[Scan]
initial_time=2016-01-18T16:23:07
final_time=2016-01-18T16:23:27
ip_count=19
run=1024
dataset=1
scan=4
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.80442E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-7.58278E-10
ql2_vset=
ql2_vmon=4.52995E-4
ql2_imon=1.21307E-9
ql3_vset=
ql3_vmon=-8.80018E1
ql3_imon=-2.48343E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=1.34077E-8
mult1=-9.2885E-9
mult2=-2.60015E-9
rf_tmon=-5.69433E-3
rf_agc=3.29412E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.24249E-3
ql5_imon=6.41763E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6367E0
bslens_imon=2.52694E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1967E1
lens5a_imon=1.99749E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12586E2
lens4a_imon=2.04804E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54169E1
cs_ef1b_imon=2.89332E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04688E2
lens23_imon=1.02218E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04237E1
cs_ea1_imon=2.49281E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97887E0
lens1_imon=1.56081E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64945E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03732E1
cs_ea2_imon=1.48703E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=2.94738E-5
olens2_vset=0.0E0
olens2_vmon=1.09673E-3
olens2_imon=1.10729E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11382E1
os_restr1_imon=4.26463E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14753E1
os_ea1_imon=2.31437E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63882E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19682E0
cs_ionrep_imon=1.18277E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.921E2
cs_nozzle_imon=1.93507E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02127E1
cs_anode1_imon=2.98018E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99969E1
olens4_imon=4.22198E-9
tplens_vset=0.0E0
tplens_vmon=-1.71954E0
tplens_imon=-1.65963E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99057E1
iondef3_imon=8.70583E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98428E1
iondef2_imon=9.27902E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0332E2
lens6_imon=2.98137E-4
ql6_vset=1.0E-1
ql6_vmon=9.79185E-2
ql6_imon=8.60655E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23467E0
ionrepsh_imon=1.7675E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34024E1
lens5b_imon=2.15467E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74363E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.28454E0
os_ea2_imon=-5.48088E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06218E2
lens4b_imon=2.00853E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7163E1
cs_ef2a_imon=3.17407E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07258E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.29259E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11087E1
os_restr2_imon=3.41842E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23116E2
cs_ionfoca_imon=6.28811E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.23452E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5825E1
iondef1_imon=5.28473E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50107E1
iondef4_imon=5.40653E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27951E1
olens3_imon=2.56907E-8
olens1_vset=0.0E0
olens1_vmon=1.50204E-3
olens1_imon=1.28428E-6
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17879E0
cs_ionaccel_imon=-1.6176E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02178E2
cs_ionfocb_imon=1.47374E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.75992E-6
window_vset=0.0E0
window_vmon=2.72603E-1
window_imon=-7.56253E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82865E2
mask1_imon=2.3925E-4
mask2_vset=0.0E0
mask2_vmon=-1.87209E1
mask2_imon=-7.63461E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.38281E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.39866E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=6.98626E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24216E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33165E1
os_fil1_imon=9.4588E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07569E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66829E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30424E1
cs_fil1_imon=9.97747E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62444E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68445E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.78996E-2
os_fil2_imon=-2.93627E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82097E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=7.65957E-2
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37032E-1
