[Scan]
initial_time=2016-01-15T22:56:05
final_time=2016-01-15T22:56:25
ip_count=19
run=1023
dataset=3
scan=238
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.3
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08823E-4
ql1_vset=
ql1_vmon=-8.17299E-1
ql1_imon=6.71113E-10
ql2_vset=
ql2_vmon=-7.99108E-1
ql2_imon=3.6006E-10
ql3_vset=
ql3_vmon=-9.13181E0
ql3_imon=3.95072E-10
ql4_vset=
ql4_vmon=-9.14345E0
ql4_imon=5.86891E-10
mult1=-9.2106E-9
mult2=-2.79047E-9
rf_tmon=-4.91498E-3
rf_agc=3.2895E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.17504E-3
ql5_imon=4.30179E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69558E0
bslens_imon=2.50891E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19983E1
lens5a_imon=2.00903E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.04887E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5385E1
cs_ef1b_imon=2.87278E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.02294E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04838E1
cs_ea1_imon=2.52742E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40681E0
lens1_imon=2.66032E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64951E1
os_ef1alow_imon=2.9845E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0354E1
cs_ea2_imon=1.52272E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.841E1
cs_ef1a_imon=2.93657E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=4.48275E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11844E1
os_restr1_imon=2.84142E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1542E1
os_ea1_imon=1.89583E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63239E1
os_ef1bup_imon=3.10848E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2533E0
cs_ionrep_imon=1.21269E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91933E2
cs_nozzle_imon=1.93618E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=3.00468E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=7.95269E-10
tplens_vset=1.4E-1
tplens_vmon=1.66366E0
tplens_imon=-4.00285E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26777E1
iondef3_imon=1.47766E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26693E1
iondef2_imon=1.5703E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98404E-4
ql6_vset=1.0E-1
ql6_vmon=9.408E-2
ql6_imon=4.68552E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2521E0
ionrepsh_imon=1.7985E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3373E1
lens5b_imon=2.19036E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74976E1
cs_ef2b_imon=3.11569E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.07863E-1
os_ea2_imon=-4.72384E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06117E2
lens4b_imon=2.00745E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71426E1
cs_ef2a_imon=3.16686E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64501E0
os_ef2alow_imon=-2.54742E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.46968E-1
os_ef2bup_imon=-5.09182E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1131E1
os_restr2_imon=2.86701E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23121E2
cs_ionfoca_imon=6.2809E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02031E1
cs_anode2_imon=2.25398E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72943E1
iondef1_imon=1.11896E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6855E1
iondef4_imon=1.09242E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.16044E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81212E-1
olens1_imon=3.41976E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14876E0
cs_ionaccel_imon=-1.80501E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47637E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56351E1
einzel_imon=7.70586E-6
window_vset=0.0E0
window_vmon=2.29956E-1
window_imon=-8.7158E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.8632E1
mask2_imon=-6.01282E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92537E3
multa_neg_imon=7.70365E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93665E3
defgrida_imon=7.35397E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=5.8507E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41359E0
defgridb_imon=6.33377E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.34008E1
os_fil1_imon=5.80335E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.42223E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67693E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30821E1
cs_fil1_imon=9.95693E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61999E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68663E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.55092E-2
