	9.43184E-2	2.73387E1	-3.26627E1	-3.2635E1	2.68124E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.18038E-1	-7.9906E-1	-9.13196E0	-9.14326E0	5.88894E-3	9.43661E-2	2.73099E1	-3.26518E1	-3.26386E1	2.68356E1	1.19913E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.17752E-1	-7.98988E-1	-9.13191E0	-9.14304E0	5.84126E-3	9.45091E-2	2.73369E1	-3.27101E1	-3.26128E1	2.68157E1	1.19861E-7	2.52099E-3	2.52099E-3	6.29645E-3	2.9926E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.1768E-1	-7.98941E-1	-9.13224E0	-9.14299E0	5.88894E-3	9.4223E-2	2.73123E1	-3.26651E1	-3.26296E1	2.68376E1	1.20017E-7	2.52099E-3	2.52099E-3	6.29645E-3	2.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.17943E-1	-7.98607E-1	-9.13198E0	-9.14309E0	5.79357E-3	9.43184E-2	2.7347E1	-3.26968E1	-3.26236E1	2.68857E1	1.2054E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.02922E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.18419E-1	-7.98559E-1	-9.13191E0	-9.1429E0	5.91278E-3	9.4223E-2	2.72845E1	-3.26791E1	-3.2675E1	2.6869E1	1.19705E-7	2.50898E-3	2.50898E-3	6.29645E-3	3.03449E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.18372E-1	-7.98678E-1	-9.13205E0	-9.14299E0	5.96046E-3	9.44138E-2	2.72756E1	-3.26189E1	-3.26278E1	2.68442E1	1.20192E-7	2.51814E-3	2.51814E-3	6.31269E-3	3.03637E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.17966E-1	-7.98392E-1	-9.13179E0	-9.1429E0	5.8651E-3	9.41038E-2	2.737E1	-3.26603E1	-3.26212E1	2.68418E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.17919E-1	-7.98512E-1	-9.13198E0	-9.14311E0	6.24657E-3	9.4223E-2	2.73204E1	-3.26927E1	-3.26484E1	2.68383E1	1.20174E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00041E-1