cs_fil2_imon=-2.84016E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.81826E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22591E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.81516E-1
res40_imon=-2.65915E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.568E3	0.0E0	1.47E2	4.1E1	-7.10825E-2	-8.80016E1	4.76837E-5	-8.80024E1	9.05991E-4	2.95639E-3	9.78231E-2	1.58162E1	-1.98057E1	-1.99107E1	1.5031E1	2.22364E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.11115E-2
2.0E0	3.462E3	3.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80016E1	2.14577E-4	-8.80021E1	1.19209E-3	3.19481E-3	9.79185E-2	1.57814E1	-1.98299E1	-1.99195E1	1.50228E1	2.21779E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.10249E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.09279E-2	-8.80021E1	7.15256E-5	-8.8002E1	1.09673E-3	3.21865E-3	9.76324E-2	1.58227E1	-1.98399E1	-1.99184E1	1.49945E1	2.22347E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.11509E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.15461E-2	-8.80015E1	1.66893E-4	-8.80023E1	9.77516E-4	3.26633E-3	9.75132E-2	1.57735E1	-1.98218E1	-1.99258E1	1.50515E1	2.23487E-9	2.51525E-3	2.51525E-3	6.33977E-3	2.1007E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17007E-2	-8.80016E1	1.19209E-4	-8.80021E1	5.72205E-4	3.21865E-3	9.77278E-2	1.57987E1	-1.98531E1	-1.99342E1	1.5013E1	2.24207E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.10748E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.11597E-2	-8.80019E1	1.43051E-4	-8.80022E1	7.62939E-4	3.21865E-3	9.75847E-2	1.57967E1	-1.9847E1	-1.99154E1	1.50058E1	2.23332E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.12403E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.14689E-2	-8.80018E1	3.8147E-4	-8.80021E1	1.0252E-3	3.12328E-3	9.75609E-2	1.58059E1	-1.98116E1	-1.9936E1	1.50422E1	2.23964E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.11328E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80017E1	1.19209E-4	-8.80019E1	4.76837E-4	3.00407E-3	9.76563E-2	1.58323E1	-1.98038E1	-1.99462E1	1.50328E1	2.24109E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.12403E-2
1.2E1	8.9E1	0.0E0	4.85E2	3.23E2	-7.05415E-2	-8.80019E1	2.6226E-4	-8.80022E1	8.82149E-4	2.86102E-3	9.76324E-2	1.57855E1	-1.98296E1	-1.99197E1	1.4995E1	2.23623E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.12403E-2
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.05415E-2	-8.80017E1	2.38419E-5	-8.8002E1	5.72205E-4	2.81334E-3	9.79424E-2	1.58215E1	-1.9844E1	-1.99474E1	1.50292E1	2.24012E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.11666E-2
1.4E1	1.32E2	0.0E0	5.66E2	3.82E2	-7.03094E-2	-8.80018E1	1.43051E-4	-8.80019E1	6.67572E-4	2.59876E-3	9.79185E-2	1.5746E1	-1.97585E1	-1.9952E1	1.50178E1	2.23818E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.11666E-2
1.5E1	9.1E1	0.0E0	6.06E2	4.11E2	-7.00776E-2	-8.80017E1	1.66893E-4	-8.80022E1	8.34465E-4	2.88486E-3	9.79424E-2	1.58467E1	-1.98373E1	-1.99616E1	1.49854E1	2.23869E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.11689E-2
1.6E1	3.35E2	1.0E0	6.47E2	4.41E2	-7.15461E-2	-8.80016E1	3.8147E-4	-8.80022E1	8.10623E-4	3.21865E-3	9.78231E-2	1.58083E1	-1.98278E1	-1.99077E1	1.50214E1	2.24207E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.1185E-2
1.7E1	9.05E2	0.0E0	6.87E2	4.7E2	-7.18554E-2	-8.80015E1	1.43051E-4	-8.80025E1	8.34465E-4	3.00407E-3	9.77278E-2	1.58179E1	-1.98151E1	-1.99396E1	1.501E1	2.23468E-9	2.5225E-3	2.5225E-3	6.31858E-3	2.11829E-2
1.8E1	3.645E3	0.0E0	7.27E2	5.0E2	-7.13143E-2	-8.80015E1	1.19209E-4	-8.80024E1	5.48363E-4	2.93255E-3	9.77993E-2	1.58362E1	-1.98659E1	-1.99119E1	1.5023E1	2.23964E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.10608E-2
1.9E1	1.874E3	0.0E0	7.68E2	5.29E2	-7.15461E-2	-8.80015E1	-1.90735E-4	-8.80023E1	6.67572E-4	3.00407E-3	9.75609E-2	1.57939E1	-1.98158E1	-1.99408E1	1.50328E1	2.23107E-9	2.51096E-3	2.51096E-3	6.3074E-3	2.11509E-2
2.0E1	2.7E1	0.0E0	8.08E2	5.58E2	-7.17007E-2	-8.80017E1	7.15256E-5	-8.8002E1	8.10623E-4	3.05176E-3	9.77755E-2	1.58053E1	-1.98314E1	-1.99498E1	1.49936E1	2.24402E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.12218E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.13915E-2	-8.80018E1	1.19209E-4	-8.80021E1	4.05312E-4	3.05176E-3	9.78708E-2	1.58203E1	-1.98422E1	-1.99095E1	1.50476E1	2.22945E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.1185E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.09279E-2	-8.80017E1	1.90735E-4	-8.80022E1	5.72205E-4	3.21865E-3	9.78231E-2	1.57929E1	-1.98176E1	-1.99613E1	1.50241E1	2.23605E-9	2.5165E-3	2.5165E-3	6.31761E-3	2.11412E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80015E1	4.52995E-4	-8.80018E1	5.00679E-4	3.24249E-3	9.79185E-2	1.5825E1	-1.98428E1	-1.99057E1	1.50107E1					