os_fil2_imon=-2.28755E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.01608E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.07789E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.83415E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22896E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.04063E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.18757E-1
res40_imon=-2.62311E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.17418E-1	-7.99108E-1	-9.13172E0	-9.14297E0	5.84126E-3	9.41277E-2	2.7324E1	-3.26779E1	-3.26354E1	2.68352E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09688E0	-8.17943E-1	-7.98488E-1	-9.13196E0	-9.14304E0	5.8651E-3	9.4533E-2	2.73394E1	-3.26676E1	-3.26474E1	2.68184E1	1.20106E-7	2.51739E-3	2.51739E-3	6.34518E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0965E0	-8.17728E-1	-7.98464E-1	-9.13179E0	-9.14333E0	5.84126E-3	9.42707E-2	2.73636E1	-3.26805E1	-3.26196E1	2.68516E1	1.20084E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.00676E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.17585E-1	-7.98559E-1	-9.13222E0	-9.14307E0	5.88894E-3	9.42469E-2	2.73267E1	-3.26795E1	-3.26362E1	2.6807E1	1.20042E-7	2.51919E-3	2.51919E-3	6.32328E-3	3.03891E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.17394E-1	-7.98869E-1	-9.13219E0	-9.14316E0	5.6982E-3	9.45091E-2	2.73514E1	-3.26573E1	-3.26224E1	2.68358E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.02396E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.17657E-1	-7.98559E-1	-9.13188E0	-9.14299E0	5.6982E-3	9.43422E-2	2.73222E1	-3.26732E1	-3.26024E1	2.68232E1	1.20122E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.17585E-1	-7.98941E-1	-9.13203E0	-9.14311E0	5.62668E-3	9.40561E-2	2.73479E1	-3.26756E1	-3.26474E1	2.68689E1	1.20055E-7	2.51525E-3	2.51525E-3	6.29128E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09619E0	-8.178E-1	-7.98845E-1	-9.132E0	-9.1433E0	5.93662E-3	9.41277E-2	2.73664E1	-3.26661E1	-3.26207E1	2.6819E1	1.20191E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.00942E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.1799E-1	-7.9875E-1	-9.13198E0	-9.14316E0	5.98431E-3	9.42469E-2	2.73334E1	-3.26673E1	-3.25888E1	2.68569E1	1.20055E-7	2.52061E-3	2.52061E-3	6.28056E-3	3.03027E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0965E0	-8.17823E-1	-7.98988E-1	-9.13196E0	-9.14295E0	6.07967E-3	9.42707E-2	2.7324E1	-3.26773E1	-3.2682E1	2.68273E1	1.20209E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.02511E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09657E0	-8.17823E-1	-7.98726E-1	-9.1321E0	-9.14311E0	6.10352E-3	9.43661E-2	2.73003E1	-3.26651E1	-3.26669E1	2.68226E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.9892E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.1768E-1	-7.98583E-1	-9.13196E0	-9.14314E0	5.76973E-3	9.43422E-2	2.73147E1	-3.26783E1	-3.26567E1	2.6849E1	1.19766E-7	2.52139E-3	2.52139E-3	6.32978E-3	2.9829E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.1799E-1	-7.98368E-1	-9.13177E0	-9.14319E0	5.81741E-3	9.42707E-2	2.73111E1	-3.26705E1	-3.2611E1	2.68406E1	1.19953E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.98665E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.17394E-1	-7.99036E-1	-9.13172E0	-9.14316E0	6.00815E-3	9.41038E-2	2.73147E1	-3.26927E1	-3.26494E1	2.68256E1	1.20174E-7	2.50898E-3	2.50898E-3	6.31837E-3	3.01085E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.17657E-1	-7.99084E-1	-9.13205E0	-9.14323E0	6.10352E-3	9.41038E-2	2.73467E1	-3.26701E1	-3.26499E1	2.67872E1	1.2033E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.17466E-1	-7.98774E-1	-9.13198E0	-9.14311E0	6.22272E-3	9.408E-2	2.73293E1	-3.26413E1	-3.2639E1	2.67631E1	1.20084E-7	2.52139E-3	2.52139E-3	6.3074E-3	3.03887E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0965E0	-8.17752E-1	-7.98631E-1	-9.13167E0	-9.14326E0	6.34193E-3	9.42469E-2	2.73225E1	-3.265E1	-3.26236E1	2.68322E1	1.2026E-7	2.52169E-3	2.52169E-3	6.33436E-3	3.02511E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.17537E-1	-7.98726E-1	-9.13143E0	-9.1434E0	6.17504E-3	9.39131E-2	2.7321E1	-3.26467E1	-3.2616E1	2.68441E1	1.20069E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.02396E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.17442E-1	-7.99203E-1	-9.13179E0	-9.1433E0	5.72205E-3	9.39608E-2	2.73021E1	-3.26508E1	-3.26042E1	2.68292E1	1.19902E-7	2.52384E-3	2.52384E-3	6.29665E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.17299E-1	-7.99108E-1	-9.13181E0	-9.14345E0	6.17504E-3	9.408E-2	2.72943E1	-3.26693E1	-3.26777E1	2.6855E1	1.20055E-7	2.52384E-3	2.52384E-3	6.32896E-3	3.04063E-1